semi合集-English.pdf - 第2840页

SEMI E102-0600 © SEMI 2000 48 R1-2.9 Scenari o Nine — M odify Job Handli ng MTSC reserves and manages AMHS equipment capacity (Internal Service) MTSC determines AMHS Route, selects stk10 from sgr1 (Internal S ervice) 8: …

100%1 / 7923
SEMI E102-0600 © SEMI 200047
R1-2.8 Scenario Eight — Abort Job Handling
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
MTSC reserves and manages AMHS equipment capacity (Internal Service)
MTSC determines AMHS Route, selects stk10 from sgr1 (Internal Service)
Preferable for Supervisor to makestopped() job. In
this case the carrier remains on a port.
8: MaterialContainerStateChangedEvent
16: DurableLocationChangedEvent
2: requestJob(JobType Transport, Priority 1, Deadline time1, container aaa, DestinationMachine Eq5, DestinationPort Eq5/port1)
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
7: makeInTransit()
15: setMaterialTrackingLocation(MaterialTrackingLocation ohs2)
17: makeAborted()
10: Transfer Command to Stk5 (carrier aaa, dest stk5/Bay_Out) (Stocker SEM)
11: Transfer Command Updates (Stocker SEM)
12: Transfer Command Completed (Stocker SEM)
13: Transfer Command to ohs2 (src stk5/Bay_Out, dest stk10/Bay_In) (IBSEM)
14: Transfer Command Updates (IBSEM)
19: TransferAbortInitiated (IBSEM)
20: TransferAbortCompleted (IBSEM)
18: JobStateChangedEvent(Job TrJob1, previousState JobExecuting, newState JobAborting)
22: informJobStateChange(Job TrJob1, previousState JobAborting, newState JobAborted)
3: Returns Job Handle TrJob1
1: setUnit(unitvalue)
4: JobStateChangedEvent(..PreviousState JobUndefined, NewState JobQueued)
5: JobStateChangedEvent(..PreviousState JobQueued, NewStateJobExecuting)
9: getUnit()
21: JobStateChangedEvent(..previousState JobExecuting, newState JobAborted)
23: removeFinishedJob()
24: JobStateChangedEvent(..previousState JobAborted, newStateJobUndefined)
Figure R1-18
Scenario Case 8
SEMI E102-0600 © SEMI 2000 48
R1-2.9 Scenario Nine — Modify Job Handling
MTSC reserves and manages AMHS equipment capacity (Internal Service)
MTSC determines AMHS Route, selects stk10 from sgr1 (Internal Service)
8: MaterialContainerStateChangedEvent
16: DurableLocationChangedEvent
2: requestJob(JobType Transport, Priority 1, Deadline time1, container aaa, DestinationMachine Eq5, DestinationPort Eq5/port1)
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
7: makeInTransit()
15: setMaterialTrackingLocation(MaterialTrackingLocation ohs2)
17: makeStopped()
10: Transfer Command to Stk5 (carrier aaa, src shelf, dest stk5/Bay_Out) (Stocker SEM)
11: Transfer Command Updates (Stocker SEM)
12: Transfer Command Completed (Stocker SEM)
13: Transfer Command to ohs2 (carrier aaa, src stk5/Bay_Out, dest stk10/Bay_In) (IBSEM)
14: Transfer Command Updates (IBSEM)
18: JobStateChangedEvent(.. previousState Executing, newState Stopping)
19: Transfer Command Completed (IBSEM)
22: Transfer Command to stk10 (carrier aaa, src stk10/Bay_In, dest shelf) (Stocker SEM)
20: setMaterialTrackingLocation(MaterialTrackingLocation stk10)
21: DurableLocationChangedEvent
23: Transfer Command Updates (Stocker SEM)
24: Transfer Command Completed (Stocker SEM)
28: informJobStateChange(Job TrJob1, previousState JobStopping, newState JobStopped)
31: requestJob(JobType Transport, Priority 1, Deadline time1, container aaa, DestinationArea Sgr1)
25: makeStored()
26: MaterialContainerStateChangedEvent
3: Returns Job Handle TrJob1
Supervisor modifies destination by stopping current
job and requesting new one.
1: setUnit(unitvalue)
4: JobStateChangedEvent(..prevousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..prevousState JobQueued, newState JobExecuting)
9: getUnit()
27: JobStateChangedEvent(.. previousState JobStopping, newState JobStopped)
29: removeFinishedJob()
30: JobStateChangedEvent(.. previousState JobStopped, newState JobUndefined)
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
Figure R1-19
Scenario Case 9
SEMI E102-0600 © SEMI 200049
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
35: informJobStateChange(Job TrJob2, previousState JobQueued, newState JobExecuting)
37: informJobStateChange(Job TrJob2, previousState JobExecuting, newState JobCompleted)
32: Returns Job Handle TrJob2
33: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
34: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
36: getUnit()
38: removeFinishedJob()
39: JobStateChangedEvent(.. previousState JobStopped, newState JobUndefined)
Figure R1-20
Scenario Case 9 (continued)