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SEMI E139-0705 © SEMI 2005 1 SEMI E139-0705 SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RaP) This specificatio n was technically approved by the gl obal Information & Contr ol Committee. This edition was appro…

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SEMI E138-0305 © SEMI 2005 3
7.3.3 Description — This is a human readable description of the error code being reported. It maps directly to the
definition of the error code for each of the expected result of the services as defined by the specific standard.
Additional information may be supplied after this string to provide more detail about the error. Use the “:” colon
symbol as delimiter (i.e. Common Component, Code 5001, “Insufficient Arguments Provided:Argument
“SessionID” missing).
Table 3 Example of Error Descriptions
# Description Comment
1 “Unknown Object in Object Specifier” Error description for Code “1” as defined in SEMI E5.
2 “Loadport does not exist” Error code “49” description from E87 and defined in E5.
3 “Operation Not Supported” Error description for Error Code “5000”.
7.3.4 Extension — This attribute allows the supplier to include additional information regarding the error code
encountered. This field is used when the description does not explicitly cover the problem and more specific
information is required.
7.4 Common Standardized Errors — This section defines common errors to be reported by any application
processing a service. Most of these errors are related to the validation of the service.
Table 4 Common Standardized Error Codes
Code Description Comment
5000 Operation Not Supported [:Operation specific detail] Description of the actual error encountered.
Additional information may be included.
5001 Insufficient Arguments Provided [:Operation specific detail] One or more arguments are missing in the request.
5002 Invalid Arguments Provided [:Operation specific detail] One or more arguments in the request are invalid or
incompatible.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
SEMI E139-0705 © SEMI 2005 1
SEMI E139-0705
SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT
(RaP)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published March 2005.
Table of Contents
1 Purpose .......................................................................................................................................................................3
2 Scope ..........................................................................................................................................................................3
3 Limitations..................................................................................................................................................................4
4 Referenced Standards .................................................................................................................................................4
4.1 SEMI Standards...................................................................................................................................................4
4.2 ISO Standards......................................................................................................................................................4
4.3 OMG Standards...................................................................................................................................................4
5 Terminology ...............................................................................................................................................................5
5.1 SEMI Compilation of Terms ................................................................................................................................5
5.2 Acronyms.............................................................................................................................................................5
5.3 Definitions ...........................................................................................................................................................5
6 Conventions................................................................................................................................................................6
6.2 Object Modeling ..................................................................................................................................................6
6.2.1 Unified Modeling Language (UML).................................................................................................................6
6.2.2 Class Diagrams ................................................................................................................................................6
6.2.3 Name of a Class................................................................................................................................................6
6.2.4 Abstract and Concrete Classes.........................................................................................................................6
6.2.5 Class Attribute Definition.................................................................................................................................6
6.2.6 Association Documentation..............................................................................................................................7
6.2.7 Association Navigability...................................................................................................................................7
7 Overview of RaP ........................................................................................................................................................8
7.3 RaP Participants..................................................................................................................................................8
7.6 RaP Environment.................................................................................................................................................8
7.7 Execution of Recipes............................................................................................................................................8
7.8 Creation and Editing of Recipes..........................................................................................................................9
7.9 Tracking and Storage of Recipes.........................................................................................................................9
7.10 Communication Overview .................................................................................................................................9
7.11 Key Recipe Concepts .........................................................................................................................................9
7.12 ProcessDefinitionElement .................................................................................................................................9
7.12.2 Recipe Structure............................................................................................................................................11
7.12.3 Parameterization ..........................................................................................................................................13
7.12.4 TransferContainer ........................................................................................................................................15
7.13 Realizing the Purpose......................................................................................................................................15
8 Requirements............................................................................................................................................................15
8.1 Requirements Overview.....................................................................................................................................15
8.2 Recipe Object Model .........................................................................................................................................16
8.3 PDE Class Diagram ..........................................................................................................................................16
8.3.2 PDEheader Class ...........................................................................................................................................17
8.3.3 AntecedentData Class.....................................................................................................................................18
8.3.4 ReferencedPDE Class.....................................................................................................................................19
8.3.5 ExecutionTarget Class....................................................................................................................................19
8.3.6 PDEparameter Class......................................................................................................................................20
8.3.7 PDEbody Class...............................................................................................................................................21
8.3.8 PDEbodyReference Class...............................................................................................................................21
SEMI E139-0705 © SEMI 2005 2
8.4 RaP Services......................................................................................................................................................21
8.5 RaPnode Requirements and Clarifications........................................................................................................33
9 Compliance...............................................................................................................................................................36
10 Related Documents.................................................................................................................................................37
List of Figures
Figure 1 — RaP Subject Matter.....................................................................................................................................3
Figure 2 — RaPnodes....................................................................................................................................................8
Figure 3 — PDE Contents ...........................................................................................................................................10
Figure 4 — PDE With Separate PDEbody ..................................................................................................................11
Figure 5 — Recipe Structure Illustration.....................................................................................................................12
Figure 6 — Parameter Flow Illustration......................................................................................................................14
Figure 7 — PDE Class Diagram..................................................................................................................................16
Figure 8 — RaPnode Class Diagram...........................................................................................................................22
Figure 9 — TransferContainer Illustration ..................................................................................................................32
List of Tables
Table 1 — Attribute Table Format ................................................................................................................................6
Table 2 — Navigable Associations for Class xxx .........................................................................................................7
Table 3 — PDE Class Attributes.................................................................................................................................17
Table 4 — Navigable Associations for PDE ...............................................................................................................17
Table 5 — PDEheader Class Attributes......................................................................................................................17
Table 6 — Navigable Associations for PDEheader....................................................................................................18
Table 7 — AntecedentData Class Attributes...............................................................................................................19
Table 8 — Navigable Associations for AntecedentData .............................................................................................19
Table 9 — ReferencedPDE Class Attributes...............................................................................................................19
Table 10 — ExecutionTarget Class Attributes ............................................................................................................20
Table 11 — PDEparameter Class Attributes ..............................................................................................................20
Table 12 — PDEbody Class Attributes .......................................................................................................................21
Table 13 — PDEbodyReference Class Attributes .......................................................................................................21
Table 14 — RaPnode Class Attributes ........................................................................................................................22
Table 15 — Service Descriptions ................................................................................................................................23
Table 16 — Service Parameter Dictionary..................................................................................................................23
Table 17 — Service Parameters ..................................................................................................................................28
Table 18 — Req/Ind and Rsp/Cnf Codes ...................................................................................................................28
Table 19 — getPDEdirectory() Service Parameters....................................................................................................28
Table 20 — deletePDE() Service Parameters..............................................................................................................29
Table 21 — getPDEheader() Service Parameters .......................................................................................................29
Table 22 — getPDE() Service Parameters ..................................................................................................................29
Table 23 — requestToSendPDE() Service Parameters................................................................................................30
Table 24 — sendPDE() Service Parameters................................................................................................................30
Table 25 —
resolvePDE() Service Parameters............................................................................................................31
Table 26 — verifyPDE() Service Parameters ..............................................................................................................31
Table 27 — RaP Compliance Table ............................................................................................................................37