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SEMI E51-0200 © SEMI 1995 , 2000 4 Table 1 Ty pical Facilities Services and Termination Matrix Ex ample — United States Water Se rvice Supply Temp. Sup ply Pressure (Return Pressure where no ted) Filtration (absolute ) S…
SEMI E51-0200 © SEMI 1995, 20003
(See Figure 1). The POC locations are the top, the
bottom, or the back of the tool. The customer should
identify a POC location in the tool purchase
specification. Suppliers should design tools to allow
for internal routing to all locations, to avoid
customization for every installation.
Figure 1
Three Point of Connection Locations
7.1.2 Seismic — The customer should specify the
applicable earthquake zone for the installation site. The
supplier should provide appropriate seismic restraints
and installation instructions.
7.1.3 Vibration — The customer should specify that
the supplier should provide the vibration sensitivity of
the tool prior to purchase. (See SEMI E6.)
7.1.4 Control and Signal Circuits — The customer
should specify and the supplier should provide control
and signal circuits that when routed external to the tool
are compliant with Article 725, Class 1, Class 2, and
Class 3, Remote Control, Signaling and Power Limited
Control Circuits of the National Electrical Code.
(See NFPA 70.)
Class 1 — No power limitation, 600 volts max.
Class 2 — Derived from listed Class 2 power supply.
Class 3 — Derived from listed Class 3 power supply.
7.1.5 Installation Requirements Provided by Suppliers
— See SEMI E6.
7.1.6 High Purity Distribution Systems Recom-
mendations — See SEMI E49.
7.1.7 POC Labeling — To ensure accurate connection
of facility utilities to each tool POC, the customer
should specify and the supplier should provide labeling
for each POC. Service labeling should match
descriptions listed in the supplier provided installation
documentation. (See SEMI E6.)
7.1.7.1 If required, mechanical POC labels should
include:
• Service purpose,
• Maximum pressure or pressure range, and
• Flow rate (if appropriate).
POC Label Example: Process Purge, Nitrogen, 80 psig
Max.
7.1.7.2 If required, electrical power POC labels should
include:
• Service purpose,
• Voltage & phase, and
• Current (Full load ampere continuous).
POC Label Example: Cryo Pump No. 2, 208 V, 1-
phase, 28.2 FLA
7.1.7.3 If required, control and signaling POC labels
should include:
• Purpose, and
• Class of control (see Section 7.1.4).
POC Label Example: Cryo Pump No. 2 Control, Class
2
SEMI E51-0200 © SEMI 1995, 2000 4
Table 1 Typical Facilities Services and Termination Matrix Example — United States
Water Service Supply Temp. Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Non-Potable Water 4°C - amb
(40°F - amb)
S = 258–552 kPa
(40–80 psig)
N/A non-human
consumption
Cu/
PVC SCH 40/
PVC SCH 80
NPT
Ultra Pure Water 20–24°C
(68–76°F)
S = 310–379 kPa
(45–55 psig)
< 0.1 µ 18+ M ohms
RES
PVDF/PFA stub/p. flange
≥ 5 cm (2 in.)
stub/union
< 5 cm (2 in.)
Deionized Water 20–24°C
(68–76°F)
S = 310–379 kPa
(45–55 psig)
0.1–0.2 µ 17.5 M ohms
RES
PVC SCH80/
PVDF/PFA
stub/p. flange
≥ 5 cm (2 in.)
stub/union
< 5 cm (2 in.)
Hot Ultra Pure
Water
60–90°C
(140–194°F)
S = 310–379 kPa
(45–55 psig)
< 0.1 µ site-specific PVDF stub/p. flange
≥ 5 cm (2 in.)
stub/union
< 5 cm (2 in.)
Fire Protection amb NFPA 13 N/A NFPA 13 N/A Carbon
Steel/SS
Process
Cooling Water
10–16°C
(50–60°F)
S = 310–552 kPa
(45–80 psig)
R = 0–207 kPa
(0–30 psig)
1.0–40 µ 50 K ohms RES PVC SCH80/
Cu/SS
NPT
Gas Service Supply Temp. Supply
Pressure
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Nitrogen, Ultra
Pure
amb 586–655 kPa
(85–95 psig)
0.01–0.1 µ - 316L EP SS face seal
Nitrogen, Process amb 552–621 kPa
(80–90 psig)
0.01–0.1 µ - 316L EP SS face seal
Nitrogen, Non-
Process
amb 552–655 kPa
(80–95 psig)
0.01–0.1 µ - Cu/SS face seal
Compressed Air amb 655–758 kPa
(95–110 psig)
0.1–5.0 µ –73 to –40°C
(–100 to –40°F)
dew point
Cu/SS compression
Oxygen amb 552–586 kPa
(80–85 psig)
0.01–0.1 µ - 316L EP SS face seal
Hydrogen, Bulk amb 414–552 kPa
(60–80 psig)
0.01–0.1 µ - 316L EP SS face seal See NOTE
2.
Argon amb 448–586 kPa
(65–85 psig)
0.01–0.1 µ - 316L EP SS face seal
Helium amb 448–586 kPa
(65–85 psig)
0.01–0.1 µ - 316L EP SS face seal
SEMI E51-0200 © SEMI 1995, 20005
Gas Service Supply Temp. Supply
Pressure
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Natural Gas - 7–21 kPa
(1–3 psig)
-- -NPT
Process Vacuum - 53–58 cm Hg
(21–23 in. Hg)
- - SS/Brass/ PVC
SCH 80
NPT
Specialty Gases - site-specific 0.01–0.1 µ site-specific site-specific face seal See NOTE
3.
Drains Waste Temp. Pressure Filtration
(absolute)
Specification POC Material POC Fitting Notes
Acid Waste < 43°C
(110°F)
See NOTE 1.
atm - - CPVC SCH80/
PVC SCH 80
stub See NOTE
4.
H
2
SO
4
See NOTE 1. atm - - PVDF/PVC SCH
80/CPVC
SCH 80/ PP
flare type
compression
See NOTE
4.
Solvent Waste See NOTE 1. atm - * Review
Chemistry Flash
Point
Carbon Steel /
304 SS
NPT or
p. flange
See NOTE
4.
Industrial < 43°C
(110°F)
See NOTE 1.
atm - - PVC SCH 40/
PVC SCH 80
stub
DI Reclaim Varies
See NOTE 1.
atm - - PVC SCH 40/
PVC SCH 80/
PVDF
stub
Fluoride Waste See NOTE 1. atm - - PP/PVC SCH
80/PVDF
stub See NOTE
4.
HF Reclaim See NOTE 1. - - No water dilution PVDF/PFA stub See NOTE
4.
Slurry See NOTE 1. - - - PVC SCH 40
CLEAR/
PVC SCH 40/
PVC SCH 80/ PP
stub
Bulk Chemical
Distribution
Supply
Temp.
Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Acids, Bases,
Oxidizers
amb - 0.1 µ PFA Filtration PVC SCH 40
Clear/PP for
secondary, PFA
for primary
5 cm (2 in.)
FNPT for
secondary,
flare type
compression
for primary
Capability of
secondary
containment to
tool interior
Solvents amb - 0.1 µ - 316 SS face seal/
compression
See NOTE 4.