semi合集-English.pdf - 第432页

SEMI E62-0705 © SEMI 1997, 2005 1 SEMI E62-0705 PROVISIONAL SPECIFICATION FOR 300 mm FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS) This provisional specification was technically approved by the global Physical Inter…

100%1 / 7923
SEMI E57-0305 © SEMI 1996, 2005 7
R1-2 All of the dimensions for the kinematic coupling pin surfaces and locations are given as ranges so that any
roundness, cylindricity, perpendicularity, bending, or misalignment of the pins must be contained within the limits
given.
R1-3 As shown in Figure R1-3, these couplings can also be used to support 200 mm pods as an addition to the
requirements given in SEMI E19.4. However, concurrent implementations for both 200 and 300 mm wafer carriers
may be covered by patent claims.
facial
datum
plane
bilateral datum plane
200-mm
wafer
200-mm
SMIF
pod door
Figure R1-3
Application to 200 mm Pods
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E62-0705 © SEMI 1997, 2005 1
SEMI E62-0705
PROVISIONAL SPECIFICATION FOR 300 mm FRONT-OPENING
INTERFACE MECHANICAL STANDARD (FIMS)
This provisional specification was technically approved by the global Physical Interfaces & Carriers
Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on
April 7, 2005. It was available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally
published in 1997; previously published March 2003.
1 Purpose
1.1 This standard specifies the tool side of the interface between a process or metrology tool and a front-opening
box used to transport and store 300 mm wafers (which may or may not be in removable cassettes) in an IC factory.
2 Scope
2.1 This standard is intended to set an appropriate level of specification that places minimal limits on innovation
while ensuring modularity and interchange-ability at all mechanical interfaces. Only the physical interface is
specified; no materials requirements or micro-contamination limits are given. The interface specified in this standard
can be for a sealed mini-environment, but it could also just be a well-defined automation interface.
2.2 This standard is provisional because the front-opening interface is a new technology. Once interface testing is
done, this standard should be modified and upgraded from provisional status.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 SEMI Standards
SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm
Wafers
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer
Carriers
3.2 ISO Standard
1
ISO 4287 — Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions
and surface texture parameters
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
4.1 Definitions
4.1.1 bilateral datum plane — a vertical plane that bisects the wafers and that is perpendicular to both the
horizontal and facial datum planes (as defined in SEMI E57).
4.1.2 box — a protective portable container for a cassette and/or substrate(s).
1 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30 Website: www.iso.ch
SEMI E62-0705 © SEMI 1997, 2005 2
4.1.3 carrier capacity — the number of substrates that a carrier holds (as defined in SEMI E1.9).
4.1.4 cassette — an open structure that holds one or more substrates.
4.1.5 door seal zone — a surface on the exterior side of the port door for sealing to the box door.
4.1.6 facial datum plane — a vertical plane that bisects the wafers and that is parallel to the front side of the carrier
(where wafers are removed or inserted). On tool load ports, it is also parallel to the load face plane specified in
SEMI E15 on the side of the tool where the carrier is loaded and unloaded (as defined in SEMI E57).
4.1.7 frame seal zone — a surface on the exterior side of the frame of the port door for sealing to the frame of the
box door.
4.1.8 horizontal datum plane — a horizontal plane from which projects the kinematic-coupling pins on which the
carrier sits. On tool load ports, it is at the load height specified in SEMI E15 and might not be physically realized as
a surface (as defined in SEMI E57).
4.1.9 load face plane — the furthest physical vertical boundary plane from the cassette centroid or carrier centroid
on the side (or sides) of the tool where loading of the tool is intended (as defined in SEMI E15).
4.1.10 minienvironment — a localized environment created by an enclosure to isolate the product from
contamination and people.
4.1.11 pod — a box having a Standard Mechanical Interface (SMIF) per SEMI E19.
4.1.12 wafer carrier — any cassette, box, pod, or boat that contains wafers (as defined in SEMI E15).
5 Requirements
5.1 Datum Planes — The physical alignment mechanism from the box to the tool load port consists of features (not
specified in this standard) on the box that mate with three or six pins underneath as defined in SEMI E57. Most of
the dimensions of the interface from the box to the tool load port are determined with respect to the three orthogonal
datum planes defined in that standard: the horizontal datum plane, the facial datum plane, and the bilateral datum
plane. However, the dimensions in this standard do not apply when the box is placed on the load port, but rather
when the box has been moved horizontally into place against the front-opening interface. Otherwise, the front-
opening interface would interfere with the kinematic coupling during loading, and the minimum rear clearance in
E15 would be violated.
5.2 Symmetry — All of the dimensions for the interface are bilaterally symmetric about the bilateral datum plane
and about a plane z30 above the horizontal datum plane with the following exceptions (as viewed by a person
standing in front of the tool and facing the interface):
The registration pins are in the lower right and upper left quadrants of the port door.
Both latch keys turn 90° counter-clockwise from vertical to unlatch the box door from the box.
5.3
Door Alignment Maintenance Mechanism — The two registration pins that are used to limit the maximum
displacement of the box door while on the port door are shown in Figures 1 and 2 and specified in Table 1. The
over-all surface finish of the registration pins must have a final roughness height less than or equal to r47. The
registration pins are surrounded by reserved space for optional vacuum application.
5.4 Locking Mechanism — The box door is locked and unlocked by a set of two 13.5 mm by 5 mm heads on shafts
that have a 5 mm diameter. These latch keys must unlatch the box door from the box by rotating counter-clockwise
to horizontal and must latch the box door to the box by rotating clockwise to vertical (as viewed by a person
standing in front of the tool facing the interface). The latch keys must not rotate beyond these limits of the rotation
angle . To allow seal compression by latches, the torque delivered by the port to turn the latch keys must be at least
f30. Thus, it is recommended that no box door be designed that needs more torque than this. Figure 3 shows front,
side and top views of the latch keys. In addition, convex features on the outer edges of the latch keys (adjacent to the
surface defined by y36) must have a blend radius of r41 to prevent small contact patches with large stresses that
might cause wear and particles. Other convex features on the latch keys need only be de-burred and rounded off.
The over-all surface finish of the latch keys must have a final roughness height less than or equal to r47.