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SEMI F90-0304 E © SEMI 2004 6 R1-3 Design Example 3 R1-3.1 Seal Design — See Figure R 1-3. R1-3.2 Surface Hardness — The sea ling surface (the bottom of the counterbore ) has a m inimum hardness of 300 Vickers. The hardn…
SEMI F90-0304
E
© SEMI 2004 5
R1-2 Design Example 2
R1-2.1 Seal Design — See Figure R1-2.
R1-2.2 Surface Hardness — The sealing surface (the bottom of the counterbore) has a minimum hardness of 300
Vickers. The hardness may be tested per ISO 6507.
R1-2.3 Surface Roughness — The sealing surface (the bottom of the counterbore) has a surface roughness of 0.04
micrometers Ra max. The surface roughness may be tested per SEMI F37-0299.
R1-2.4 Surface Scratches — The sealing surface (the bottom of the counterbore) is without any lateral scratches
which are visible to non-magnified normal vision.
Figure R1-2
Design Example 2
SEMI F90-0304
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© SEMI 2004 6
R1-3 Design Example 3
R1-3.1 Seal Design — See Figure R1-3.
R1-3.2 Surface Hardness — The sealing surface (the bottom of the counterbore) has a minimum hardness of 300
Vickers. The hardness may be tested per ISO 6507.
R1-3.3 Surface Roughness — The sealing surface (the bottom of the counterbore) has a surface roughness of 0.1
micrometers Ra max. The surface roughness may be tested per SEMI F37-0299.
R1-3.4 Surface Scratches — The sealing surface (the bottom of the counterbore) is without any lateral scratches
which are visible to non-magnified normal vision.
Figure R1-3
Design Example 3
SEMI F90-0304
E
© SEMI 2004 7
R1-4 Design Example 4
R1-4.1 Seal Design — See Figure R1-4.
R1-4.2 Surface Hardness — The sealing surface (the bottom of the counterbore) has a minimum hardness of 300
Vickers. The hardness may be tested per ISO 6507.
R1-4.3 Surface Roughness — The sealing surface (the bottom of the counterbore) has a surface roughness of 0.2
micrometers Ra max. The surface roughness may be tested per SEMI F37-0299.
R1-4.4 Surface Scratches — The sealing surface (the bottom of the counterbore) is without any lateral scratches
which are visible to non-magnified normal vision.
Figure R1-4
Design Example 4
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