semi合集-English.pdf - 第4535页
SEMI D25-0600 E © SEMI 2000, 2003 18 Air shower Figure A1-9 Customer Normal Room to Air Shower Customer clean Figure A1-10 Customer Clean Room
SEMI D25-0600
E
© SEMI 2000, 2003 17
Incoming
Figure A1-7
Incoming
Customer normal room
Figure A1-8
Customer Normal Room
SEMI D25-0600
E
© SEMI 2000, 2003 18
Air shower
Figure A1-9
Customer Normal Room to Air Shower
Customer clean
Figure A1-10
Customer Clean Room
SEMI D25-0600
E
© SEMI 2000, 2003 19
Vacant box
Customer
normal room
Customer clean room
Figure A1-11
Vacant box, from Customer Clean Room to Customer Normal Room
Figure A1-12
Vacant Box, Customer Normal Room