semi合集-English.pdf - 第2340页

SEMI E82-0705 © SEMI 1999, 2005 36 STEP COMMENTS HOST TSC COMMENTS 2. Enhanced Remote Command (ERC) TRANSFER . COMMANDID = “111111” . PRIORITY = 5 . REPLACE = 1 . TRANSFERINFO 1 – L,3 1. CARRIERID = “123456” 2. SOURCEPOR…

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SEMI E82-0705 © SEMI 1999, 2005 35
STEP COMMENTS HOST TSC COMMENTS
28. <-S6,F11 Event Report Send (ERS)
CarrierRemoved
. VehicleID = “RGVXX”
. CarrierID = “654321”
. CarrierLoc = “LOC2”
29. Event Report Acknowledge
(ERA)
S6,F12->
30. <-S6,F11 Event Report Send (ERS)
VehicleDeposit-Completed
. VehicleID = “RGVXX”
31. Event Report Acknowledge
(ERA)
S6,F12->
32. <-S6,F11 Event Report Send (ERS)
VehicleUnassigned
. VehicleID = “RGVXX”
. CommandID = “111111”
33. Event Report Acknowledge
(ERA)
S6,F12->
34. <-S6,F11 Event Report Send (ERS)
TransferCompleted
(Complete parameters)
. CommandName =
“TRANSFER”
. CommandID = “111111”
. Priority = 5
. Replace = 0
. ResultCode = 0
. CarrierLoc
1
= “PORTYY”
. TransferInfo
1
– L,3
1. CarrierID = “123456”
2. SourcePort = “PORTXX”
3. DestPort = “PORTYY”
. CarrierLoc
2
= “PORTYY”
. TransferInfo
2
– L,3
4. CarrierID = “654321”
5. SourcePort = “PORTXX”
6. DestPort = “PORTYY”
35. Event Report Acknowledge
(ERA)
S6,F12->
12.2.4 Carriers Replace
12.2.4.1 One carrier is transported from the source port (e.g., stocker output port) to the destination port (e.g.,
process equipment port-1) and the other carrier is transported from the same port (process equipment port-1) to the
destination ports (e.g., stocker input port) by the same vehicle. The transport vehicle is capable of acquiring and
depositing these two carriers sequentially. This function is used for the depressuring process equipment with door,
because the door opening time should be shorten for this type of equipment.
STEP COMMENTS HOST TSC COMMENTS
1. Both carriers are prepared
for a TRANSFER command at
the source ports.
SEMI E82-0705 © SEMI 1999, 2005 36
STEP COMMENTS HOST TSC COMMENTS
2. Enhanced Remote Command
(ERC)
TRANSFER
. COMMANDID = “111111”
. PRIORITY = 5
. REPLACE = 1
. TRANSFERINFO
1
– L,3
1. CARRIERID = “123456”
2. SOURCEPORT =
“PORTX1”
3. DESTPORT = “PORTY1”
. TRANSFERINFO
2
– L,3
4. CARRIERID = “654321”
5. SOURCEPORT = “PORTY1”
6. DESTPORT = “PORTZ1”
S2,F49->
3. <-S2,F50 Enhanced Remote Command
Acknowledge (ERCA)
4. <-S6,F11 Event Report Send (ERS)
TransferInitiated
. CommandID = “111111”
5. Event Report Acknowledge
(ERA)
S6,F12->
6. <-S6,F11 Event Report Send (ERS)
VehicleAssigned
. VehicleID = “AGVXX”
. CommandID = “111111”
7. Event Report Acknowledge
(ERA)
S6,F12->
8. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “AGVXX”
. TransferPortList – L,1
1. TransferPort
1
=
“PORTX1”
9. Event Report Acknowledge
(ERA)
S6,F12->
10. <-S6,F11 Event Report Send (ERS)
Transferring
. CommandID = “111111”
11. Event Report Acknowledge
(ERA)
S6,F12->
12. <-S6,F11 Event Report Send (ERS)
VehicleAcquireStarted
. VehicleID = “AGVXX”
13. Event Report Acknowledge
(ERA)
S6,F12->
14. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “AGVXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
15. Event Report Acknowledge
(ERA)
S6,F12->
16. <-S6,F11 Event Report Send (ERS)
VehicleAcquireCompleted
. VehicleID = “AGVXX”
SEMI E82-0705 © SEMI 1999, 2005 37
STEP COMMENTS HOST TSC COMMENTS
17. Event Report Acknowledge
(ERA)
S6,F12->
18. <-S6,F11 Event Report Send (ERS)
VehicleDeparted
. VehicleID = “AGVXX”
. TransferPortList – L,1
1. TransferPort
1
=
“PORTX1”
19. Event Report Acknowledge
(ERA)
S6,F12->
20. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “AGVXX”
. TransferPortList –
L,1
1. TransferPort
1
=
“PORTY1”
21. Event Report Acknowledge
(ERA)
S6,F12->
22. <-S6,F11 Event Report Send (ERS)
VehicleAcquireStarted
. VehicleID = “AGVXX”
23. Event Report Acknowledge
(ERA)
S6,F12->
24. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “AGVXX”
. CarrierID = “654321”
. CarrierLoc = “LOC2”
25. Event Report Acknowledge
(ERA)
S6,F12->
26. <-S6,F11 Event Report Send (ERS)
VehicleDepositStarted
. VehicleID = “AGVXX”
27. Event Report Acknowledge
(ERA)
S6,F12->
28. <-S6,F11 Event Report Send (ERS)
CarrierRemoved
. VehicleID = “AGVXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
29. Event Report Acknowledge
(ERA)
S6,F12->
30. <-S6,F11 Event Report Send (ERS)
VehicleDepositCompleted
. VehicleID = “AGVXX”
31. Event Report Acknowledge
(ERA)
S6,F12->
32. <-S6,F11 Event Report Send (ERS)
VehicleDeparted
. VehicleID = “AGVXX”
. TransferPortList – L,1
1. TransferPort
1
=
“PORTY1”
33. Event Report Acknowledge
(ERA)
S6,F12->