semi合集-English.pdf - 第1133页

SEMI E5-1104 © SEMI 1982, 2004 75 Stream,Function Name (Mnemonic) Direction S2,F32 Date and Time Set Acknowledge (DTA) S,H<-E Description Acknowledge the receipt of time and date. Structure <TIACK> Exception Non…

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SEMI E5-1104 © SEMI 1982, 2004 74
Stream,Function Name (Mnemonic) Direction
S2,F29 Equipment Constant Namelist Request (ECNR) S,H->E,reply
Description
This function allows the host to retrieve basic information about what equipment constants are available in the equipment.
Structure
L,n
1. <ECID
1
>
.
.
n. <ECID
n
>
Exception
A zero-length list means send information for all ECIDs.
Stream,Function Name (Mnemonic) Direction
S2,F30 Equipment Constant Namelist (ECN) M,H<-E
Description
Data Response
Structure
L,n (number of equipment constants)
1. L,6
1. <ECID
1
>
2. <ECNAME
1
>
3. <ECMIN
1
>
4. <ECMAX
1
>
5. <ECDEF
1
>
6. <UNITS
1
>
2. L,6
.
.
n. L,6
1. <ECID
n
>
2. <ECNAME
n
>
3. <ECMIN
n
>
4. <ECMAX
n
>
5. <ECDEF
n
>
6. <UNITS
n
>
Exception
Zero-length ASCII items for ECNAME
i
, ECMIN
i
, ECMAX
i
, ECDEF
i
, and UNITS
i
indicates that the ECID does not exist.
Stream,Function Name (Mnemonic) Direction
S2,F31 Date and Time Set Request (DTS) S,H->E,reply
Description
Useful to synchronize the equipment time with the host time base.
Structure
<TIME>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 75
Stream,Function Name (Mnemonic) Direction
S2,F32 Date and Time Set Acknowledge (DTA) S,H<-E
Description
Acknowledge the receipt of time and date.
Structure
<TIACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F33 Define Report (DR) M,H->E,reply
Description
The purpose of this message is for the host to define a group of reports for the equipment.
The type of report to be transmitted is designated by a Boolean “Equipment Constant.” An “Equipment Constant Value” of
“False” means that an “Event Report”(S6,F11) will be sent, and a value of “True” means that an “Annotated Event
Report”(S6,F13) will be sent.If S2,F33 is Multi-block, it must be preceded by the S2,F39/S2,F40 Inquire/Grant transaction.
Structure
L,2
1. <DATAID>
2. L,a # reports
1. L,2 report 1
1. <RPTID
1
>
2. L,b # VIDs this report
1. <VID
1
>
.
.
b.<VID
b
>
a. L,2 report a
1. <RPTID
a
>
2. L,c # VIDs this report
1. <VID
1
>
.
.
c. <VID
c
>
Exception
1. A list of zero-length following <DATAID> deletes all report definitions and associated links. See S2,F35 (Link
Event/Report).
2. A list of zero-length following <RPTID> deletes report type RPTID. All CEID links to this RPTID are also deleted.
Stream,Function Name (Mnemonic) Direction
S2,F34 Define Report Acknowledge (DRA) S,H<-E
Description
Acknowledge or error If an error condition is detected the entire message is rejected (i.e., partial changes are not allowed).
Structure
<DRACK>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 76
Stream,Function Name (Mnemonic) Direction
S2,F35 Link Event Report (LER) M,H->E,reply
Description
The purpose of this message is for the host to link n reports to an event (CEID). These linked event reports will default to
‘disabled’ upon linking. That is, the occurrence of an event would not cause the report to be sent until enabled. See S2,F37 for
enabling reports.
If S2,F35 is Multi-block, it must be preceded by the S2,F39/S2,F40 Inquire/Grant transaction.
Structure
L,2
1. <DATAID>
2. L,a # events
1. L,2 event 1
1. <CEID
1
>
2. L,b
1. <RPTID
1
>
.
.
b. <RPTID
b
>
.
.
a. L,2 event a
1. <CEID
a
> # RPTIDS this event
2.L,c
1.<RPTID
1
>
.
.
c. <RPTID
c
>
Exception
A list of zero length following CEID deletes all report links to that event.
Stream,Function Name (Mnemonic) Direction
S2,F36 Link Event Report Acknowledge (LERA) S,H<-E
Description
Acknowledge or error If an error condition is detected the entire message is rejected (i.e., partial changes are not allowed).
Structure
<LRACK>
Exception
None