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SEMI E32-0997 © SEMI 1994 , 1997 41 NOTICE: T hese standards do n ot purport to address safety issues, if any, ass o ciated with their use. It is the responsibility of t he user of these standards to establish appropriat…

SEMI E32-0997 © SEMI 1994, 1997 40

15. The second atomic transfer now proceeds in a

similar fashion through steps 4–12 above. That

done, since there are no further moves required, the

restore stage begins, including “Atomic Transfer

Complete” events to the host.

16. Once restore operations are complete, each sends a

Transfer Job Complete message to the host. The

transfer is now complete.

A1-4.3 Sequential Moves — In this example, the

factory control system desires to move a cassette from

equipment “A” to equipment “B” using a fixed robot

stationed within reach of the two. Each piece of

equipment has a static port and will act as passive

transfer partners in all cases. The robot will act as the

primary partner for all transfers. The host system must

do the high-level planning of this move, determining

that the lot to be transferred will be ready to go, that the

robot is available, and that the receiving equipment is

available to receive the cassette.

To accomplish the transfer, two atomic moves are

required. First, the robot picks up the cassette at “A.”

Second, the robot deposits the cassette on “B.” The

gripper on the robot is considered its port in this case,

since that is the point at which ownership of the cassette

changes.

Since the step–by–step transfer details are similar to the

first two examples, they will be omitted. However, a

higher-level sequence will be given.

1. The host will send Transfer Job Create messages to

“A,” “B,” and the robot. The robot will be given

two sequential atomic moves to perform, the

equipment one each. Note that the Transfer Job

Create request to “B” could be delayed, if desired,

until the completion of the first atomic move.

2. The first atomic transfer is performed: the robot

removes the cassette from “A.” Note that no

HOCommands are issued, since the secondary

partner is passive.

3. The second atomic transfer is performed: the robot

places the cassette on “B.”

4. Both “A,” “B,” and the robot deliver Transfer Job

Complete messages to the host.

The transfer is complete.

An intelligent robot control system could combine the

two atomic moves discussed above into a single robot

program, achieving a more efficient transfer (e.g., no

redundant movement during the transfer). In such a

case, both “A” and “B” would need to be ready for

transfer before the robot program was executed. The

only limitation is that this combination would have to

match the model and messaging discussed above.

A1-4.4 Linked Lithography — The final example is

one where the micro level of material movement might

be used without the macro level messaging described in

this document. The linked lithography system described

below is not patterned after any existing system and

may not be the optimal implementation for such a

system.

For this example, the challenge is to transfer wafers

from a typical track system (following the coat/bake

process) into a stepper for imaging, and then back to the

track system for the develop process. In this example,

the stepper acts as a slave to the track system, accepting

wafers as they are given. The non–transfer-related

communications will not be discussed.

In the wafer transfer process, the track takes on the

macro level duties of the host. It is responsible for

informing the stepper that a wafer is to be transferred,

which wafer, and by what path and mechanism. It will

initiate the transfer in a method analogous to the

Transfer Job Create request. There is no transfer agent

in this case. Either equipment might act as the primary

transfer partner — it is irrelevant to this example.

The stepper and track will then exchange the normal

micro communications. First, the HOReady messages

will be sent. Next, the track will issue HOCommands to

cause the wafer to be physically transferred. Finally, the

HOVerify message transaction would occur.

Meaningful events would be reported to the host as

appropriate.

An alternative would be to design the system such that

the track system tells the stepper system, in effect, “I'll

be sending a series of wafers to you.” Since the

HOReady message contains sufficient information to

describe the transfer (assuming a specific transfer

recipe is not required), no specifics about the individual

transfers need be exchanged until the HOReady is sent.

In such a scheme, the stepper would take the HOReady

message as description of the specific transfer and

respond with an HOReady to match.

A1-4.5 Non–Compliant Transfer Partner — There will

be situations where only one of the transfer partners is

compliant with this standard. It is reasonable to use this

transfer methodology in some such cases, especially

those involving passive transfer. The host would be

responsible for emulating a compliant transfer partner

on behalf of the non–compliant partner (for the benefit

of the compliant partner). Examples of non–compliant

transfer partners might include a WIP rack, a human

transfer agent, an older process equipment, or any

material handling systems that support other protocols.

SEMI E32-0997 © SEMI 1994, 199741

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

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Index

NOTE: The numbers in this index represent the section, table, and/or figure that contains the corresponding subject.

abort ................................................................................................................4.1.1, 4.2.2, 4.3, 4.3.3, 4.4, 4.4.3, A1-3.2

ABORTING.................................................................................................4.3.1, 4.3.2, 4.3, 4.3.3, 4.4, A1-3.1, A1-3.2

Acquire.................................................................................................................................................................... 5.4.3

active transfer partner.................................................................................................................................... 2.0, A1-3.1

AGV.............................................................................................................................................. 4.1.1, A1-4.1–A1-4.4

alarm .......................................................................................................................................................................... 1.2

allocate...........................................................................................................................................................4.1.1, 4.2.1

allocated..................................................................................................... 4.1.1, 4.2.1, 4.2.2, Table 4.1, A1-1.1, A1-1

allocation........................................................................................................................................................4.1.1, 4.2.1

atomic transfer ...................................... 2.0, 3.1, 4.1.1–4.3.1, 4.3.2, 4.3.3–4.4.1, 4.2.2, 4.4.3, 5.1.2, 5.2.1, 5.4.1, 5.4.2,

...............................................................................................................................Table A1-1, A1-3.1, A1-4.1–A1-4.3

ATOMIC TRANSFER ACTIVE........................................................................................4.2.2, 4.2.3, Table 4.2, 4.3.3

Atomic Transfer Complete............................4.2.2, Table 4.1, 4.2.3, Table 4.2, Table 4.4, 4.4.3, 5.2.1, A1-4.1, A1-4.2

ATOMIC TRANSFER CREATED................................................................................................................. Table 4.2

ATOMIC TRANSFER QUEUED .........................................................................................4.2.3, Table 4.2, Table 4.4

Atomic Transfer Started........................................................................ 4.2.1–4.2.1.2, Table 4.2, 4.4.3, A1-4.1, A1-4.2

AttrData .................................................................................................................................................................. 4.4.2

Attribute...........................................................................................................................3.2, 4.2.1.1, 4.4.1, 4.4.2–4.4.3

AttrStatus ................................................................................................................................................................... 3.2

AWAIT JOB COMPLETION .......................................................................................................................4.2.2, 4.3.2

AWAITING TRANSFER PARTNER............................................................................ 4.2.3, Table 4.2, 5.2.1, A1-3.2

commit .................................................................................................................................................................... 4.1.1

committed ......................................................................4.2.1.2, 4.2.3, Table 4.2, Table 4.4, 4.4.3, 5.3, A1-4.1, A1-4.2

Committed To Transfer.................................................................. 4.2.1.2, Table 4.2, Table 4.4, 4.4.3, A1-4.1, A1-4.2

compound.........................................................................................................................2.0, 4.1.2, 4.1.3, 4.1.7, 4.2.1.1

compound transfer.........................................................................................................................2.0, 4.1.2, 4.1.3, 4.1.7

concurrent ......................................................................................................................................................4.3.2, 4.3.3

deallocate .......................................................................................................................................................4.1.1, 4.2.3

deallocated .............................................................................................................................................................. 4.1.7

deallocation............................................................................................................................................................. 4.1.7

dynamic................................................................................................................................................2.0, 4.1.4, 4.2.1.1

dynamic port .............................................................................................................................................................. 2.0

E30............................................................................................................................................................................. 1.3

E5............................................................................................................................................................................... 1.3

EQName...............................................................................................................................................4.4.2, 4.4.3, 5.4.2

ErrorCode.......................................................................................................................................................4.4.2, 4.4.3

ErrorText................................................................................................................................................................. 4.4.2

event.................4.2.1-4.2.1.2, Table 4.1, Table 4.2, 4.3.1, Table 4.4, 4.4.1, 4.4.2, 4.4.3, 4A.1.2, A3.2, A1-4.1, A1-4.2

exchange of cassettes ........................................................................................................................................... A1-4.2

Extend..................................................................................................................................................................... 5.4.3