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Cell Cell Center Row Column C L C L S S S = 125 or 150 um, center to center Figure 2 Data Matrix Cell Spacing Figure 3 Border Rows and Columns: ECC200 SEMI T2-0298 © SEMI 1993, 2004 4
Table 1 Matrix Code Symbol Dimensions
Square Arrays for Use on 125 to 200 mm Wafers C
1
, R
1
(µm)
#1
C
2
, R
2
(µm)
#1
# of cells in row or column 16 18 20 16 18 20
125 µm spacing 1875 2125 2375 2000 2250 2500
150 µm 2250 2550 2850 2400 2700 3000
#1: See Figure 1 for pictorial representation of Dimensions C
1
, C
2
, R
1
, and R
2
.
Table 2 Message Character Count in Square Arrays for Use on 125 to 200 mm Wafers
# of Cells in a Row or Column 16 18 20
8-bit 10 16 20 Maximum # of Message Characters
Mostly upper-case 16 25 31
Figure 1
Data Matrix Field Dimensions
SEMI T2-0298 © SEMI 1993, 2004 3
Cell
Cell Center
Row
Column
C
L
C
L
S
S
S = 125 or 150 um, center to center
Figure 2
Data Matrix Cell Spacing
Figure 3
Border Rows and Columns: ECC200
SEMI T2-0298 © SEMI 1993, 2004 4
Dot
Central Area of Cell
45
20
25
Rdot (min) = 45
Rcentral area (min) = 25
Rdot misalign (max) = 20
100
100
Figure 4
Minimum Size Dot with Maximum Dot Misalignments (all Dimensions in µm)
6.3 Content of the Matrix Code Symbol
6.3.1 Each square matrix code symbol shall contain between 10 and 23 message characters encoded in accordance
with AIM ISS Data Matrix, including the characters associated with error checking and correcting (ECC200), as
also defined in AIM ISS Data Matrix.
6.3.2 The message characters may include any of those designated as “mostly uppercase” in Table 5 and Annex J of
AIM ISS - Data Matrix. The first 10 message characters shall contain two elements:
a vendor-assigned 8-character wafer identification code, followed by
a 2-character vendor identification code as defined in SEMI AUX001.
6.3.2.1 The remaining message characters, if any, shall contain information as agreed between the vendor and user.
6.3.3 The total number of message characters available depends on the row/column count and on the encoded
character set (see Table 2).
6.4 Location of the Matrix Code Symbol
6.4.1 With the wafer positioned front surface up and with the primary fiducial toward the operator, the reference
point of the matrix code symbol shall be located as specified in Table 3.
6.4.2 The square matrix code symbol used on 125 to 200 mm diameter wafers shall be oriented with the border
columns parallel with the primary fiducial bisector and the border rows perpendicular to the primary fiducial
bisector. The secondary border column shall be toward the primary fiducial bisector, and the primary border row
shall be toward the edge of the wafer.
6.4.3 The nominal position of the reference point of the matrix code symbol is 1 mm to the right of the closest
alphanumeric code field. A 3º skew toward the alphanumeric field, which is the maximum skew allowed by SEMI
M12 and SEMI M13, does not cause the matrix code symbol to impinge on the alphanumeric code fields, even if the
symbol is placed only 15.5 mm from the primary fiducial bi-sector. Consequently, this matrix code symbol position
permits the simultaneous use of front surface alphanumeric marking as specified in SEMI M12 or M13, on 125 to
200 mm wafers with either flatted or notched primary fiducials.
6.4.4 Because the matrix code symbol is located in the same place with respect to the primary fiducial bisector on
all wafer diameters from 125 to 200 mm, the use of both marking and reading equipment is simplified.
SEMI T2-0298 © SEMI 1993, 2004 5