semi合集-English.pdf - 第1498页

SEMI E30.5-0302 © SEMI 2001, 2002 26 13.4 PP-UPDATE Remo te Command Scenario  Host issue s the PP -UPDAT E remote co mmand. COMMENTS HOS T EQUIPMENT COMMENTS START S2,F41--> <--S2,F42 Positive Ack nowledge. <--…

100%1 / 7923
SEMI E30.5-0302 © SEMI 2001, 200225
13 Scenarios
13.1 The purpose of this section is to document any MSEM specific scenarios that must be performed by this class
of equipment.
13.2 Normal Reporting
COMMENTS HOST EQUIPMENT COMMENTS
The equipment is in the IDLE processing state and in the
ONLINE REMOTE control state. Material arrives on input
port 1.
PP-ASSIGN S2,F63-->
<--S2,F64 Positive Acknowledge.
<--S6,F11 IDLE -> SETTING UP
Positive Acknowledge. S6,F12-->
<--S6,F11 SETTING UP -> READY
Positive Acknowledge. S6,F12-->
START S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 READY -> LOAD.
Positive Acknowledge. S6,F12-->
[WHILE] Not End of Run
1) LOAD->WORKING
2) Sample and/or Site level data reporting.
3) WORKING->UNLOAD
4) Substrate level data reporting.
5) UNLOAD->LOAD.
[ENDWHILE].
<--S6,F11 LOAD->STOPPING.
Positive Acknowledge. S6,F12-->
Run level data reporting.
<--S6,F11 STOPPING->IDLE.
Positive Acknowledge. S6,F12-->
13.3 ABORT/ CLEANUP Remote Command Scenario
Host issues the ABORT/CLEANUP remote command
COMMENTS HOST EQUIPMENT COMMENTS
ABORT S2,F41--> ("CLEANUP" not specified)
<--S2,F42 Positive Acknowledge.
<--S6,F11 Transition to ABORTED.
Positive Acknowledge. S6,F12-->
CLEANUP S2,F41-->
<--S2,F42 Positive Acknowledge.
Equipment performs cleanup activities.
<--S6,F11 CEID is posted.
[IF] cleanup is successful:
Transition to IDLE
[ELSE]
Remain in the ABORTED state.
[ENDIF].
Positive Acknowledge. S6,F12-->
SEMI E30.5-0302 © SEMI 2001, 2002 26
13.4 PP-UPDATE Remote Command Scenario
Host issues the PP-UPDATE remote command.
COMMENTS HOST EQUIPMENT COMMENTS
START S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 READY -> LOAD
Positive Acknowledge. S6,F12-->
[WHILE] Not End of Run
1) LOAD->WORKING
2) WORKING->UNLOAD
3) UNLOAD->LOAD
[ENDWHILE]
Sometime during the
[WHILE]:
PAUSE S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 Transition to PAUSING
Positive Acknowledge. S6,F12-->
<--S6,F11 PAUSING -> PAUSED
Positive Acknowledge. S6,F12-->
PP-UPDATE S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 PAUSED->CHECKING
Positive Acknowledge. S6,F12-->
<--S6,F11 CEID is posted.
[IF] the updates are valid:
Return to the previous process state thru history
[ELSE]
Return to the PAUSED state. The Process Program
remains unchanged.
[ENDIF]
Positive Acknowledge. S6,F12-->
13.5 PP-ASSIGN / PP-UNASSIGN Scenario
Host issues the PP-ASSIGN/PP-UNASSIGN remote commands.
COMMENTS HOST EQUIPMENT COMMENTS
PP-ASSIGN S2,F41-->
<--S2,F42 Positive Acknowledge.
PP-UNASSIGN S2,F41-->
<--S2,F42 Positive Acknowledge.
This may occur during the
STOPPING state.
13.6 The host may setup the material for additional processing without the cassette being removed and replaced on
the equipment.
SEMI E30.5-0302 © SEMI 2001, 200227
14 SEMI E30 Capabilities
14.1 The purpose of this section is to specify any SEMI
E30 Capabilities required by MSEM class equipment.
14.2 Requirement
The following SEMI E30
additional capabilities required by MSEM are:
• Dynamic Event Report Configuration
• Variable Data Collection
• Status Data Collection
• Alarm Management
• Remote Control
• Equipment Constants
• Process Program Management
• Spooling
• Trace Data Collection (optional)
• Control (Host Initiated)
15 Related Documents
Harel, D., “Statecharts: A Visual Formalism for
Complex Systems,” Science of Computer Programming
8 (1987) 231-274.
NOTICE:. SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.