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SEMI F54-1000 © SEMI 2000 6 A P PENDIX 1 EXA MPLE REPORT FORM NOT E: The mate rial in this appe ndix is an of ficial pa rt of SEMI F54 an d was approv ed by full lette r ballot proc edures on July 1 3, 2000 by the North …

SEMI F54-1000 © SEMI 20005

g. counting efficiency of the CNC as a function of

particle size; and

h. the lower size sensitivity of the CNC.

Appendix 1 contains an example report form.

15 Precision and Accuracy

15.1 This method requires a minimum of 500 particles

counted in a sample. For Poisson distributed data, the

relative standard deviation of the measured particle

concentration is less than 5% when at least 500

particles are counted in a sample.

SEMI F54-1000 © SEMI 2000 6

APPENDIX 1

EXAMPLE REPORT FORM

NOTE: The material in this appendix is an official part of SEMI F54 and was approved by full letter ballot procedures on July 13,

2000 by the North American Regional Standards Committee.

A1-1 Test dates:

A1-2 Operator(s) performing test:

A1-3 Serial numbers: Reference instrument

CNC EC

A1-4 Attach flow meter and voltage indicator calibration data as described in Section 11.

A1-5 Data and calculations:

Data Point (Use Additional Sheets as Necessary)

12345678

NaCl Concentration (gm/l)

Flow Rates (cm

/s)

EC Aerosol

EC Sheath

EC Excess Air

CNC

Reference Instrument

Make-up Air or

Excess Aerosol Vent

EC Voltage (V)

Particle Size (micrometer)

Measured Particle Concentrations (Particles/cm

)

CNC

(1)

(1) Corrected for Transport Loss

(2)*

Reference Instrument

(3)

(3) Corrected for Multiple Charging

(Electrometers Only)

(4)*

(4) Corrected for Transport Loss

(5)*

Counting Efficiency

= (2)/(5)

A1-6 Attach plot of counting efficiency as a function of particle size

A1-7 Lower size sensitivity (micrometer)

∗

___________

∗ Attach calculations.

NOTICE: SEMI makes no warranties or representations as to the suitability of the test method set forth herein for

any particular application. The determination of the suitability of the test method is solely the responsibility of the

user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other

relevant literature respecting any materials mentioned herein. These test methods are subject to change without

notice.

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material or of an invention covered by patent rights. By publication of this test method, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this test

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and the risk of infringement of such rights, are entirely their own responsibility.

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