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SEMI E30-1103 © SEMI 1992, 2003 36 4.4.5.2 Enhanced Remote Command Scenario COMMENTS HOST EQUIPMENT COMMENT Enhanced Remote Command S2,F49--> <--S2,F50 EnhancedRemote Command Acknowledge [IF] Command Accepted (HCAC…

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RESUME — Command to resume processing from the
point where the process was paused.
ABORT — Command to terminate the current cycle
prior to its completion. Abort has the intent of
immediately stopping the process and is used because
of abnormal conditions. Abort makes no guarantee
about the subsequent condition of material. In the
above example, the wafers being processed at the time
of the abort may not be completely processed. Other
AbortLevels > 1 may be defined by the manufacturer or
addressed by models of specific classes of
semiconductor equipment.
CPNAME = AbortLevel, CPVAL = 1 means terminate
current cycle at the next “safe break point,” retrieve all
material, stop in a safe condition and return to the idle
state in the processing state machine.
4.4.4 Requirements
— The following Remote Commands, as defined under
Descriptions, must be implemented on equipment to
satisfy minimum requirements for this capability:
— START
— STOP
— The RCMD value for all commands supported on
the equipment must be recognized if sent with all
upper-case characters (e.g., “STOP”, “START”,
“PP-SELECT”, “PAUSE”, etc.). In addition to
accepting strings with all upper-case characters, the
equipment can optionally accept strings with all
lower-case characters or mixed-case strings. The
equipment documentation should describe whether
or not the optional lower-case or mixed-case strings
are supported.
— Stream 2 currently provides for Host Command
Send and Enhanced Remote Command. The
equipment shall support one or both methods, based
on appropriateness.
— The Enhanced Remote Command is used to address
size, complexity, or the need to target a specific sub-
system within the equipment, (i.e., processing
station, port, exchange station, material handler,
chamber).
4.4.5 Scenarios
4.4.5.1 Host Command Send Scenario
COMMENTS HOST EQUIPMENT COMMENT
Host Command Send S2,F41-->
<-- S2,F42 Host Command Acknowledge
[IF] Command Accepted
(HCACK = 0 or 4)
<-- S6,F11 [THEN] Event Report-state
change or other collection
event occurrence.
Event Report Acknowledge S6,F12-->
SEMI E30-1103 © SEMI 1992, 2003
36
4.4.5.2 Enhanced Remote Command Scenario
COMMENTS HOST EQUIPMENT COMMENT
Enhanced Remote Command S2,F49-->
<--S2,F50 EnhancedRemote Command
Acknowledge
[IF] Command Accepted
(HCACK = 0 or 4)
<--S6,F11 [THEN] Event Report-state
change or other collection
event occurrence.
Event Report Acknowledge S6,F12-->
4.5 Equipment Constants
4.5.1 Purpose — This capability provides a method for
the host to read and to change the value of selected
equipment constants on the equipment.
4.5.2 Definitions — None.
4.5.3 Description — This capability allows the host to
reconfigure equipment constants to support a variety of
situations. The following functions are included:
Host Sends Equipment Constants — Allows the host to
change the value of one or more equipment constants.
Host Equipment Constant Request — Allows the host
to determine the current value of equipment constants.
Host Equipment Constant Namelist Request — Allows
the host to retrieve basic information about the
equipment constants available at the equipment.
4.5.4 Requirements
— Equipment constants must be stored in non-volatile
memory.
— The equipment must be in a “safe” condition to
accept new constant(s) settings as defined by the
equipment manufacturer.
— The equipment must provide a collection event to
alert the host whenever an equipment constant is
changed by the operator. Information indicating
which constant was changed shall be available for
the event report.
4.5.5 Scenarios
Host Sends Equipment Constants:
COMMENTS HOST EQUIPMENT COMMENTS
Host sends S2,F15-->
equipment constants <-- S2,F16 EAC = 0 equipment sets
constants
Host Equipment Constants Request:
COMMENTS HOST EQUIPMENT COMMENTS
Host constant request S2,F13-->
<-- S2,F14 Equipment constant data
NOTE: This capability also can be accomplished using S6,F19 & S6,F20. See Section
4.2.
SEMI E30-1103 © SEMI 1992, 2003
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Host Equipment Constant Namelist Request:
COMMENTS HOST EQUIPMENT COMMENTS
Host constant namelist S2,F29-->
request <-- S2,F30 Equipment constant namelist
Operator Changes Equipment Constant
COMMENTS HOST EQUIPMENT COMMENTS
Operator changes equipment
constant at equipment
operator console.
<-- S6,F11 Equipment reports equipment
constant change.
Host acknowledges event S6,F12-->
4.6 Process Program Management — Process
programs and recipes must be managed through
interaction between the equipment and the host system.
4.6.1 Purpose — Process program management
provides a means to transfer process programs or
recieps, and to share the management of those process
programs or recipes, between the host and equipment.
4.6.2 Definitions
PPError A text data value with information about
verification errors of a process program that failed
verification. If the equipment provides an event for
recipe verification and/or recipe verification failure,
then PPError shall be a DVVAL. Otherwise, PPError
shall be an SV.
PPFormat A variable (SV) indicating the type or
types of process programs and recipes that are
supported.
1 = Unformatted process programs
2 = Formatted process programs
3 = Both unformatted and formatted process programs
4 = Execution recipes
5 = Large unformatted process programs
6 = Large formatted process programs
7 = Both large unformatted and large formatted process
programs
8 = Large execution recipes
and a combination of these formats. See SEMI E5 for a
compete list.
4.6.2.1 Definitions for Process Programs
Process Program — A process program is the pre-
planned and reusable portion of the set of instructions,
settings, and parameters under control of the equipment
that determine the processing environment seen by the
manufactured object and that may be subject to change
between runs or processing cycles.
Process Program Identifier — A text string (PPID)
used to identify a process program.
Formatted Process Program — A process program that
is presented as an ordered sequence of command codes
with their associated parameters as dictated by S7,F23,
and S7,F26. Where formatted process programs are
supported, equipment must also provide information
sufficient to allow a user at the host to create, display,
modify, and partially verify their contents (for example,
that information provided in S7,F22).
Unformatted Process Program — An unformatted
process program is transferred without structure as the
single data item PPBODY (refer to SEMI E5 for a
complete description of PPBODY).
Process Program Change Event — The collection
event associated with the occurrence of the creation,
modification, or deletion of a process program by the
operator.
PPChangeName — A data value (DVVAL) containing
the PPID of the process program affected by the event
Process Program Change Event. See SEMI E5 for a full
definition of this variable data item.
PPChangeStatus — The action taken on the process
program named by PPChangeName. This variable is
valid for the collection event Process Program Change
Event. See SEMI E5 for a full definition of this variable
data item.