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SEMI E19.4-0998 E © SEMI 1992, 2003 6 Figure 3 Dimensions of Pod Hold Down Latches Figure 4 Dimensions of Pod Latch Hole

SEMI E19.4-0998

Figure 2

Port Dimensions

SEMI E19.4-0998

Figure 3

Dimensions of Pod Hold Down Latches

Figure 4

Dimensions of Pod Latch Hole

SEMI E19.4-0998

APPENDIX 1

APPLICATION NOTES

NOTICE: This appendix was approved as an official part of SEMI E19.4 by full letter ballot procedure, but the

recommendations in this appendix are optional and are not required to conform to this standard.

A1-1 Notes

A1-1.1 Automated pod transfer between load port and

automated material handling system (AMHS) might

require a lead-in capability of more than 5 mm. This

can be achieved by increasing the height of the guide

rails (dimension B5). SEMI standard E15 limits this

height to 50 mm (1.97 inches) maximum (see Figure

A1-1). The capture range can be increased to more than

15 mm (0.6 inches) if supplier and customer agree to

increase the guide rail height without violating SEMI

E15.

Figure A1-1

Optional Rail Dimensions

A1-1.2 The dimensions of the pod bottom are not

specified in this standard (see Section 6.2.5.1). It is

recommended that these dimensions should not exceed

282.0 mm (11.14 inches) in one direction and 292.6

mm (11.52 inches) in the other direction. These

maximum outer dimensions ensure a sufficient gap

around the pod and the guide rails in relation to B1 and

B2 to allow a reliable motion of the pod onto the port

plate.

A1-1.3 It is important that the external top of the pod

does not exceed the top of the cassette by more than 50

mm (1.97 inches). This is to prevent possible

interference between the pod and the equipment.

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