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SEMI E101-1104 © SEMI 2000, 2004 6 Equipm ent EFEM (Equ ipment Front End Module) Su bstrat e Ha nd le r AGV PGV RG V Process Part OHT Carri er Hand ler Loa d Por t Group In tern a l Buffer In tern a l Su bst ra te Port S…
SEMI E101-1104 © SEMI 2000, 2004 5
Equipment
EFEM (Equipment Front End Module)
Substrate
Handler
Process Part
AGV
PGV
RGV
Carrier
Transportation
(Automatic or
Manual)
Carrier Handler
Load Port Group
Substrate
Transpor-
tation
OHT
Operator
Figure 1
Conceptual Structure of Fixed Buffer Type EFEM in Equipment W hen Substrate Handler Is Installed
Outside Process Part
Equipment
EFEM
(Equipment Front End Module)
Substrate
Handler
AGV
PGV
RGV
Process Part
OHT
Carrier
Transportation
(Automatic or
Manual)
Carrier Handler
Load Port Group
Substrate
Transportation
Operator
Figure 2
Conceptual Structure Location of Fixed Buffer Type EFEM in Equipment When Substrate Handler Is
Included Inside Process Part
SEMI E101-1104 © SEMI 2000, 2004 6
Equipment
EFEM (Equipment Front End Module)
Substrate
Handler
AGV
PGV
RGV
Process Part
OHT
Carrier Handler
Load Port
Group
Internal
Buffer
Internal
Substrate
Port
Substrate
Transpor-
tation
Carrier
Transportation
(Automatic or
Manual)
Operator
Figure 3
Conceptual Structure of Internal Buffer Type EFEM in Equipment When Substrate Handler Is Installed
Outside Process Part
Equipment
EFEM (Equipment Front End Module)
Substrate
Handler
AGV
PGV
RGV
Process Part
OHT
Carrier Handler
Load Port
Group
Internal
Buffer
Internal
Substrate
Port
Substrate
Transportation
Carrier
Transportation
(Automatic or
Manual)
Operator
Figure 4
Conceptual Structure of Internal Buffer Type EFEM in Equipment When Substrate Handler Is Included
Inside Process Part
SEMI E101-1104 © SEMI 2000, 2004 7
OHT
AGV/
RGV/
PGV
1+ Human Interfaces (User Interface)
1+ EMO Switch1+ Signal Tower 1+ Operation Console
0,1
Substrate
Handler
0, 1+
Substrate
Transfer
Robot
Process
Part
1 Carrier Handler
1+ Load Port Group
1+ Load Port
0,1 Manual Switches
0,1 Carrier Presence Indicator
0,1 Carrier Indicators
0,1 Carrier Placement Indicator
0,1 Load Port Door
0,1 PI/O for AGV/RGV/OHT
0,1 Cart to Tool Docking Port Interface
0,1 Carrier ID Reader/Writer
1Load Plate
1 Kinematic Coupling
0,1 Dock Plate
1 Carrier Opener/Loader
0,1 FOUP Opener
1 Open/Close
0,1 Carrier Slot Mapper
0,1 [FOUP]
Carrier Slot
Mapper
0,1 Dock/Undock Mechanism
0,1 [FOUP] Carrier Purge Interface
1 Load Port Unit
0,1
Carrier Opener/Loade
r
Maintenance Panel
0,1 Substrate
ID Reader
0,1 Aligner
Equipment
0,1 Carrier Operation Panel
0,1 Info Pad Sensors
1 Fixed Buffer Type EFEM
0,1 Status Indicators
0,1 Carrier Sensors
Figure 5
Fixed Buffer Type EFEM Functional Structure Model
1 Carrier Handler
1+ Load Port Group
1+Load Port
0,1 Carrier Operation Panel
0,1Manual Switches
0,1 Carrier Presence Indicator
0,1 Carrier Indicators
0,1 Carrier Placement Indicator
1Load Plate
0,1 Carrier Sensors
1 Kinematic Coupling
0,1 Carrier ID Reader/Writer
0,1 [OC] Carrier Slot Mapper
0,1 Load Port Door
0,1 PI/O for AGV/RGV
0,1 Cart to Tool Docking Port Interface
1+ Internal Buffer
1 Carrier Transfer
Robot
1+Carrier Storage
1Carrier Sensors
1Kinematic
Coupling
1Load Plate
0,1+ Internal Substrate Port
0,1Dock Plate
1 Kinematic Coupling
1 Load Plate
0,1 Carrier Purge interface
0,1 Dock/ Undock
Mechanism
0,1 FOUP Opener
1 Open/Close
Equipment
1 Load Port Unit
OHT
AGV/
RGV/
PGV
0,1 [FOUP] Carrier Slot
Mapper
1Carrier Opener/Loader
1+Human Interfaces (User Interface)
1+EMO Switch1+Signal Tower 1+ Operation Console
0,1 Carrier Sensors
0,1
Substrate
Handler
0, 1+
Substrate
Transfer
Robot
Process
Part
0,1 [FOUP]
Carrier Slot
Mapper
0,1 Substrate
ID Reader
0,1 Aligner
1 Internal Buffer Type EFEM
0,1 Status Indicators
0,1 Carrier ID Reader/Writer
0,1 Info Pad Sensors
Figure 6
Internal Buffer Type EFEM Functional Structure Model