semi合集-English.pdf - 第5603页

SEMI P10-0705 © SEMI 1990, 2005 98 < x s : a t t r i b u t e n a m e = " p 1 0 M u l t i V a l u e " t y p e = " x s : i n t e g e r " u s e = " r e q u i r e d " f i x e d = " 2 &qu…

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SEMI P10-0705 © SEMI 1990, 2005 97
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SEMI P10-0705 © SEMI 1990, 2005 98
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
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fixed
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< / xs: ext ension>
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= "2 " / >
< / xs: ext ension>
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< / xs: ext ension>
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< xs: elem ent nam e= "Mea sure dRegist r Ort ho"
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SEMI P10-0705 © SEMI 1990, 2005 99
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
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fixed
= "EndRe gist rMea su re m e nt s" / >
< / xs: com plexType>
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- < xs: sequence>
< xs: elem ent nam e= "Mea sure dRegist r M ark I d"
type
= " xs:st r ing" / >
< xs: elem ent nam e= "VendorRe gist r a t ionM a rkI d"
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< xs: at t ribut e nam e= "p1 0 Mult iV alue "
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= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
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< xs: at t ribut e nam e= "p1 0 Mult iValue "
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= "2 " / >
< / xs: ext ension>
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