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SEMI E15-0698 E2 © SEMI 1990, 2003 5 Figure 4 Wafer and Casse tte Orientat ion, Wafers Horizontal Figure 5 Wafer and Casset te Orientatio n, Wafers Vertica l 8 Related Documents 8.1 SEM I Docume nts SEMI E47 — Specificat…

SEMI E15-0698

Figure 2

Load Port Requirements, Plan View

Figure 3

Load Port Requirements, Elevation View

SEMI E15-0698

Figure 4

Wafer and Cassette Orientation, Wafers Horizontal

Figure 5

Wafer and Cassette Orientation, Wafers Vertical

8 Related Documents

8.1 SEMI Documents

SEMI E47 — Specification for 150 mm/200 mm Pod Handles

SEMI E48 — Specification for SMIF Indexer Volume Requirement

SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI T4 — Specification for 150 mm and 200 mm Pod Identification Dimensions

SEMI Compilation of Terms

SEMI E15-0698

APPENDIX 1

APPLICATION NOTES

NOTICE: This appendix was approved as an official part of SEMI E15 by full letter ballot procedure.

A1-1 Material transport automation can come in a number of forms, including AGV’s (automated guided

vehicles) and tracks (conveyers), which operate anywhere from tool loading level to ceiling level. Wafers may be

transported in cassettes or in carriers (such as cassettes in pods). Automation provides flexibility with regard to the

range of interface coordinates it can accommodate. On the other hand, it is clear that humans will continue to load

carriers on tools in many fabs. SEMI E15 is an attempt to satisfy all of these needs, including continued human

compatibility. In fact, compatibility of automation and human ergonomics has been considered of primary

importance in the rewrite of this standard.

A1-2 The increased value for C1, of 75 mm, over the previous value in this standard is determined by the

ergonomic requirement to accommodate a 95th percentile human male hand carrying a pod by its handles.

Limitation of the load port height to 900 mm was, again, driven by ergonomic considerations, as the previously

allowed value of up to 1300 mm was clearly “user unfriendly.”

A1-3 Equipment suppliers must consider the dimension, S, in order to ensure that their tool will be compatible

with automation systems and pods. This fact applies to tools with more than one load port per tool. In order to

enable space for two pods on side-by-side load ports, the dimension, S, must be greater than or equal to 350 mm for

tools processing 150 mm or smaller wafers, and 400 mm for 200 mm wafer tools. The dimension, S, is defined as

the distance between wafer carrier centroids. Driving factors for S are that the size of a pod is larger than a cassette

and that ergonomic guidelines suggest a clearance of at least 75 mm between the box and an adjacent object in order

to provide space for the human hands to grasp and pick up the box by its handles.

A1-4 A global horizontal placement tolerance of 15 mm of the carrier centroid should be allowed by the

alignment means of the load port. (That is, a misalignment by up to ± 7.5 mm in both the x and y directions of the

carrier centroid will still allow the alignment means to guide the carrier to its correct final location on the load port).

The misplacement dimension is made large to be consistent with the tactile/visual capabilities of humans and the

placement accuracy of AGV’s. This requires that the load port provide some alignment aid to bring the carrier

centroid to within the final registration tolerance (generally 0.5 mm) required by the automated wafer handling of

the tool. Standards for this registration tolerance will generally be found in the SMIF documents.

A1-5 The standard purposely does not address vacuum load locks. Since minimization of volume is usually a

design requirement for a vacuum load lock, the minimum clearances (C1 – C3) of this standard are not compatible

with optimum load lock design. It is not intended that vacuum load locks would be the load port of a tool in which

vacuum processing is performed. Simple solutions exist today for transportation of a cassette, or of individual

wafers, from a SEMI E15-compatible load port to a vacuum load lock. Open load ports are intended to be specified

for use with overhead transport systems for automation.

A1-6 It is not easy to formulate a standard which allows compatibility with such a wide range of requirements.

Nor is it easy to design equipment compatible with a number of different standards affecting the same hardware.

SEMI E15 covers a wide range of applications without causing undue compromise in any particular implementation,

while remembering that most of our fabs will continue to use human transport in the immediate future. We hope this

short discussion of key issues aids in your understanding of the intent and details of the standard.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

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