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SEMI E116.1-1104 © SEMI 2003, 2004 2 Table 1 EPTTracker Object SECS-II Attributes Defi nitions Attribute Name Attribute Da ta Form: SECS-II Structure “ObjType” 20 (A[10]) must always be set to “EPTTrack er” “ObjID” 20 (A…

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SEMI E116.1-1104 © SEMI 2003, 2004 1
SEMI E116.1-1104
SPECIFICATION FOR SECS-II PROTOCOL FOR EQUIPMENT
PERFORMANCE TRACKING (EPT)
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on August 16, 2004. Initially available at www.semi.org
September 2004; to be published November 2004. Originally published March 2003.
NOTICE: This document was rewritten in its entirety in 2004.
1 Purpose
1.1 This document maps the services and data of the Equipment Performance Tracking Standard (EPT) to SECS-II
streams, functions, and data definitions.
2 Scope
2.1 This document applies to all implementations of EPT that use the SECS-II message protocol (SEMI E5).
Compliance to this standard requires compliance to both SEMI E116 and SEMI E5.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E116 — Provisional Specification for Equipment Performance Tracking (EPT)
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 SECS-II Attribute Definitions
4.1 Table 1 provides the SECS-II structure definitions for the E116 EPTTracker Object. This must be compliant
with the E39 (OSS) protocol. The host does not have the ability to create or destroy these objects. However, the host
must be able to access all attributes via the default E39 GetAttr services (for all attributes) and SetAtt services (for
RW attributes).
4.2 A subset of these object attributes are enumerated via SECS-II Data Variables that may be provided via event-
reports. See the section on Variable Data Item Mapping in this document.
SEMI E116.1-1104 © SEMI 2003, 2004 2
Table 1 EPTTracker Object SECS-II Attributes Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType” 20 (A[10]) must always be set to “EPTTracker”
“ObjID” 20 (A[1..80]) <OBJECTIDENTIFIER>
ObjID is equipment defined. Examples are “EQUIPMENT”, “CHAMBER A”, “ROBOT
ARM”.
Conforms to the restrictions of ObjID as specified in SEMI E39.1
“BlockedReason” 51 (U1) BlockedReason
where the values are enumerated as:
0 = Not Blocked
1 = Unknown
2 = Safety Threshold
3 = Error Condition
4 = Parametric Exception
5 = Aborting, Aborted
6 = Pausing, Paused
7 = Reserved
8 = Reserved
9 = Reserved
“BlockedReasonText” 20 (A) BlockedReasonText
Usage is equipment defined. Examples: “Abort – Host-requested Abort”, “Fault – Reticle
Stage Error”; “Pause – Host-requested Pause”
“EPTElementType” 51 (U1) EPTElementType
where the values are enumerated as:
0 = Equipment
1 = Production EPT Module
2 = EFEM/Load Port EPT Module
“EPTState” 51 (U1) EPTState
where the values are enumerated as:
0 = Idle
1 = Busy
2 = Blocked
“EPTStateTime” 54 (U4) EPTStateTime
“EPTElementName” 20 (A) EPTElementName
Usage is equipment defined. Examples “EQUIPMENT”, “CHAMBER A”, “ROBOT ARM”.
“PreviousEPTState” 51 (U1) PreviousEPTState
where the values are enumerated as:
0 = Idle
1 = Busy
2 = Blocked
3 = No State
“PreviousTaskName” 20 (A[0..80]) PreviousTaskName
Usage is equipment defined. Examples: “Loading”, “Etching”, “Pumping Down”
SEMI E116.1-1104 © SEMI 2003, 2004 3
“PreviousTaskType” 51 (U1) PreviousTaskType
where the values are enumerated as:
0 = No Task
1 = Unspecified
2 = Process -- adding value (e.g., exposing)
3 = Support -- incapable of adding value (e.g., Handling/Transport)
4 = Equipment Maintenance (e.g., Equipment-initiated clean cycle)
5 = Equipment Diagnostics (e.g., Equipment-initiated health check)
6 = Waiting (e.g., chamber waiting for a robot to remove a substrate)
“TaskName” 20 (A[0..80]) TaskName
Usage is equipment defined. Examples: “Loading”, “Etching”, “Pumping Down”
“TaskType” 51 (U1) TaskType
where the values are enumerated as:
0 = No Task
1 = Unspecified
2 = Process -- adding value (e.g., exposing)
3 = Support -- incapable of adding value (e.g., Handling/Transport)
4 = Equipment Maintenance (e.g., Equipment-initiated clean cycle)
5 = Equipment Diagnostics (e.g., Equipment-initiated health check)
6 = Waiting) e.g., chamber waiting for a robot to remove a substrate)
“TransitionTimeStamp” 20 (A[16])
YYYYMMDDhhmmsscc
YYYY=Year 0000 to 9999
MM=Month 01 to 12
DD=Day 01 to 31
hh=Hour 00 to 23
mm=Minute 00 to 59
ss=Second 00 to 59
cc= Centisecond 00 to 99
“Transition” 51 (U1) Transition
where the values are enumerated as:
1 = Transition 1
2 = Transition 2
.
.
.
9 = Transition 9
“TrackerEventID” 54 (U4) TrackerEventID
where:
This is identical to EPTStateChangeEvent
i
corresponding to this object (see the Events
Mapping section in this document)
“DisableEventOnTransition” L,n
1. 51 (U1) <Transition Number>
2. 51 (U1) <Transition Number>
…
n. 51 (U1) <Transition Number>
where the elements of this list are can only have values in the range 1..9, in order, with no
repeats. This list may be empty.