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SEMI E52-0703 © SEMI 1995, 2003 33 MIXED GAS NAME SYMBOL CODE .06% ARSINE/HYDROGEN .06% AsH3/H2 0708 5% PHOSPHINE/HYDROGEN 5% PH3/H2 0709 10% METHANE/ARGON 10% CH4/Ar 0710 5% ACETONE/NITROGEN 5% C3H6O-m)/N2 0711 5% BENZE…

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SEMI E52-0703 © SEMI 1995, 2003 32
MIXED GAS NAME SYMBOL CODE
2%ARSINE/SILANE 2%AsH3/SiH4 0663
8%GERMANE/HYDROGEN 8%GeH4/H2 0664
3%ARSINE/HYDROGEN 3%AsH3/H2 0665
10%DIBORANE/NITROGEN 10%B2H6/N2 0666
8%PHOSPHINE/HELIUM 8%PH3/He 0667
10%AMMONIA/NITROGEN 10%NH3/N2 0668
5%FLUORINE/NITROGEN TRIFLUORIDE 5%F2/NF3 0669
10%DISILANE/ARGON 10%Si2H6/Ar 0670
3%PHOSPHINE/5%SILANE/NITROGEN 3%PH3/5%SiH4/N2 0671
3%NITROGEN/HYDROGEN 3%N2/H2 0672
.7%ARSINE/HYDROGEN .7%AsH3/H2 0673
10%PHOSPHINE/HELIUM 10%PH3/He 0674
.8%PHOSPHINE/HELIUM .8%PH3/He 0675
7.5%PHOSPHINE/SILANE 7.5%PH3/SiH4 0676
20%FLUORINE/HELIUM 20%F2/He 0677
22%PHOSPHINE/SILANE 22%PH3/SiH4 0678
5%TRICHLOROSILANE/HYDROGEN 5%SiHCI3/H2 0679
25%TRICHLOROSILANE/HYDROGEN 25%SiHCI3/H2 0680
.8%PHOSPHINE/DISILANE .8%PH3/Si2H6 0681
13%TRICHLOROSILANE/HYDROGEN 13%SiHCI3/H2 0682
5%DIBORANE/SILANE 5%B2H6/SiH4 0683
1%SILANE/DIBORANE 1%SiH4/B2H6 0684
7%METHYLENE CHLORIDE/3%OZONE/AIR 7%CH2CI2/3%O3/Air 0685
50%FLUOROFORM/ARGON 50%CHF3/Ar 0686
20%HELIUM/OXYGEN 20%He/O2 0687
3%ARSINE/ARGON 3%AsH3/Ar 0688
10%METHYLSILANE/HYDROGEN 10%CH6Si/H2 0689
.05%DIBORANE/HYDROGEN .05%B2H6/H2 0690
4%PHOSPHINE/ARGON 4%PH3/Ar 0691
8%HYDROGEN/ARGON 8%H2/Ar 0692
5%PHOSPHINE/HELIUM 5%PH3/He 0693
15%HYDROGEN/ARGON 15%H2/Ar 0694
2%DIBORANE/NITROGEN 2%B2H6/N2 0695
2%PHOSPHINE/SILANE 2%PH3/SiH4 0696
15%DIBORANE/ARGON 15%B2H6/Ar 0697
10%GERMANE/ARGON 10%GeH4/Ar 0698
5%METHANE/HELIUM 5%CH4/He 0699
4%HYDROGEN/ARGON 4%H2/Ar 0700
10%DIBORANE/HYDROGEN 10%B2H6/H2 0701
40%SILANE/HELIUM 40%SiH4/He 0702
2%ARSINE/HYDROGEN 2%AsH3/H2 0703
10%GERMANE/HELIUM 10%GeH4/He 0704
9.4%ARGON/NITROGEN TRIFLUORIDE 9.4%Ar/NF3 0705
8.6%ARGON/NITROGEN TRIFLUORIDE 8.6%Ar/NF3 0706
.8%PHOSPHINE/HYDROGEN .8%PH3/H2 0707
SEMI E52-0703 © SEMI 1995, 2003 33
MIXED GAS NAME SYMBOL CODE
.06%ARSINE/HYDROGEN .06%AsH3/H2 0708
5%PHOSPHINE/HYDROGEN 5%PH3/H2 0709
10%METHANE/ARGON 10%CH4/Ar 0710
5%ACETONE/NITROGEN 5%C3H6O-m)/N2 0711
5%BENZENE/NITROGEN 5%C6H6/N2 0712
20%DISILANE/HYDROGEN 20%Si2H6/H2 0713
8%PROPANE/10%AMMONIA/AIR 8%C3H8/10%NH3/Air 0714
8.2%PROPANE/9.8%AMMONIA/AIR 8.2%C3H8/9.8%NH3/Air 0715
10%CYCLOPROPANE/HELIUM 10%C3H6-a)/He 0716
2%METHYSILANE/HYDROGEN 2%CH6Si/H2 0717
10%ETHYLENE/HELIUM 10%C2H4/He 0718
5%CHLORINE/HELIUM 5%CI2/He 0719
5%FLUORINE/HELIUM 5%F2/He 0720
.7%ARSINE/HELIUM .7%AsH3/He 0721
5%DIBORANE/HYDROGEN 5%B2H6/H2 0722
20%OZONE/NITROGEN 20%O3/N2 0723
1%ARSINE/HYDROGEN 1%AsH3/H2 0724
40%HYDROGEN/HELIUM 40%H2/He 0725
5%HYDROGEN CHLORIDE/NITROGEN 5%HCI/N2 0726
8%HYDROGEN/NITROGEN 8%H2/N2 0727
20%CARBON TETRAFLUORIDE/NITROGEN 20%CF4/N2 0728
10%CARBON MONOXIDE/CARBON DIOXIDE 10%CO/CO2 0729
10%CARBON MONOXIDE/AIR 10%CO/Air 0730
10%DISILANE/HYDROGEN 10%Si2H6/H2 0731
5%FLUORINE/NITROGEN 5%F2/N2 0732
1%FLUORINE/NEON 1%F2/Ne 0733
5%CARBON DIOXIDE/15%OXYGEN/NITROGEN 5%CO2/15%O2/N2 0734
10%CARBON DIOXIDE/10%OXYGEN/NITROGEN 10%CO2/10%O2/N2 0735
20%OXYGEN/NITROGEN 20%O2/N2 0736
25%HELIUM/ARGON 25%He/Ar 0737
4%HELIUM/NITROGEN 4%He/N2 0738
10%TRIMETHYSILANE/HYDROGEN 10%(CH3)3SiH/H2 0739
2%GERMANE/ARGON 2%GeH4/Ar 0740
.8%ARSINE/HYDROGEN .8%AsH3/H2 0741
.8%GERMANIUM TETRAFLUORIDE/HYDROGEN .8%GeF4/H2 0742
.8%DIBORANE/HYDROGEN .8%B2H6/H2 0743
10%METHANE/HELIUM 10%CH4/He 0744
1%SILANE/HELIUM 1%SiH4/He 0745
25%FLUORINE/NITROGEN 25%F2/N2 0746
50%GERMANE/ARGON 50%GeH4/Ar 0747
7%CARBON DIOXIDE/10%HYDROGEN/20%CARBON
MONOXIDE/NITROGEN 7%CO2/10%H2/20%CO/N2 0748
10%HELIUM/HYDROGEN 10%He/H2 0749
1%BUTADIENE/BUTENE 1%C4H6-e)/C4H8-i) 0750
40%GERMANE/ARGON 40%GeH4/Ar 0751
SEMI E52-0703 © SEMI 1995, 2003 34
MIXED GAS NAME SYMBOL CODE
5%HELIUM/NITROGEN 5%He/N2 0752
5%OXYGEN/CARBON TETRAFLUORIDE 5%O2/CF4 0753
10%FLUORINE/ARGON 10%F2/Ar 0754
25%FLUORINE/ARGON 25%F2/Ar 0755
50%FLUORINE/ARGON 50%F2/Ar 0756
50%FLUORINE/HELIUM 50%F2/He 0757
25%FLUORINE/HELIUM 25%F2/He 0758
10%FLUORINE/NITROGEN 10%F2/N2 0759
50%FLUORINE/NITROGEN 50%F2/N2 0760
5%FLUORINE/ARGON 5%F2/Ar 0761
5%HYDROGEN/HELIUM 5%H2/He 0762
5%SULFUR DIOXIDE/HELIUM 5%SO2/He 0763
2%DISILANE/HELIUM 2%Si2H6/He 0764
5%GERMANE/HELIUM 5%GeH4/He 0765
5%DIBORANE/HELIUM 5%B2H6/He 0766
20%PHOSPHINE/NITROGEN 20%PH3/N2 0767
3.5%HYDROGEN/NITROGEN 3.5%H2/N2 0768
50%HEXAFLUOROETHANE/OXYGEN 50%C2F6/O2 0769
25%HEXAFLUOROETHANE/OXYGEN 25%C2F6/O2 0770
.7%GERMANIUM/HYDROGEN .7%GeH4/H2 0771
1%ACETYLENE/ETHYLENE 1%C2H2/C2H4 0772
5%SILANE/NITROGEN 5%SiH4/N2 0773
.8%CO/.8%O2/20%CO2/32%N2/H2 SELOX GAS MIX 0774
1.5%GERMANE/HYDROGEN 1.5%GeH4/H2 0775
5%BORON TRIFLUORIDE/HELIUM 5%BF3/He 0776
5%PHOSPHORUS PENTAFLUORIDE/HELIUM 5%PF5/He 0777
15%CARBON DIOXIDE/NITROGEN 15%CO2/N2 0778
5%OXYGEN/HELIUM 5%O2/He 0779
5%SILANE/HELIUM 5%SiH4/He 0780
1%NITROGEN DIOXIDE/NITROGEN 1%NO2/N2 0781
1%SULFUR DIOXIDE/NITROGEN 1%SO2/N2 0782
10%CARBON DIOXIDE/NITROGEN 10%CO2/N2 0783
.02%CARBON MONOXIDE/NITROGEN .02%CO/N2 0784
5%HEXAFLUOROETHANE/OXYGEN 5%C2F6/O2 0785
.1%CARBON MONOXIDE/NITROGEN .1%CO/N2 0786
15%GERMANIUM TETRACHLORIDE/OXYGEN 15%GeCl4/O2 0787
2%NITROGEN/3%CARBON MONOXIDE/17%CARBON
DIOXIDE/HYDROGEN 2%N2/3%CO/17%CO2/H2 0788
.1%PHOSPHINE/NITROGEN .1%PH3/N2 0789
.1%HYDROGEN CHLORIDE/NITROGEN .1%HCl/N2 0790
.1%NITROGEN DIOXIDE/AIR .1%NO2/Air 0791
.1%NITROGEN DIOXIDE/NITROGEN .1%NO2/N2 0792
.1%PHOSPHINE/HYDROGEN .1%PH3/H2 0793
.2%SULFUR DIOXIDE/AIR .2%SO2/Air 0794
.25%CARBON MONOXIDE/.1%HYDROGEN/1%OXYGEN/NITROGEN .25%CO/.1%H2/1%O2/N2 0795