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SEMI E140-0305 © SEMI 2005 10 Row #1 Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula TB44 Annual, $ 96,800 15,718 15,718 15,718 15,718 14, 843 14,843 For Year n, sum the corresponding year’s value from these row…

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SEMI E140-0305 © SEMI 2005 9
Row
#1
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula
TB19 Cost to Process Engineering, $ 2,135 =TA67 ×
TA34/52/40
TB20 Cost to Supervision, $ 107 =TA68 ×
TA35/52/40
TB21 Cost to Operations, $ 50 =TA69 × TA36
TB22 Cost to Maintenance, $ 70 =TA70 × TA37
TB23 Cost of OEM Field Service Billed
to Fab In Addition to Purchase
Price, $
1,050 =TA71 × TA38
TB24 Cost of OEM Field Process Billed
to Fab in Addition to Purchase
Price, $
270 =TA72 × TA39
TB25 Materials Consumed, $ 2,000 =TA73
TB26
Installation
12,467 0 0 0 0 0 0
=(TB27:TB33
)
TB27 Cost to Equipment Engineering, $ 10,673 =TA58 ×
TA33/52/40
TB28 Cost to Process Engineering, $ 107 =TA59 ×
TA34/52/40
TB29 Cost to Supervision, $ 107 =TA60 ×
TA35/52/40
TB30 Cost to Operations, $ 50 =TA61 × TA36
TB31 Cost to Maintenance, $ 210 =TA62 × TA37
TB32 Cost of OEM Field Service Billed
to Fab In Addition to Purchase
Price, $
1,050 =TA63 × TA38
TB33 Cost of OEM Field Process Billed
to Fab in Addition to Purchase
Price, $
270 =TA64 × TA39
TB34
Training, $
30,800 0 0 0 0 0 0
=(TB35:TB36
)
TB35 Training Time Billed by OEM, $ 28,800 =TA48 × TA49
×
(TA50:TA54)
TB36 Materials Consumed, $ 2,000 =TA55
TB37
Moves & Rearrangements, $
30,000 0 0 0 0 0 0 =TB38
TB38 Moves & Rearrangements, $ 30,000 =TA57
TB39
Floor Space, $
875 875 875 875 875 0 0
=(TB40:TB41
)
TB40 Gas Box, $ 625 625 625 625 625 0 0 =IF(TA16>=1,
TA17 ×
TA12,0)
TB41 Support Equipment, $ 250 250 250 250 250 0 0 =IF(TA21>=1,
TA22 ×
TA12,0)
TB43
Total Fixed Costs, $
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7
SEMI E140-0305 © SEMI 2005 10
Row
#1
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula
TB44
Annual, $
96,800 15,718 15,718 15,718 15,718 14,843 14,843 For Year n,
sum the
corresponding
year’s value
from these
rows:
TB7+TB17+TB
26+TB34+TB3
7+ TB39
TB45
Cumulative, $
96,800 112,518 128,236 143,954 159,672 174,515 189,358
=(Year 1
value + Year 2
value + … +
Year n value)
#1
Row numbers begin with 7 to align with the corresponding rows in the sample spreadsheet. The row numbering convention is the Table
number (using a lettering scheme to simplify the formulae) followed by the row in that table.
#2
Depreciation formulas may be found in standard accounting textbooks.
Table 3 Annualized Recurring Costs for the Input Data Listed in Table 1.
Row
#1
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula
TC7
Material, $
2,079 2,141 2,206 2,272 2,340 0 0 =(TC8:TC11)
TC8 Test/Filler Wafers, $ 139 143 147 151 156 0 0 =TA79 × TA26 ×
TA31 × TA30
TC9 Utilities, $ 1,857 1,913 1,970 2,029 2,090 0 0 =(TA80 ×
TA40+TA81 ×
TA41+TA82 ×
TA42) × TA26 ×
TA31
TC10 Supplies, $ 28 29 29 30 31 0 0 =TA77 × TA43 ×
TA26 × TA31
TC11 Waste Disposal, $ 55 57 59 61 62 0 0 =TA76 × TA26 ×
TA31 × TA44
TC12
Consumables, $
960 989 1,018 1,049 1,080 0 0 =TC13
TC13
Consumables, $
960 989 1,018 1,049 1,080 0 0 =IF(TA85<TA16,T
A84/TA16 ×
ROUNDUP
((TA16-
TA85)/TA85,0),0)
TC14
Maintenance, $
37,527 38,653 39,813 41,007 42,237 0 0 =(TC15:TC19)
TC15 Labor, $ 4,717 4,859 5,005 5,155 5,309 0 0 =TA31/TA102 ×
(((TA126+TA134)
× TA33/52/40) +
((TA127+TA135) ×
TA34/52/40) +
((TA128+TA136) ×
TA35/52/40) +
((TA129+TA139) ×
TA36) +
((TA130+TA138) ×
TA37) +
((TA131+TA139) ×
TA38) +
((TA132+TA140) ×
TA39))
TC16 Spare Parts, $ 3,800 3,914 4,031 4,152 4,277 0 0 =TA112
SEMI E140-0305 © SEMI 2005 11
Row
#1
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula
TC17 Repair Parts, $ 1,410 1,452 1,496 1,541 1,587 0 0 =TA31/TA102 ×
(TA113+TA114 ×
TA40+TA141 ×
TA30+TA141)
TC18 Service Contract, $ 0 0 0 0 0 0 0 =TA111
TC19 Training, $ 27,600 28,428 29,281 30,159 31,064 0 0 =(TA117 × TA118
× (TA119:TA123)
+ TA124) × TA116
TC20
Labor, $
22,869 23,555 24,262 24,990 25,739 0 0 =TC21
TC21 Operations, $ 22,869 23,555 24,262 24,990 25,739 0 0 =TA87 × TA36 ×
TA26 × TA31
TC22
Support Personnel, $
0 0 0 0 0 0 0 =(TC23:TC28)
TC23 Equipment Engineering, $ 0 0 0 0 0 0 0 =TA89 × TA26 ×
TA33
TC24 Process Engineering, $ 0 0 0 0 0 0 0 =TA90 × TA26 ×
TA34
TC25 Supervision, $ 0 0 0 0 0 0 0 =TA89 × TA26 ×
TA35
TC26 Maintenance, $ 0 0 0 0 0 0 0 =TA92 × TA37 ×
TA26 × TA31
TC27 OEM Field Service, $ 0 0 0 0 0 0 0 =TA93 × TA38 ×
TA26 × TA31
TC28 OEM Field Process, $ 0 0 0 0 0 0 0 =TA94 × TA39 ×
TA26 × TA31
TC29
Scrap, $
0 0 0 0 0 0 0 =0
(These are
accounted for in
Y$.)
TC31
Support Services, $
600 618 637 656 675 0 0 =(TC32:TC33)
TC32 ESH, $ 500 515 530 546 563 0 0 =TA96
TC33 Other, $ 100 103 106 109 113 0 0 =TA97
TC35
Total Recurring Costs, $
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7
TC36
Annual, $
64,035 65,956 67,935 69,973 72,072 0 0 =IF(TA16>=1,
(TC7 + TC12 +
TC14 + TC20 +
TC22 + TC29 +
TC31),0)
TC37
Cumulative, $
64,035 129,992 197,927 267,900 339,973 339,973 339,973 =(Year 1 value +
Year 2 value + … +
Year n value)
#1
Row numbers begin with 8 to align with the corresponding rows in the sample spreadsheet. The row numbering convention is the Table
number (using a lettering scheme to simplify the formulae) followed by the row in that table.
Table 4 Annualized Yield Costs for the Input Data Listed in Table 1.
Row
#1
Year 1 Year 2 Year 3 Year 4 Year 5 Year 6 Year 7 Formula
TD16 Equipment Yield, $ 0 0 0 0 0 0 0 =TA150 × TA28
TD17 Defect Limited Yield, $ 0 0 0 0 0 0 0 =TA151 × TA29
TD18 Parametric Limited Yield, $ 0 0 0 0 0 0 0 =TA152 × TA29
TD20 Total Yield Costs, $ 0 0 0 0 0 0 0
TD21 Annual, $ 0 0 0 0 0 0 0 =IF(TA16>=1,
(TD16:TD18),0)