semi合集-English.pdf - 第5449页

SEMI M60-0305 © SEMI 2005 17 -5 .00 -4 .00 -3 .00 -2 .00 -1 .00 0. 00 1. 00 2. 00 3. 00 1. E-02 1. E-01 1. E+ 00 1. E+01 1.E +02 Qb d ( C /c m 2 ) Ln (-L n(1 -F)) 1m m 2 1m m 2 1m m 2 5m m 2 5m m 2 5m m 2 10m m 2 10m m 2…

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SEMI M60-0305 © SEMI 2005 16
0
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10
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01020
TDDB defect density(cm-2)
TZDB B-mode defect density(cm-2)
Figure R1-1
Correlation of Defect Densities of TZDB and TDDB Measurements
Qbd
Weibull
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log Q
BD
Qbd
Weibull
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Qbd
Weibull
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log Q
BD
Figure R1-2
Classification of TDDB Breakdown Mode
SEMI M60-0305 © SEMI 2005 17
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1.E-02 1.E-01 1.E+00 1.E+01 1.E+02
Qbd (C/cm
2
)
Ln(-Ln(1-F))
1mm2
1mm2
1mm2
5mm2
5mm2
5mm2
10mm2
10mm2
10mm2
Figure R1-3
Capacitor Area Dependence of Q
BD
. J=0.1A/cm
2
, 125ºC.
Table R1-1 Measurement Condition of Constant Current Stress
TDDB for Round Robin.
J
stress
(A
･
cm
2
)
Temp.(ºC)
0.1 RT/80/125
0.05 125
0.01 125
Figure R1-4
Gate Area Dependence of CCS-TDDB Measurement at 125ºC, 100mA/cm
2
in the W-mode Range of 2C/cm
2
or more. High Linearity in All TDDB Results Was Obtained in the W-mode Region.
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0.1110
Q bd (C /cm 2)
L n (- L n (1 - F ))
1m m 2
1m m 2
1m m 2
5m m 2
5m m 2
5m m 2
10m m 2
10m m 2
10m m 2
SEMI M60-0305 © SEMI 2005 18
J
(A/cm
2
)
Failure (%)
Qbd (C/cm
2
)
at Weibull = 0
0.01 15.4 5.9
0.05 15.0 5.4
0.1 14.7 5.2
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2
3
1.E-02 1.E-01 1.E+00 1.E+01 1.E+02
Qbd (C/cm
2
)
Ln(-Ln(1-F))
10mA
10mA
10mA
50mA
50mA
50mA
100mA
100mA
100mA
Figure R1-5
Current Density Dependence of Q
BD
. 1mm
2
, 125ºC
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1.E-02 1.E-01 1.E+00 1.E+01 1.E+02
Qbd (C/cm
2
)
Ln(-Ln(1-F))
R.T
R.T
R.T
85C
85C
85C
125C
125C
125C
Figure R1-6
Temperature Dependence of Q
BD
. J=0.1A/cm
2
, 125ºC
Table R1-2 Current Density Dependence of Q
BD
. (Area = 1mm
2
, Temperature = 125ºC)