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SEMI E81-0600 © 1999, 2 000 6 • process d efinitions and routings, • equipment data sampling sch emes and st orage sche ma, • personnel qualificatio ns, • and m a ny others. 6.3 CIM Framew ork Foundationa l Co ncepts 6.3…

They determine the processing environment seen by a

manufactured product (e.g., wafer). Processing recipes

may be subject to change between product runs or

processing cycles.

5.2.46 sub-component — a component that is fully

contained within a larger component. The interfaces of

the sub-component may be exposed or hidden by the

encapsulating component.

5.2.47 substitutability — the ability to replace a given

component from one supplier with a functionally

equivalent component from another supplier without

impacting the other components or its clients in the

system.

5.2.48 type — a declaration that describes the common

properties and behavior for a collection of objects.

Types classify objects according to a common interface;

classes classify objects according to a common

implementation.

6 Overview

6.1 This section provides background information that

will help readers get the most from the content of this

specification.

6.2 Intended Audience

6.2.1 The framework specification is intended to

address the needs of the following CIM technologists:

• Technical CIM managers.

• System architects and engineers.

• Application developers and integrators.

• Standards developers.

6.2.2 These groups may be found in a variety of

organizations, including semiconductor manufacturers,

software product suppliers, system integrators,

equipment suppliers, standards organizations,

universities, national laboratories, and other research

organizations.

6.2.3 Technical CIM Managers

6.2.3.1 Technical CIM managers are responsible for

managing the development, delivery, and integration of

complex manufacturing software applications. They can

use the CIM Framework specification to plan and

organize the development activities and guide

component testing and validation. Moreover, those who

buy some of their software from external sources can

use it as a purchasing guide when discussing system

architecture and integration requirements with potential

suppliers.

6.2.4 System Architects and Engineers

6.2.4.1 System architects and engineers are

responsible for overall system design, including

selection of industry standards for computing and

communications infrastructure, software development

processes, product roadmaps, and related topics. They

can make extensive use of the CIM Framework as a

starting point for many of their activities, including the

• partitioning and allocation of application functions

to specific modules,

• definition of the boundary between the distributed

system infrastructure and the rest of the system,

and

• specification of open interfaces between the

portions of the system they are designing and the

external environment.

6.2.4.2 They can also use the CIM Framework

specifications to define a strategic system roadmap for

migration to an open, distributed system environment.

6.2.5 Application Developers and Integrators

6.2.5.1 Application developers and integrators must

produce, install, and support software applications for

semiconductor manufacturing. The CIM Framework

specification, in conjunction with a specific framework

“binding” (i.e., target computer system hardware and

software technologies), represents a set of detailed

design requirements for the application developer. At a

minimum, the CIM Framework defines the scope and

boundaries of the essential standard components of a

manufacturing execution system, and can be used

principally as an interface specification. The object

models can also be used in the internal design of new

applications and/or legacy integration “wrappers,”

accelerating the development process even further.

Finally, the specification can form the basis for creating

an independent set of tests necessary to verify

conformance.

6.2.6 Standards Developers

6.2.6.1 Developers of CIM software standards are

responsible for specifying the public interfaces and

shared information models that allow the many

software products found in a modern semiconductor

factory to work together. They can use the CIM

Framework as an open source of information for

establishing precise definitions for the many items in a

factory that must be represented in multiple suppliers’

products, including

• standards for partitioning and communicating with

complex equipment,

• product and raw material attributes and

relationships,

• process definitions and routings,

• equipment data sampling schemes and storage

schema,

• personnel qualifications,

• and many others.

6.3 CIM Framework Foundational Concepts

6.3.1 This section provides an explanation of the basic

concepts of framework, component, and sub-component

as used in the CIM Framework Domain Architecture.

6.3.2 Framework

6.3.2.1 A framework is a software infrastructure that

provides a common environment for the development

and integration of applications and sharing of

information in a given problem domain. The CIM

Framework is a particular type of framework based on

an object-oriented model of semiconductor wafer

manufacturing. It specifies manufacturing objects and

object interaction protocols that enable building

semiconductor CIM applications from a framework of

compatible, substitutable application components.

6.3.2.2 The heart of the framework is a set of

semiconductor manufacturing abstractions (e.g., Wafer,

Specification, Machine) and services (e.g., get wafer

location, set specification parameter, get machine

utilization) that are typically embodied in applications

(e.g., material management, specification management,

machine control). The implementations of these

abstractions are delivered on distributed computer

platforms (e.g., workstations, servers) which use

standard software system technologies (e.g.,

communications, database, and user interface). The

current CIM Framework is specifically targeted at

manufacturing information management and control for

both the planning and operational phases of

semiconductor wafer fabrication.

6.3.3 Component Architecture

6.3.3.1 The CIM Framework specifies software

functions that are common across MES applications and

serve to integrate those MES applications into a

coherent system. The CIM Framework software

architecture is based on components. Components are

software building blocks—“chunks” of functionality

that make up software applications. By specifying

standard interfaces and behavior of common MES

components, manufacturers can assemble systems from

components from multiple suppliers and they can

evolve those systems by extending the common

components and by substituting old components with

improved components that implement the same

interfaces and behavior in improved and extended

ways. The CIM Framework defines a manufacturing

execution system architecture whose components can

be assembled in many ways and driven by many

business processes and operational policies.

6.3.3.2 Figure 1 shows the CIM Framework architec-

ture as a layered system, with the CIM Framework cov-

ering the middle layer of that system. Figure 2 details

the layers, showing the components and their interact-

ion and extension. The following subsections provide

an introduction to the CIM Framework architecture.

Infrastructure

Common

Components

Application

Objects

CIM Framework

Domain Specifications

Figure 1

CIM Framework Layering

6.3.3.3 Infrastructure

6.3.3.3.1 The infrastructure provides the distributed

computing environment for the application. These

services include operating system, communications,

data storage, user interface, event distribution,

exception management, etc. The CIM Framework

assumes infrastructure services and facilities defined by

the Object Management Group®’s (OMG) Object

Management Architecture (OMA) or by the Microsoft®

DCOM and COM+ architecture and it can be mapped to

other infrastructures such as those for Java™. SEMI

E96 addresses the infrastructure layer.

6.3.3.4 Common Components

6.3.3.4.1 Common components are the functional

entities common across MES applications. For

example, material tracking, machine management, and

scheduling applications all need a common, shareable

concept of wafer groups (lots), machines, and process

recipes. The common components provide a shared

model for these entities, enabling quicker development

and integration of material tracking, machine

management, scheduling and other applications. They

specify the data and behavior of these components

required for interoperability between the applications.

6.3.3.5 Application Objects

6.3.3.5.1 The application objects provide the applica-

tion functionality beyond the common components.

These application objects provide application-specific

data and behavior (such as the specific scheduling

algorithms or the specific recipe management

functions), building on the common component data

and behavior that allows the application to interoperate

with other applications. The application objects also

define the business process workflows, business logic

and user interfaces for the applications. They provide

functionality that is often product- or site-specific. This

functionality should not be included in an industry-wide

standard for common components. Rather, it should be

accommodated through the extendibility and reuse

mechanisms of the common components.

6.3.3.6 Component Granularity and Incremental

Standard Conformance

6.3.3.6.1 The CIM Framework components are the

smallest elements of standardization of functional

interface and behavior. The CIM Framework specifies

relatively fine-grained components (in terms of their

functional scope) as in the SEMATECH CIM

Framework Specification Version 2.0 [CIMFW]. These

components are larger than objects (their specification

is in terms of an object model with typically three to

five objects) but more fine-grained than traditional

MES applications. However, the initial SEMI CIM

Framework standards also identify components that are

more coarse-grained, aligning with current MES

product boundaries. These coarse-grained components

contain fine-grained sub-components in their

specifications, as in Figure 3 (typically two to four sub-

components per coarse-grained component).

6.3.3.6.2 The coarse-grained components encapsulate

the detail of the internal objects, relationships and sub-

components by selectively exposing, hiding or

abstracting some object methods and relationships. The

coarse-grained components are specified with the detail

of the sub-component and object interfaces and

behavior, but standard conformance is in two levels;

first-level conformance is to the interfaces of the

coarse-grained components (not requiring exposure of

the encapsulated detail), and second-level conformance

is to the detail of the sub-components.

6.4 CIM Framework Functional Scope

6.4.1 The term Manufacturing Execution System

(MES) represents an abstraction for a collection of

software implementations. While there are examples of

implementations that provide significant coverage of

MES functionality, the industry trend is toward supplier

focus on areas of core competency. In many cases this

will result in a supplier offering for a subset of the MES

domain, or a partitioned offering of separable products

by a single source. Large, more monolithic

implementations are gradually evolving toward this

model of component packaging for smaller

implementations. Ideally, MES scoping should

correspond to natural boundaries that have emerged in

representative products that border the “In

MES”/“Outside MES” dividing line. It is that capability

within MES scope that will be provided by the CIM

Framework.

6.4.2 The following list identifies so me criteria that

may be used to help scope MES within the larger

context of manufacturing enterprise systems often

called Computer Integrated Manufacturing.

Object Communications (CORBA, DCOM, etc.)

Object

Events

Common Services and Facilities

(CORBAservices and CORBAfacilities or COM+ or other)

Names Persist

Transact

Distributed

Computing

Infrastructure

Common

Components

Object

Component

Object

Component

Object Object Object Object

Standard Component Interfaces

Application

Objects

Conformant Extensions

Object

Application 1 Application N

CIM

Framework

Components

. . .

• Interoperable

• Substitutable

• Extendible

•Flexible

• Reusable

Figure 2

CIM Framework Component Architecture