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SEMI E5-1104 © SEMI 1982, 2004 86 Stream,Function Name (Mnemonic) Direction S3,F2 Material Status Data (MSD) M,H<-E Description Material-in-process information is sent from th e equipment to the host. Ther e are m loc…

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SEMI E5-1104 © SEMI 1982, 2004 85
Stream,Function Name (Mnemonic) Direction
S2,F50 Enhanced Remote Command Acknowledge M,H<-E
Description
The equipment acknowledges Enhanced Remote Command or reports any error(s). If the command is not accepted due to one or
more invalid parameters, (i.e. HCACK = 3), then a list of invalid parameters will be returned containing the parameter name and
reason for being invalid.
Structure
L,2
1. <HCACK>
2. L,n # of parameter groups
1. L,2
1. <CPNAME
1
>
2. <CEPACK
1
>
.
.
n. L,2
1. <CPNAME
n
>
2. <CEPACK
n
>
Exception
None
10.7 Stream 3 Materials Status — The functions of the material status stream are used to communicate information
and actions related to material, including carriers and material-in-process, time-to-completion information, and
extraordinary material occurrences.
Stream,Function Name (Mnemonic) Direction
S3,F0 Abort Transaction (S3F0) S,H<->E
Description
Same form as S1,F0
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S3,F1 Material Status Request (MSR) S,H->E,reply
Description
Host requests the device to send the status of all material in process.
Structure
Header only
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 86
Stream,Function Name (Mnemonic) Direction
S3,F2 Material Status Data (MSD) M,H<-E
Description
Material-in-process information is sent from the equipment to the host. There are m locations.
Structure
L,2
1. <MF>
2. L,m
1. L,3
1. <LOC
1
>
2. <QUA
1
>
3. <MID
1
>
2. L,3
.
.
m. L,3
1. <LOC
m
>
2. <QUA
m
>
3. <MID
m
>
Exception
A zero-length list returned means no such data exists.
Stream,Function Name (Mnemonic) Direction
S3,F3 Time to Completion Request (TCR) S,H->E,reply
Description
Host requests the equipment to send the time-to-completion of operations on all material in possession.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F4 Time to Completion Data (TCD) M,H<-E
Description
Time-to-completion information is sent by the equipment to the host.
Structure
L,2
1. <MF>
2. L,m
1. L,3
1. <TTC
1
>
2. <QUA
1
>
3. <MID
1
>
2. L,3
.
.
m. L,3
1. <TTC
m
>
2. <QUA
m
>
3. <MID
m
>
Exception
A zero-length list header returned means no such data exists.
SEMI E5-1104 © SEMI 1982, 2004 87
Stream,Function Name (Mnemonic) Direction
S3,F5 Material Found Send (MFS) S,H<-E,[reply]
Description
The equipment advises the host that unsolicited material has appeared at one of its sensors.
Structure
L,2
1. <MF>
2. <QUA>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F6 Material Found Acknowledge (MFA) S,H->E
Description
Acknowledge or error
Structure
<ACKC3>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F7 Material Lost Send (MLS) S,H<-E,[reply]
Description
The equipment advises the host that material has disappeared from its sensors.
Structure
L,3
1. <MF>
2. <QUA>
3. <MID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F8 Material Lost Acknowledge (MLA) S,H->E
Description
Acknowledge or error
Structure
<ACKC3>
Exception
None