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SEMI E54.9-0303 © SEMI 2000, 2003 12 9.3.2 Sensor Actu ator Controller (SAC) –– The presentation of the ex tended ISPM Sensor Actuator Controller (SAC) object attributes and services are as indicated in Table 27. Table 2…

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SEMI E54.9-0303 © SEMI 2000, 2003 11
Table 22 SISO Object Instance Attributes and
Services
SISO
Class ID = 134, Instance = 01
Attributes
ID Attribute Name SDM Tag
128 Input A1
129 Output A2
130 Data Type A3
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.9 SISO-Setpoint –– The presentation of the Single
Input Single Output Setpoint (SISO-Setpoint) object
instance attributes and services are as indicated in Table
23.
Table 23 SISO-Setpoint Object Instance Attributes
and Services
SISO-Setpoint
Class ID = 135, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
161 Ramp Type A33
162 Ramp Rate A34
163 Ratio A35
Services
ID Service Name SDM Tag
--- No additional services defined. --
9.2.10 Assembly-MFC –– The presentation of the
Assembly Mass Flow Controller (Assembly-MFC)
object instance attributes and services are as indicated
in Table 24.
Table 24 Assembly-MFC Object Instance Attributes
and Services
Assembly-MFC
Class ID = 136, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.3 Specific Device Model For In-Situ Particle Monitor
Device — These sections detail the network mapping
required to support the Specific Device Model for In-
Situ Particle Monitor (ISPM) Devices. Table 25
summarizes the In-Situ Particle Monitor Device Object
types. Subsequent Tables 26 to 40 details the attributes
and services associated with each In-Situ Particle
Monitor Device object type.
Table 25 In-Situ Particle Monitor Device Object
Types
SDM Object
Identifier
Object Name Modbus
Class ID
ISPMD1 (DM) Device Manager 1
ISPMD2 (SAC) Sensor Actuator Controller 2
ISPMD3 Sensor-AI-LCS 137
ISPMD4 Sensor-AI-SLS 138
ISPMD5 Sensor-AI-MNS 139
ISPM16 Sensor-AI-Counter 140
ISPMD17 Assembly-ISPM#1 141
ISPMD18 Assembly-ISPM#2 142
ISPMD19 Assembly-ISPM#3 143
ISPMD20 Assembly-ISPM#4 144
ISPMD21 Assembly-ISPM#5 145
ISPMD22 Assembly-ISPM#6 146
ISPMD23 Assembly-ISPM#7 147
ISPMD24 Assembly-ISPM#8 148
ISPMD25 Assembly-ISPM#9 149
9.3.1 Device Manager (DM) –– The presentation of the
extended ISPM Device Manager (DM) object attributes
and services are as indicated in Table 26.
Table 26 DM Object Instance Attributes and
Services
Device Manager Object (DM)
Class ID = 01, Instance ID = 01
Attributes
ID Attribute Name CDM Tag
128 Gain DmA33
129 Filter Bandwidth DmA34
130 Tool State DmA35
131 Laser Status DmA36
132 Flow Path DmA37
133 Volume DmA38
134 Volume Units DmA39
135 Leak Status DmA40
136 Time Stamp DmA41
Services
ID Service Name CDM Tag
33 Laser On DmS1
35 Laser Off DmS2
SEMI E54.9-0303 © SEMI 2000, 2003 12
9.3.2 Sensor Actuator Controller (SAC) –– The
presentation of the extended ISPM Sensor Actuator
Controller (SAC) object attributes and services are as
indicated in Table 27.
Table 27 SAC Object Instance Attributes and
Services
Sensor, Actuator, Controller Object (SAC)
Class ID = 02, Instance ID = 01
Attributes
ID Attribute Name CDM Tag
65 Number of Bins SacA65
66 Count Mode SacA66
67 Duration SacA67
Services
ID Service Name CDM Tag
33 Clear Counts SacS33
9.3.3 Sensor-AI-LCS –– The presentation of the Sensor
Analog Input Laser Current Sensor (Sensor-AI-LCS)
object attributes and services are as indicated in Table
28.
Table 28 Sensor-AI-LCS Object Instance Attributes
and Services
Sensor-AI-LCS
Class ID = 137, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid LcsA1
129 Full Scale LcsA2
130 Alarm Settling Time LcsA3
131 Warning Settling Time LcsA4
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.4 Sensor-AI-SLS –– The presentation of the Sensor
Analog Input Stray Light Sensor (Sensor-AI-SLS)
object attributes and services are as indicated in Table
29.
Table 29 Sensor-AI-SLS Object Instance Attributes
and Services
Sensor-AI-SLS
Class ID = 138, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid SlsA1
129 Full Scale SlsA2
130 Alarm Settling Time SlsA3
Sensor-AI-SLS
Class ID = 138, Instance ID = 1 through r
131 Warning Settling Time SlsA4
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.5 Sensor-AI-MNS –– The presentation of the
Sensor Analog Input Medium Noise Sensor (Sensor-AI-
MNS) object attributes and services are as indicated in
Table 30.
Table 30 Sensor-AI-MNS Object Instance Attributes
and Services
Sensor-AI-MNS
Class ID = 139, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid MnsA1
129 Full Scale MnsA2
130 Alarm Settling Time MnsA3
131 Warning Settling Time MnsA4
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.6 Sensor-AI-Counter –– The presentation of the
Sensor Analog Input Counter (Sensor-AI-Counter)
object attributes and services are as indicated in Table
31.
Table 31 Sensor-AI-Counter Object Instance
Attributes and Services
Sensor-AI-Counter
Class ID = 140, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid CounterA1
129 Full Scale CounterA2
130 Alarm Settling Time CounterA3
131 Warning Settling Time CounterA4
132 Upper Size CounterA5
133 Lower Size CounterA6
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.7 Assembly-ISPM#1 –– The presentation of the
Assembly #1 In-Situ Particle Monitor (Assembly-
ISPM#1) object attributes and services are as indicated
in Table 32.
SEMI E54.9-0303 © SEMI 2000, 2003 13
Table 32 Assembly-ISPM#1 Object Instance
Attributes and Services
Assembly-ISPM#1
Class ID = 141, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.8 Assembly-ISPM#2 –– The presentation of the
Assembly #2 In-Situ Particle Monitor (Assembly-
ISPM#2) object attributes and services are as indicated
in Table 33.
Table 33 Assembly-ISPM#2 Object Instance
Attributes and Services
Assembly-ISPM#2
Class ID = 142, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.9 Assembly-ISPM#3 –– The presentation of the
Assembly #3 In-Situ Particle Monitor (Assembly-
ISPM#3) object attributes and services are as indicated
in Table 34.
Table 34 Assembly-ISPM#3 Object Instance
Attributes and Services
Assembly-ISPM#3
Class ID = 143, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.10 Assembly-ISPM#4 –– The presentation of the
Assembly #4 In-Situ Particle Monitor (Assembly-
ISPM#4) object attributes and services are as indicated
in Table 35.
Table 35 Assembly-ISPM#4 Object Instance
Attributes and Services
Assembly-ISPM#4
Class ID = 144, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.11 Assembly-ISPM#5 –– The presentation of the
Assembly #5 In-Situ Particle Monitor (Assembly-
ISPM#5) object attributes and services are as indicated
in Table 36.
Table 36 Assembly-ISPM#5 Object Instance
Attributes and Services
Assembly-ISPM#5
Class ID = 145, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.12 Assembly-ISPM#6 –– The presentation of the
Assembly #6 In-Situ Particle Monitor (Assembly-
ISPM#6) object attributes and services are as indicated
in Table 37.
Table 37 Assembly-ISPM#6 Object Instance
Attributes and Services
Assembly-ISPM#6
Class ID = 146, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.13 Assembly-ISPM#7 –– The presentation of the
Assembly #7 In-Situ Particle Monitor (Assembly-
ISPM#4) object attributes and services are as indicated
in Table 38.