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SEMI F97-0305 © SEMI 2005 23 Tag: Field Bit Meaning Issue Comment/Value Alarm-Mode 5 0: No_Alarm 1: Alarm Variable supported? Yes / No State-Transitions supported? Ye s / No Type of acknowledgement? Warning-Mode 6 0: No_…

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SEMI F97-0305 © SEMI 2005 22
RELATED INFORMATION 2
CHECKLIST FOR SUPPLIERS AND PURCHASERS
NOTICE: This related information is not an official part of SEMI F97 and was derived from work of the originating
task force. This related information was approved for publication by full letter ballot on November 10, 2004.
R2-1 Checklist of Information Exchanged
R2-1.1 Table R2-1 lists the information that needs to be agreed upon by purchasers, system integrators and
suppliers for a particular application within the focus of this standard.
Table R2-1 Template for the Information Exchanged Between FMCS and FPU
Project:
FPU:
Supplier FPU:
FPU Model:
Supplier FMCS:
FMCS Model:
Protocol FPU/FMCS:
NOTE 1: Table R2-1 is comprised of three sections – General Information, Status Information, and Data Information
General Information
Status Information
Tag:
Field Bit Meaning Issue Comment/Value
Watchdog-toggle 0 0/1 Supported? Yes / No
Frequency?
OP-Mode 1 0: Manual
1: Automatic
Variable supported? Yes / No
Initial state when started?
Manual
Automatic
State-Transitions supported? Yes / No
Restrictions to switch between states?
Control-Mode 2 0: Local
1: Remote
Variable supported? Yes / No
Initial state when started?
Local
Remote
State-Transitions supported? Yes / No
Run-Mode 3-4 0: Down (unscheduled)
1: Down (scheduled)
2: Stand-by
3: Run
Variable supported? Yes / No
Initial state when started?
Down (unscheduled)
Down (scheduled)
Stand-by
Run
State-Transitions supported? Yes / No
Restrictions to switch between states?
SEMI F97-0305 © SEMI 2005 23
Tag:
Field Bit Meaning Issue Comment/Value
Alarm-Mode 5 0: No_Alarm
1: Alarm
Variable supported? Yes / No
State-Transitions supported? Yes / No
Type of acknowledgement?
Warning-Mode 6 0: No_Warning
1: Warning
Variable supported? Yes / No
State-Transitions supported? Yes / No
Error-Mode 7 0: No_Error
1: Error
Variable supported? Yes / No
State-Transitions supported? Yes / No
Maintenance-Mode 8 0: No_Maintenance
1: Maintenance
Variable supported? Yes / No
State-Transitions supported? Yes / No
Simulation-Mode 9 0 : No_Simulation
1 : Simulation
Variable supported? Yes / No
State-Transitions supported? Yes / No
Initial state when started?
No_Simulation
Simulation
Means provided to switch between states?
Lock-Mode 10 0: Not_Locked
1: Locked
Variable supported? Yes / No
List critical failures which cause FPU to
leave locked state:
Others
(Describe)
SEMI F97-0305 © SEMI 2005 24
Data Information
FPU System Output Data
Analog Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Value
Range
Value Step Polarity Alarm
Levels
Warning
Levels
Discrete Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Meaning
FPU Subcontrol Level Data
Subsystem/Component:
Analog Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Value
Range
Value Step Polarity Alarm
Levels
Warning
Levels
Discrete Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Meaning
Subsystem/Component:
Analog Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Value
Range
Value Step Polarity Alarm
Levels
Warning
Levels
Discrete Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Meaning