semi合集-English.pdf - 第5965页
SEMI P41-0304 E © SEMI 2004 25 <ImageData> <ImageReferenceAdress>C:\image\def ect\defect2.bmp</Im ageReferenceAdress> <ImageInformation> <ImageFormat>bitmap</Im ageFormat> <ImageMag…
SEMI P41-0304
E
© SEMI 2004 24
<EvaluationRecipe recipe_name = "">
<EvaluationCondition></EvaluationCondition>
</EvaluationRecipe>
<EvaluateResult></EvaluateResult>
<ImageData>
<ImageReferenceAdress></ImageReferenceAdress>
<ImageInformation>
<ImageFormat></ImageFormat>
<ImageMagnification></ImageMagnification>
<ImagePixelNumber_X></ImagePixelNumber_X>
<ImagePixelNumber_Y></ImagePixelNumber_Y>
<ImagePixelSize unit = "">
<ImagePixelSize_X></ImagePixelSize_X>
<ImagePixelSize_Y></ImagePixelSize_Y>
</ImagePixelSize>
<ImageGrayLevel></ImageGrayLevel>
</ImageInformation>
<ImageIllumination></ImageIllumination>
<ImageRotation></ImageRotation>
<ImageMirror></ImageMirror>
<ImageFlip></ImageFlip>
<ImageConvertInformation>
<ImageContrast></ImageContrast>
<ImageBrightness></ImageBrightness>
<ImageConversionParameter></ImageConversionParameter>
</ImageConvertInformation>
<ImageReference origin = "">
<ImageReferencePoint></ImageReferencePoint>
<ImageReferencePosition unit = "">
<ImageReferencePosition_X></ImageReferencePosition_X>
<ImageReferencePosition_Y></ImageReferencePosition_Y>
</ImageReferencePosition>
</ImageReference>
<ImageTarget origin = "">
<ImageTargetPosition unit = "">
<ImageTargetPosition_X></ImageTargetPosition_X>
<ImageTargetPosition_Y></ImageTargetPosition_Y>
</ImageTargetPosition>
<ExpressionMark></ExpressionMark>
</ImageTarget>
</ImageData>
</DefectEvaluate>
</Defect>
<Defect defect_type = "pinhole" date_stamp = "16:35:00 03-sep-2003">
<DefectInformation origin = "MaskOrigin">
<DefectPosition unit = "micron">
<DefectPosition_X>86200</DefectPosition_X>
<DefectPosition_Y>76200</DefectPosition_Y>
</DefectPosition>
<DefectSize unit = "micron">
<DefectSize_X>0.2</DefectSize_X>
<DefectSize_Y>0.2</DefectSize_Y>
</DefectSize>
<DefectJudgment>review</DefectJudgment>
SEMI P41-0304
E
© SEMI 2004 25
<ImageData>
<ImageReferenceAdress>C:\image\defect\defect2.bmp</ImageReferenceAdress>
<ImageInformation>
<ImageFormat>bitmap</ImageFormat>
<ImageMagnification>10000</ImageMagnification>
<ImagePixelNumber_X>1024</ImagePixelNumber_X>
<ImagePixelNumber_Y>1024</ImagePixelNumber_Y>
<ImagePixelSize unit = "micron">
<ImagePixelSize_X>0.1</ImagePixelSize_X>
<ImagePixelSize_Y>0.1</ImagePixelSize_Y>
</ImagePixelSize>
<ImageGrayLevel>256</ImageGrayLevel>
</ImageInformation>
<ImageIllumination>transmission</ImageIllumination>
<ImageRotation>none</ImageRotation>
<ImageMirror>none</ImageMirror>
<ImageFlip>none</ImageFlip>
<ImageConvertInformation>
<ImageContrast>128/256</ImageContrast>
<ImageBrightness>128/256</ImageBrightness>
<ImageConversionParameter>raw data</ImageConversionParameter>
</ImageConvertInformation>
<ImageReference origin = "InspectionStartPoint">
<ImageReferencePoint>TopLeft</ImageReferencePoint>
<ImageReferencePosition unit = "micron">
<ImageReferencePosition_X>59448.8</ImageReferencePosition_X>
<ImageReferencePosition_Y>49448.8</ImageReferencePosition_Y>
</ImageReferencePosition>
</ImageReference>
<ImageTarget origin = "LeftTop">
<ImageTargetPosition unit = "pixel">
<ImageTargetPosition_X>512</ImageTargetPosition_X>
<ImageTargetPosition_Y>512</ImageTargetPosition_Y>
</ImageTargetPosition>
<ExpressionMark>square box</ExpressionMark>
</ImageTarget>
</ImageData>
</DefectInformation>
<DefectRepair date_stamp = "">
<RepairRecipe recipe_name = "">
<RepairCondition></RepairCondition>
</RepairRecipe>
<RepairResult></RepairResult>
<ImageData>
<ImageReferenceAdress></ImageReferenceAdress>
<ImageInformation>
<ImageFormat></ImageFormat>
<ImageMagnification></ImageMagnification>
<ImagePixelNumber_X></ImagePixelNumber_X>
<ImagePixelNumber_Y></ImagePixelNumber_Y>
<ImagePixelSize unit = "">
<ImagePixelSize_X></ImagePixelSize_X>
<ImagePixelSize_Y></ImagePixelSize_Y>
</ImagePixelSize>
SEMI P41-0304
E
© SEMI 2004 26
<ImageGrayLevel></ImageGrayLevel>
</ImageInformation>
<ImageIllumination></ImageIllumination>
<ImageRotation></ImageRotation>
<ImageMirror></ImageMirror>
<ImageFlip></ImageFlip>
<ImageConvertInformation>
<ImageContrast></ImageContrast>
<ImageBrightness></ImageBrightness>
<ImageConversionParameter></ImageConversionParameter>
</ImageConvertInformation>
<ImageReference origin = "">
<ImageReferencePoint></ImageReferencePoint>
<ImageReferencePosition unit = "">
<ImageReferencePosition_X></ImageReferencePosition_X>
<ImageReferencePosition_Y></ImageReferencePosition_Y>
</ImageReferencePosition>
</ImageReference>
<ImageTarget origin = "">
<ImageTargetPosition unit = "">
<ImageTargetPosition_X></ImageTargetPosition_X>
<ImageTargetPosition_Y></ImageTargetPosition_Y>
</ImageTargetPosition>
<ExpressionMark></ExpressionMark>
</ImageTarget>
</ImageData>
</DefectRepair>
<DefectEvaluate date_stamp = "19:30:00 03-sep-2003">
<EvaluationRecipe recipe_name = "recipe003">
<EvaluationCondition>parameter1-000 parameter2-000</EvaluationCondition>
</EvaluationRecipe>
<EvaluateResult>OK</EvaluateResult>
<ImageData>
<ImageReferenceAdress>D:\review\image\image001.bmp</ImageReferenceAdress>
<ImageInformation>
<ImageFormat>bitmap</ImageFormat>
<ImageMagnification>10000</ImageMagnification>
<ImagePixelNumber_X>2048</ImagePixelNumber_X>
<ImagePixelNumber_Y>2048</ImagePixelNumber_Y>
<ImagePixelSize unit = "nanometor">
<ImagePixelSize_X>10</ImagePixelSize_X>
<ImagePixelSize_Y>10</ImagePixelSize_Y>
</ImagePixelSize>
<ImageGrayLevel>256</ImageGrayLevel>
</ImageInformation>
<ImageIllumination>transmission</ImageIllumination>
<ImageRotation>none</ImageRotation>
<ImageMirror>y-mirror</ImageMirror>
<ImageFlip>none</ImageFlip>
<ImageConvertInformation>
<ImageContrast>230/256</ImageContrast>
<ImageBrightness>230/256</ImageBrightness>
<ImageConversionParameter>convert 8bit from 12bit</ImageConversionParameter>
</ImageConvertInformation>