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SEMI P10-0705 © SEMI 1990, 2005 148 8.1.743 SURF_INSP_PELL_TOP — If present , specifies the maxim um dimension of the smal lest unacceptable particle on the pellicle on the patterned side of the mask on either surface of…

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SEMI P10-0705 © SEMI 1990, 2005 147
8.1.724 START_TITLE — (title number) Indicates the beginning keywords for a specific title.
8.1.725 START_TRANSMISSION_MEASUREMENTS — Indicates the beginning of transmission measurements
within <phase_shift_measurements>.
8.1.726 START_VENDOR_INFO — (text) name of <vendor_info> group.
8.1.727 STATUS — (NEW, OLD, CHANGE, CANCEL, HOLD, STOP, RESTART, RETURNED, PROTESTED,
QUOTE ONLY) Present status of mask(s); NEW = new mask which has not been ordered before. OLD = previously
ordered mask whose data is included for reference only. CHANGE = previously ordered mask whose data is
included because the order data has been changed since the last transmission. CANCEL = previously ordered mask
whose order is being cancelled. HOLD = enter a new mask but do not release it to production until customer
authorization.
STOP = previously ordered mask which is put on hold until further notice. RESTART = changes a
previous STATUS of STOP from being on hold to being released for production. RETURNED = a previously
delivered mask which has been rejected by the customer and is being returned to the vendor. A data entry transmittal
which includes a RETURNED mask should also include a NEW mask if replacement is to be initiated. PRICE of the
returned mask should be the negative of the original price in order to track credit. The NEW mask should also
contain PRICE and a new schedule. PROTESTED = a RETURNED mask whose rejection is protested by the mask
vendor. If a NEW mask accompanied the RETURNED mask to initiate replacement, the NEW mask should also
have PROTESTED status. QUOTE_ONLY = the order is not to be manufactured, but is only to be used by the
vendor for quoting price and delivery.
8.1.728 STD_PATTERN_NAME — Name of a standard pattern, on file at the vendor, previously supplied or
authorized by the customer.
8.1.729 STEPPING_COUNT — (x,y) Count of successive pattern or cell placements.
8.1.730 STEPPING_DISTANCE — (x,y) Spacing between successive pattern or cell placements.
8.1.731 STRIPE_HEIGHT — Stripe height in address units of pattern file.
8.1.732 SUMMARY_FILE_NAME — (text) Name identifying the summary output file for RUNSET_NAME. If
this keyword appears in the
<mask_order>, it must be explicitly referenced in a RUNSET_NAME and/or a
PARAMETER_FILE_NAME.
8.1.733 SURF_DEFECT_TYPE — (CONTAM_ON_CLEAR, DIM_CLEAR, ON_EDGE, UNKOWN, PINHOLE,
BRIGHT_CHROME, CONTAM_ON_CHROME, DIM_CHROME, ON_CLEAR, BRIGHT, ON_CHROME,
ON_ATT, DIM_ATT, ATT_PINHOLE and others on request) Setup parameter for surface inspection.
8.1.734 SURF_INSP_AREA — (x1,y1,x2,y2) Unscaled coordinates of window for surface inspection, lower left
and upper right corners, relative to the nominal center of mask, pattern or cell (chrome side up for masks,
unmirrored for patterns or cells).
8.1.735 SURF_INSP_EQUIP_REQD — Alphanumeric identification of acceptable equipment for defect
inspection.
8.1.736 SURF_INSP_EQUIP_USED — Surface inspection equipment used.
8.1.737 SURF_INSP_GLASS_SIDE — If present, specifies the maximum dimension of the smallest unacceptable
particle on the glass side of the mask. This keyword is generally intended for non-pelliclized masks.
8.1.738 SURF_INSP_METHOD — (LASER, VISUAL, PIXEL or MICROSCOPE) Methodology for detecting
surface particles.
8.1.739 SURF_INSP_MODE_REQD — Alphanumeric operating mode required for SURF_INSP_EQUIP_REQD.
8.1.740 SURF_INSP_MODE_USED — (text) SURF_INSP_EQUIP_USED operating mode.
8.1.741 SURF_INSP_PATTERN_SIDE — Specifies the maximum dimension of the smallest unacceptable particle
on the patterned side of the mask. This keyword is generally intended for non-pelliclized masks.
8.1.742 SURF_INSP_PELL_BOTTOM — Specifies the maximum dimension of the smallest unacceptable particle
on the pellicle on the glass side of the mask on either surface of the pellicle membrane or on the glass surface under
the pellicle.
SEMI P10-0705 © SEMI 1990, 2005 148
8.1.743 SURF_INSP_PELL_TOP — If present, specifies the maximum dimension of the smallest unacceptable
particle on the pellicle on the patterned side of the mask on either surface of the pellicle membrane.
8.1.744 SURF_INSP_PELL_TOP_INSIDE_MEMBRANE — Maximum dimension of the smallest unacceptable
particle on the patterned side of the mask on the inside surface of the pellicle membrane.
8.1.745 SURF_INSP_PELL_TOP_INSIDE_ON_FRAME — Maximum dimension of the smallest unacceptable
particle on the patterned side of the mask on the inside surface of the pellicle frame.
8.1.746 SURF_INSP_PELL_TOP_ON_CLEAR_PATTERN — Maximum dimension of the smallest unacceptable
particle on the patterned surface of the mask under the pellicle, but on the clear pattern of the mask.
8.1.747 SURF_INSP_PELL_TOP_ON_OPAQUE_PATTERN — Maximum dimension of the smallest
unacceptable particle on the patterned surface of the mask under the pellicle, but on the opaque pattern of the mask.
8.1.748 SURF_INSP_PELL_TOP_OUTSIDE_FRAME — Maximum dimension of the smallest unacceptable
particle on the patterned surface of the mask outside the pellicle frame.
8.1.749 SURF_INSP_PELL_TOP_OUTSIDE_MEMBRANE — Maximum dimension of the smallest unacceptable
particle on the patterned side of the mask on the outside surface of the pellicle membrane.
8.1.750 SURF_INSP_PELL_TOP_OUTSIDE_ON_FRAME — Maximum dimension of the smallest unacceptable
particle on the patterned side of the mask on the outside surface of the pellicle frame.
8.1.751 SURF_INSP_PELL_TOP_OUTSIDE_ON_OPAQUE — Maximum dimension of the smallest
unacceptable particle on the patterned surface of the mask outside the pellicle frame, but on the opaque surface of
the mask.
8.1.752 SURF_INSP_PIXEL_SIZE_REQD — Pixel size to use for surface inspection.
8.1.753 SURF_INSP_PIXEL_SIZE_USED — Pixel size used by SURF_INSP_EQUIP_USED.
8.1.754 SURF_INSP_SENSITIVITY_REQD — Sensitivity to be used by SURF_INSP_EQUIP_REQD.
8.1.755 SURF_INSP_SENSITIVITY_USED — Sensitivity used by SURF_INSP_EQUIP_USED.
8.1.756 SURF_INSP_SETUP_FILE_NAME_REQD — Alphanumeric name of setup file for
SURF_INSP_EQUIP_REQD.
8.1.757 SURF_INSP_SETUP_FILE_NAME_USED — Alphanumeric name of setup file for
SURF_INSP_EQUIP_USED.
8.1.758 SURFACE_INSPECTION — If present, requires surface inspection and specifies the maximum dimension
of the smallest unacceptable surface particles.
8.1.759 SURFACE_QUALITY_ID — (text) Customer’s label for a collection of surface quality specifications, to
be used only in addition to explicit quality requirement keywords. This may be used in the data structure in addition
to, but not in place of, explicit quality requirement keywords. This may not be used in combination with
QUALITY_GROUP_ID. Customer and vendor should document the meaning of this quality grade before using it in
SEMI P10.
8.1.760 SURROUNDING_HEIGHT — Height of clear or dark border around pattern on mask.
8.1.761 SURROUNDING_TONE — (CLEAR or DARK) Border surrounding pattern on mask is to be either clear
or dark.
8.1.762 SURROUNDING_WIDTH — Width of clear or dark border around pattern on mask.
8.1.763 THROUGH_PELLICLE_DEFECTS — Precedes <defect_measurements> when delivering defect data
measured with pellicle applied.
8.1.764 TITLE_FONT — Alphanumeric name of the font use in writing TITLE_TEXT, to be previously agreed
between customer and vendor.
8.1.765 TITLE_HEIGHT — (height) Height in microns of title characters.
SEMI P10-0705 © SEMI 1990, 2005 149
8.1.766 TITLE_JUSTIFICATION — (L or R) Left or right justification within the writable field, before mirroring
and before rotation.
8.1.767 TITLE_LOCATION — (x,y) Location of the lower left corner of TITLE_TEXT in the associated
<title_data> (before mirroring or rotation), relative to nominal center of mask (chrome side up).
8.1.768 TITLE_MAG — Numeric magnification to the standard font size for the mask writer in writing
TITLE_TEXT. This item should not be used in conjunction with TITLE_HEIGHT for the same MASK_SET_ID.
8.1.769 TITLE_TEXT — (text) Alphanumeric contents of human-readable text on the mask.
8.1.770 TITLE_TYPE — (MASK, DEVICE, LAYER, DATE_TIME, SOFTWARE, SERIAL_NUMBER,
AUXILIARY)
8.1.771 TOP_PELLICLE_CENTRALITY_ERROR — (x,y,rotation) Maximum misplacement in micrometers and
microradians of pellicle mounting, relative to the nominal center of the mask.
8.1.772 TOP_PELLICLE_TYPE — Alphanumeric brand and model of acceptable pellicle for the patterned side of
the mask. If multiple pellicles are listed, they are prioritized with the most preferred first and least preferred last.
8.1.773 TOP_PELLICLE_USED — (text) The pellicle vendor’s part number of the pellicle applied to the patterned
surface of the mask.
8.1.774 TRANSMISSION_DEFECT_CLEAR — Maximum allowable percent transmission of light through a clear
defect.
8.1.775 TRANSMISSION_DEFECT_DARK — Maximum allowable percent blocking of light through a dark
defect.
8.1.776 TRANSMISSION_EQUIP_REQD — (text) Transmission measurement equipment required by customer.
8.1.777 TRANSMISSION_EQUIP_USED — (text) Transmission measurement equipment used.
8.1.778 TRANSMISSION_ERROR — For phase shift masks, the maximum acceptable deviation of any percent
transmission measurement from the TRANSMISSION_TARGET.
8.1.779 TRANSMISSION_MARK_DRAWING — The uniquely identified (for each customer) document which
shows the transmission mark structure itself, and may show the place(s) within the transmission mark which are to
be measured.
8.1.780 TRANSMISSION_MARK_FEATURE — Text describing the feature to be used for transmission
measurement.
8.1.781 TRANSMISSION_MARK_LOCATION — (x,y) Location of transmission mark location relative to the
nominal center of the mask (chrome side up).
8.1.782 TRANSMISSION_MARK_LOCATION_DRAWING — The uniquely identified (for each customer)
document which shows the location(s) of the transmission mark structure.
8.1.783 TRANSMISSION_MARK_SITE_ID — Unique alphanumeric identifier of each transmission measurement
location within MASK_SET_ID to identify individual locations when using <mask_results>. If the same
coordinates apply to locations on different masks within the mask set, they may have the same
TRANSMISSION_MARK_SITE_ID, but it is not mandatory.
8.1.784 TRANSMISSION_MEASUREMENT_DATE — Transmission measurement date.
8.1.785 TRANSMISSION_MEASUREMENT_FILE_NAME — Name of data file containing results of
transmission measurement.
8.1.786
TRANSMISSION_MODE_REQD — (text) Operating mode required by customer for
TRANSMISSION_EQUIP_USED.
8.1.787 TRANSMISSION_MODE_USED — (text) Operating mode used on TRANSMISSION_EQUIP_USED
operating mode.