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SEMI T12-0305 © SEMI 2004, 2005 3 6.4.1 Service Definition 6.4.1.1 A service definition table de fines the specific set of me ssages for a given service resource, as shown in the following table: Message Service Name Typ…
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5 Terminology
5.1 Definitions
5.1.1 Attachment — general term of Jig and Implement.
5.1.2 Implement — a kind of Attachment used to assemble/maintain/improve measurement or production
equipment.
5.1.3 Jig — a kind of Attachment used to support measurement or production for material on one or more
equipment.
6 Convention
6.1 This section defines the conventions followed by this document.
6.2 Object Conventions — This document conforms to the conventions for objects established by SEMI E39,
including object diagrams, object terminology, and re-quirements for standardized objects. Accordingly, notation is
based on Unified Modeling Language (UML).
6.2.1 Formal Name of an Object — The text capitalizes formal object name references. Similar to the way
capitalization is normally used when discussing entities. When describing something in the general (like cities)
lower case is used, but when a specific entity is of interest (New York City), then first letters are capitalized.
6.2.2 Components of Complex Attributes — The names of object attributes defined in tables are left-justified. The
individual elements of complex attributes are right-justified in order of appearance below the complex attribute.
6.3 State Model Conventions
6.3.1 This document uses the Harel state chart convention for describing dynamic operation of defined objects. The
outline of this convention is described in an attachment of SEMI E30. The official definition of this convention is
described in “State charts: A Visual Formalism for Complex Systems”
1
.
6.3.2 The Harel convention has not the concept of state models of “creation” and “extinction” for expressing a
temporary entity. The Secondent described in this document is such an entity, and a copy of the same state model is
used for an independent job newly created. In this document, a circle with a black circle inside is used for
expressing extinction of an entity. A filled black circle denotes the entry to the state model (the entity creation).
6.3.3 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each
state transition. A transition table contains columns for Transition number, Previous State, Trigger, New State,
Actions, and Comments. The “trigger” (column 3) for the transition occurs while in the “previous” state. The
“actions” (column 5) includes a combination of:
1. Actions taken upon exit of the previous state.
2. Actions taken upon entry of the new state.
3. Actions taken which are most closely associated with the transition.
4. No differentiation is made between these cases.
Num Previous State Trigger New State Actions Comments
6.4 Service Message Representation — Services are functions or methods that may be provided by either the
equipment or the host. A service message may be either a request message, which always requires a response, or a
notification message, that does not require a response.
1 D. Harel, “State charts: A Visual Formalism for Complex Systems”, Science of Computer Programming 8, 1987.
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6.4.1 Service Definition
6.4.1.1 A service definition table defines the specific set of messages for a given service resource, as shown in the
following table:
Message Service Name Type Description
6.4.1.2 Type can be either “N” = Notification or “R” = Request & Response.
6.4.1.3 Notification type messages are initiated by the service provider (e.g., the equipment) and the provider does
not expect to get a response from the service user. Request messages are initiated by a service user (e.g., the host).
Request messages ask for data or an activity from the provider. Request messages expect a specific response
message (no presumption on the message content).
6.4.2 Service Parameter Dictionary
6.4.2.1 A service parameter dictionary table defines the description, format and its possible value for parameters
used by services, as shown in the following table:
Parameter Name Description Format: Possible Value
6.4.2.2 A row is provided in the table for each parameter of a service.
6.4.3 Service Message Definition
6.4.3.1 A service message definition table defines the parameters used in a service, as shown in the following table:
Parameter Req/Ind Res/Cnf Comment
6.4.3.2 The columns labeled REQ/IND and RSP/CNF link the parameters to the direction of the message. The
message sent by the initiator is called the “Request”. The receiver terms this message the “Indication” or the
request. The receiver may then send a “Response” which the original sender terms the “Confirmation”.
6.4.3.3 The following codes appear in the REQ/IND and RSP/CNF columns and are used in the definition of the
parameters (eg., how each parameter is used in each direction):
M Mandatory Parameter — Must be given a valid value.
C Conditional Parameter — May be defined in some circumstances and undefined in others. Whether a value is
given may be completely optional or may depend on the value of the other parameter.
U User-Defined Parameter.
- The parameter is not used.
= (For response only.) Indicates that the value of this parameter in the response must match that in the primary (if
defined).
7 General Requirements
7.1 Identification Means — Equipment has to have any means to identify physical Jigs and/or Implements.
7.2 Communication Means — Each equipment and managing system has to have any electric communication
means to transact.
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8 Overview
8.1 Attachments in Semiconductor Manufacturing — A semiconductor production line consists of many amount
pieces of equipment with many types. Some types of equipment require such attachments as jigs and/or implements
to manufacture semiconductor devices. Because some of them act very important roles, quality, yield or
productivity of process may depend on them and their management.
8.2 Management of Attachments — Management is required on specific attachments to have better product quality,
yield and productivity. This document specifies definitions, concepts, behavior and services to manage attachments
on equipments and also in factory. However not all the attachments require such management and specification of
this document should be applied to restricted ones especially to the ones used for important processes, sensitive and
incompatible combinations between Attachments and equipment.
8.3 Effective Concepts for a Variety of Attachments — There are many kinds of equipment types and also a variety
of attachments. To be effective to almost all of them, specification of this document is generic and idealized without
any physical limitations or practical details. It is also important to be independent to rapidly changing technologies
and production environment.
8.4 Logical and Informational Specification — To keep track of conceptual document and keep shared area as wide
as possible, this document specifies just logical and informational issues, except related information part. Physical
specifications are assumed to be defined as separated documents; they may be specified in other standards, propriety
specifications or mixed together.
8.5 Tracking Oriented Management — Because there may be very specific managements or operation for strategy
in factories and they may not be shared by many fabs, strategic management for specific factory or products may not
be better to be standardized. Most parts of the management specified in this document are related to traceability. In
other words “tracking of Jigs and Implements” is the standardized area of “management of Attachments” in this
document.
8.5.1 Tracking Jigs and Implements — In a semiconductor factory, it is necessary for any management of Jigs
and/or Implements to be tracked.
8.5.1.1 There are two types of information to track Jigs and/or Implements. One of them is transferring
information: e.g., where it is and who use it. It is required to discriminate between logical information and physical
attachment. The other is historical information of the attachment: e.g., how much it was used, what condition the
processes were and when it was repaired.
8.5.1.2 Such an attachment as Jig or Implement is transferred from stock yard to equipment or the other way and
may be between two pieces of equipment. At the time it is picked up at source location for destination, the fact
should be reported to Tracking System. When it arrives at the destination, this fact is required to be reported to the
system. Verification has to be done at the destination before it is dealt: e.g., process, maintain or stored. If a
problem happens during transportation, an exception is raised.
8.5.1.3 When it is used on equipment, e.g., for process or maintenance, its history information is accumulated and
the information is reported to the system at every milestone. Examples of the history information are time duration,
cycle time, such process parameters as temperature and pressure, material characteristics and known damage
occurred during the process.
8.5.1.4 The tracking system summarizes reported information. Clients of the system may inquire the information.
One of the clients may be scheduler/ dispatcher and it may change process machine for specific material to get better
product quality.
8.5.1.5 A client may ask target equipment to handle specific event which shows reaching limited cycle time for a jig
on the equipment. Expected handling for the event, for example, is to stop processing. The client may ask to pause
before starting a lot if current cycle time of the jig is very close to expiration cycle time.
8.5.2 Application of Tracking System — Because this document specify basic capability tracking Jigs and
Implements, specific applications for semiconductor device manufactures or equipment suppliers and such advanced
applications as securitized tracking are out of scope of this document. Using this basic specification and additional
capability supplied by equipment users, equipment suppliers or system suppliers, expected advanced capabilities can
be realized.