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SEMI S2-0703a E © SEMI 1991, 2004 79 R14-4.4 Where references t o standards have been incorporated into this Related Information. These references do not imply applicability o f the entire standards, but onl y of the sec…

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RELATED INFORMATION 14
RECOMMENDATIONS FOR DESIGNING AND SELECTING FAIL-TO-
SAFE EQUIPMENT CONTROL SYSTEMS (FECS) WITH SOLID STATE
INTERLOCKS AND EMO
NOTICE: This related information is not an official part of SEMI S2. It was derived from original Task Force
activity. This related information was approved for publication by line item ballot vote on July 2003.
NOTE 1: Determination of the suitability of this material is
solely the responsibility of the user.
R14-1 Safety Philosophy
R14-1.1 The following documents should control
applicability of criteria in order of precedence as
shown:
1. regulatory codes and standards
2. applicable sections of SEMI S2
3. SEMI Safety Guidelines
4. this Related Information
5. other appropriate standards for functional
safety
R14-2 Purpose
R14-2.1 This Related Information describes
approaches to using alternative technology and
technical concepts to achieve functional safety in
semiconductor manufacturing equipment.
R14-2.2 Who can make use of this Related Information
— Recommendations for Designing and Selecting Fail-
to Safe Control Systems (FECS) with Solid State
Interlocks and EMO may be used by semiconductor
equipment manufacturers, system integrators, end users
and suppliers of automation systems as well as
independent third parties.
R14-3 Scope
R14-3.1 Applicability — This Related Information
applies to facilities, equipment and machinery used to
manufacture, measure, assemble and test semiconductor
products and therefore need a high level of safety to
protect people, machines, the environment and the
industrial processes.
R14-3.2 This Related Information is intended for use
by semiconductor equipment manufacturers, system
integrators, end users and suppliers of automation
systems as well as independent third parties as an
orientation to design and architecture of automation
systems based on safety-related components. The
safety-related automation system executes safety
functions to bring the equipment into a safe condition
or to maintain it in a safe condition when a hazardous
event occurs.
R14-3.3 This Related Information specifies a technical
concept for equipment control systems, which does not
require the exclusive use of hardwired
electromechanical safety components.
R14-3.4 Contents — This Related Information
contains the following sections:
1. Purpose
2. Scope
3. Limitations
4. Referenced Standards
5. Terminology and Definitions
6. State-of-the-Art Safety Control System —
Comprised of Solid State Electronics
7. Philosophy and General Concepts
8. Guide to Assessment and Test Methods
9. Safety Performance
10.
Application Examples
11. Related Documents
NOTICE: This Related Information does not purport to
address all of the safety issues associated with its use.
It is the responsibility of the user of this Related
Information to establish appropriate functional safety
and determine the applicability of regulatory or other
limitations prior to use.
R14-4 Limitations
R14-4.1 This Related Information does not contain the
technical detail necessary to design equipment control
systems.
R14-4.2 This Related Information is not intended to be
used to verify compliance to local regulatory
requirements.
R14-4.3 It is not the philosophy of this Related
Information to give advice on what must be done to
achieve a certain safety performance for equipment
control systems, but it gives advice on how to achieve a
specified level of safety functionality using industrial
controllers (e.g. programmable logic controllers),
distributed input/output (I/O) functions and network
communications.
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R14-4.4 Where references to standards have been
incorporated into this Related Information. These
references do not imply applicability of the entire
standards, but only of the sections referenced.
R14-4.5 Because of the variety of uses for FECS
described in this Related Information, those responsible
for the application and use of FECS must satisfy
themselves that all necessary steps have been taken to
assure that each application and use meets all
performance and safety requirements, including any
applicable laws, regulations, codes and standards. The
illustrations, charts and layout examples shown in this
Related Information are solely for purposes of example.
R14-5 Referenced Standards
R14-5.1 SEMI Standards
SEMI E54 — Sensor/Actuator Network Standard
SEMI E81 — Provisional Specification for CIM
Framework Domain Architecture
SEMI E98 — Provisional Standard for the Object-
Based Equipment Model (OBEM)
SEMI S10 — Safety Guideline For Risk Assessment
R14-5.2 IEC Standards
18
NOTE 2: International standards bodies are indicated, with
the equivalent national standards shown in parenthesis.
IEC 60204-1 (EN 60204-1) — Safety of Machinery –
Electrical Equipment of Machines - Part 1: General
Requirements
IEC 61010-1 (EN 61010-1) — Safety Requirements for
Electrical Equipment for Measurement, Control, and
Laboratory Use - Part 1: General Requirements
IEC 61508 (EN 61508) — Functional Safety of
Electrical/Electronic/Programmable Electronic Safety-
Related Systems
NOTE 3: IEC 61508 consists of 7 parts, IEC 61508-1 through
IEC 61508-7
R14-5.3 ISO Standards
19
NOTE 4: International standards bodies are indicated, with
the equivalent national standards shown in parenthesis.
ISO 10218 (EN 775) — Manipulating Industrial
Robots-Safety
18 International Electrotechnical Commission, 3, rue de Varembé,
Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone:
41.22.919.02.11; Fax: 41.22.919.03.00 Website: http://www.iec.ch
19 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30
Website: http://www.iso.ch
ISO (ISO 13849-1 (EN 954-1)-1) — Safety of
Machinery-Safety-Related Parts of Control Systems
ISO 13849-2 (EN 954-2) — Safety of Machinery-
Safety-Related Parts of Control Systems – Part 2
Validation
ISO/IEC 13850 (EN 418) — Safety of Machinery –
Emergency Stop – Principles of Design
ISO 14118 (EN 1037) — Safety of Machinery –
Prevention of Unexpected Start-Up
ISO 14119 (EN 1088) — Safety of Machinery-
Interlocking Devices Associated with Guards –
Principles for Design & Selection
ISO 14121 (EN 1050) — Safety of Machinery-
Principles of Risk
NOTE 5: National and local Codes and Standards must be
applied as required by the installation location. Examples of
some that might apply are included below.
R14-5.4 ANSI Standards
20
ANSI/IEEE C95.1 (United States) — Standards for
Safety Levels with Respect to Human Exposure to
Radio Frequency Electromagnetic Fields
ANSI/ISA-S84.01-1996 — Application of Safety
Instrumented Systems for the Process Industry
ANSI/RIA R15.06 (United States) — Industrial Robots
and Robot System – Safety Requirements
R14-5.5 National Fire Protection Association
21
NFPA 79 (United States) — Electrical Standard for
Industrial Machinery
R14-5.6 VDI Standards
22
VDI/VDE 2180 Bl.2 (Germany) — Safety of Process
Control Technology
R14-5.7 DIN V VDE Standards
23
DIN V VDE 0801 — Principle for Computers in Safety
Related Systems
R14-6 Terminology
R14-6.1 Abbreviations and Acronyms
R14-6.1.1 ATL — Approved Testing Laboratory
20 American National Standards Institute, New York Office: 11 West
42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;
Fax: 212.398.0023 Website: http://www.ansi.org
21 National Fire Protection Association, 1 Batterymarch Park, P.O.
Box 9101, Quincy, MA 02269-9101, USA, www.nfpa.org
22 VDE-Verlag GmbH, Bismarkstrasse 33, 10625 Berlin, Germany,
www.vde.de
23 VDE-Verlag GmbH, Bismarkstrasse 33, 10625 Berlin, Germany,
www.vde.de
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R14-6.1.2 CAT. 4 — Category 4 (according to ISO
13859-1)
R14-6.1.3 CPU — Central Processing Unit
R14-6.1.4 EMO — Emergency Off
R14-6.1.5 EUC — Equipment Under Control
R14-6.1.6 FD — Field Device
R14-6.1.7 FECS — Fail-to-Safe Equipment Control
System
R14-6.1.8 GUI — Graphical User Interface
R14-6.1.9 I/O — Input/Output
R14-6.1.10 IFD — Intelligent Field Device
R14-6.1.11 ISFD — Intelligent Safety Field Device
R14-6.1.12 PLC — Programmable Logic Controller
R14-6.1.13 SIL — Safety Integrity Level (according to
IEC 61508)
R14-6.1.14 SRM — Safety Relay Module
R14-6.2 Definitions
R14-6.2.1 certified — Evaluated and approved for use
in a particular intended function in conformance with a
recognized standard by an accredited testing laboratory
(ATL).
NOTE 1: See SEMI S2 for definition of ATL.
R14-6.2.2 combined I/O — I/O systems of an FECS in
which non-safety-related and safety-related signal
modules are combined. (see Figure R14-2).
R14-6.2.3 common cause failure — failure, which is
the result of one or more events, causing coincident
failures of two or more separate channels in a multiple
channel system, leading to system failure.
R14-6.2.4 distributed I/O — input/output modules for
sensors and actuators interfacing to a network.
R14-6.2.5 electrical/electronic/programmable
electronic (adj.) — based on electrical OR electronic
OR programmable electronic technology.
NOTE 6: The term above is intended to cover any and all
devices or systems operating on electrical principles.
R14-6.2.6 Fail-to-safe equipment control system — A
programmable system of control circuits designed and
implemented for safety-related functions in accordance
with internationally recognized standards such as ISO
13849-1 (EN 954-1) or IEC 61508. These systems (e.g.
safety PLC, safety-related I/O modules) diagnose
internal and external faults and react upon detected
faults in a controlled manner in order to bring the
equipment to a safe state.
R14-6.2.7 field device — sensors and actuators such as
valves (electrical or pneumatic), temperature sensors,
proximity switches, pumps, motors etc.
R14-6.2.8 functional safety — The overall safety
design related to the EUC and the EUC control system.
Effective functional safety includes the correct
functioning of the electrical, electronic, or
programmable-electronic safety-related systems; or on
other-technology safety-related systems and may
include risk reduction measures.
R14-6.2.9 industrial controller — general term for
controller-technology, which includes PLC and PC-
based technology.
R14-6.2.10 intelligent field device — sensors and
actuators that use local intelligence to perform
functions such as communication, diagnosis and
interfacing to a network.
R14-6.2.11 network — general term for bus
technology, which includes field bus technology used in
control applications.
R14-6.2.12 programmable logic controller —
microprocessor based controller for sequential control;
the control logic of which can be changed through a
programming device connected to the controller, e.g.
programming panel, host computer, handheld terminal,
either directly or remotely through a network.
R14-6.2.13 random hardware failure — failure,
occurring at a random time, which results from one or
more of the possible degradation mechanisms in the
hardware.
R14-6.2.14 safety function — function to be
implemented by an electrical or electronic or
programmable electronic safety-related system, other
technology safety-related system or external risk
reduction facilities, which is intended to achieve or
maintain a safe state for the EUC, in respect of a
specific hazardous event.
R14-6.2.15 safety integrity — probability of a safety-
related system satisfactorily performing the required
safety functions under all the stated conditions within a
stated period of time.
R14-6.2.16 safety integrity level (SIL) — discrete level
(one out of a possible four) for specifying the safety
integrity requirements of the safety functions to be
allocated to the electrical or electronic or programmable
electronic safety-related systems, where safety integrity
level 4 has the highest level of safety integrity and
safety integrity level 1 has the lowest.
R14-6.2.17
safety network — a network certified for
safety applications (this can also be a subpart of a
standard network).