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SEMI E116-0705 © SEMI 2002, 2005 1 SEMI E116-0705 PROVISIONAL SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING This specificatio n was technically approved by the gl obal Information & Contr ol Committee. This editio…

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SEMI E115-0302
E
© SEMI 2002 14
RF out R
A
B
Port 2Port 1
Port 1
Port 2
Perform Calibrations
at End of Additional
Test Cables
Load Simulator
Input Connection
Output Connection
C2
C1
Network
Analyzer
NOTE 1: Both the Port 1 and Port 2 outputs need to be used for the measurement. Additional test cables are needed for the
transmission calibration between the two ports. The input connection of the Load Simulator attaches to Port 1 of the Network
Analyzer. The output connection of Load Simulator attaches to Port 2 of the Network Analyzer.
Figure R1-5
Schematic of a Load Simulator Test Setup for the Load Impedance and Efficiency Measurement
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SEMI E116-0705 © SEMI 2002, 2005 1
SEMI E116-0705
PROVISIONAL SPECIFICATION FOR EQUIPMENT PERFORMANCE
TRACKING
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published July 2002;
previously published November 2004.
1 Purpose
1.1 This document provides specification for implementing basic equipment performance tracking for production
equipment. Provisions in this document enable the host computer to track basic equipment performance in an
automated and consistent matter, without operator or host input. This document provides specification for
equipment suppliers to:
Track basic equipment states (no operator or host input required).
Track basic equipment states in a modular manner, for both major modules and the overall equipment.
Report basic equipment state changes to a host computer, at both module and equipment level.
Report equipment’s time in state to a host computer, at both module and equipment level.
Report reasons to a host computer for why equipment is blocked from performing its task, at both module and
equipment level.
1.2 Equipment users require the ability to track equipment performance without dependence on user input to
eliminate inaccuracies due to incorrect or untimely input from the user. The ability to track equipment performance
without user input is essential in 300 mm wafer factories where operational scenarios require minimal manual
interaction. EPT defines concepts, behavior, and message services that enable the host computer to obtain the
equipment data required for equipment performance tracking in an automated and consistent matter without operator
or host input.
1.3 EPT enables factory managers to identify the current states of factory equipment, both at the equipment level
and at the module level (e.g., processing chambers), without dependence on user input. EPT enables factory
engineers to evaluate the time that equipment and modules spent in different states and identify areas for
improvement. EPT enables factory engineers to obtain directly from the equipment the reasons why the equipment
or module is prevented from performing. EPT provides industrial engineers the equipment data which, when
combined with external data from the Manufacturing Execution System (MES), will enable accurate calculation of
SEMI E10 states and SEMI E79 metrics at the equipment-level and the module-level. EPT enables automation
engineers to develop reusable host interfaces by using a standardized collection event and data variables to collect
equipment state data.
2 Scope
2.1 The Scope of this standard is to define equipment behavior states and the data required to track basic equipment
performance for production equipment. These requirements are intended to facilitate equipment-level and module-
level state tracking and to communicate state information to the host for simple equipment performance tracking,
without requiring host or operator input.
2.2 Specifically, this document provides:
An Equipment Performance Tracking (EPT) state model that defines triggers for state changes.
Specification of data variables required to communicate basic equipment performance data to the host
computer.
Specification of event messages used to communicate basic equipment performance data to the host computer.
Requirements for EPT compliance.
SEMI E116-0705 © SEMI 2002, 2005 2
2.3 This standard specifies the concepts, behavior, and message services that enable the host computer to obtain the
equipment data required for equipment performance tracking in an automated and consistent manner, without
operator or host input. It does not specify the report of SEMI E10 states from the equipment to a host computer, as
this information requires user input and is already specified by SEMI E58.
2.4 This standard does not conflict with SEMI E58 nor does it inhibit the equipment’s ability to report out SEMI
E10 states via SEMI E58.
2.5 This standard is a building block towards SEMI E10 and SEMI E79 by providing accurate equipment
information required for SEMI E10 and SEMI E79 metrics, without dependence on operator or host input,
eliminating inaccuracies due to incorrect or untimely input from the user. EPT assists both SEMI E10 and SEMI
E79 by providing a modular approach to equipment performance tracking, allowing the state of the equipment to be
determined by the states of its major modules. EPT assists SEMI E79 by providing task-level detail of the
equipment or module’s current activity, allowing performance metrics to be tracked at the task level.
2.6 This is a provisional standard. In order to have the provisional status removed, the following areas must be
completed:
Equipment Interlock Information
Equipment Process Monitoring Information
Equipment Maintenance Trigger Information
Application of EPT State Model to load ports and internal buffers
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This standard applies to semiconductor production equipment. Other types of equipment have not been
examined. However, it may be used for other types of equipment when applicable.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E10 Specification for Definition and Measurement of Equipment Reliability, Availability, and
Maintainability (RAM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E58 Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior,
and Services
SEMI E79 Standard for Definition and Measurement of Equipment Productivity
SEMI E90 Specification for Substrate Tracking
SEMI E98 Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI 101 Provisional Guide for EFEM Functional Structure Model
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.