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SEMI E54.13-0303 © SEMI 2003 3 5.3.1 As this standard defi nes the presentation or mapping of CDM data structure and behavi or over a network, it m a kes use of ma ny of the term s in the CDM document . Table 1 provides …

SEMI E54.13-0303 © SEMI 2003 2

structure and behavior onto the network for each SEMI

specified SDM (referred to as the “SDM mapping”).

2.4 Adding SDM Mappings  SDM mappings added

to part two of this document are considered document

additions and are balloted as such. An SDM mapping

may only be balloted for addition to this document if

the corresponding SEMI SDM has been standardized.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This document specifies a semiconductor

equipment SAN based solely on EtherNet/IP and is a

companion document to the EtherNet/IP specification;

thus a complete specification of this standard

necessarily includes the EtherNet/IP specifications.

There are other semiconductor equipment SAN

communications options. The specifications for these

options are not included here.

3.2 This standard specifies enhancements that provide

additional capabilities over and above those currently

required by EtherNet/IP. In order to avoid document

consistency problems, information in the EtherNet/IP

specification that relates to this standard is not repeated

in this document. This document is limited to

describing enhancements or limitations to the

EtherNet/IP specification that are imposed by this

standard.

3.3 A complete specification of the conformance

testing procedure shall include the EtherNet/IP

conformance testing specification. Conformance

testing shall also include enhancements and limitations

to the EtherNet/IP specification required by this

standard.

4 Referenced Standards

4.1 SEMI Standards

SEMI E30 — Generic Model for Communications and

Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services (OSS)

SEMI E54 — Sensor/Actuator Network Standard

SEMI E54.1 — Standard for Sensor/Actuator Network

Common Device Model

SEMI E54.2 — Guide for Writing Sensor/Actuator

Network (SAN) Standard Ballots

4.2 ISO Standards

ISO 7498  Basic Reference Model for Open Systems

Interconnection.

ISO/IEC 8802-3  Carrier Sense Multiple Access with

Collision Detection (CSMA/CD) Access Method and

Physical Layer Specifications (Ethernet IEEE 802.3).

4.3 Other Documents

ODVA

EtherNet/IP Specification  Volume I and

Volume II, Release 1.0.

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Terminology that is common to all of the

documents in this SAN standard may also be defined in

SEMI E54. Terminology may be reproduced here

which is defined in other SEMI documents.

5.2 Abbreviations and Acronyms

5.2.1 CDM — Common Device Model

5.2.2 CIP — Control and Information Protocol

5.2.3 CM — Connection Manager object

5.2.4 DM — Device Management object

5.2.5 EIP — EtherNet/IP

5.2.6 EL — Ethernet Link object

5.2.7 IP — Internet Protocol

5.2.8 MR — Message Router object

5.2.9 NCS — Network Communication Standard

5.2.10 OSI — Open Systems Interconnect

5.2.11 OSS — Object Services Standard

5.2.12 PDU — Protocol Data Unit

5.2.13 SAC — Sensor, Actuator, Controller object

5.2.14 SAN — Sensor/Actuator Network

5.2.15 SDM — Specific Device Model

5.2.16 S-DS — S-Device Supervisor object

5.2.17 TCP — Transport Control Protocol

5.3 Device Component Definitions

2 International Organization for Standardization. ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30.

Website: /www.iso.ch

3 Open DeviceNet Vendor Association, 20423 State Road 7 #F6,

Boca Raton, FL 33498-6797; Phone: (1) 561-477-7966; Website:

www.odva.org.

SEMI E54.13-0303 © SEMI 2003 3

5.3.1 As this standard defines the presentation or

mapping of CDM data structure and behavior over a

network, it makes use of many of the terms in the CDM

document. Table 1 provides a mapping of fundamental

terminology of the CDM document into this document

and the EtherNet/IP specification. Note that Column 2

contains an equal sign “=” if the definition is used

exactly as specified in the CDM specification.

Table 1 Mapping of CDM to NCS Terminology

CDM Term NCS Equivalent EtherNet/IP

Equivalent

Device = =

Device Model = Device Profile

Object =, Class =, Class

Instance = =

Attribute = =

Behavior = =

Service = =

Behavior State

Diagram

= State Transition

Diagram

State Transition

Matrix

= State Event Matrix

5.4 EtherNet/IP Specific Definitions

5.4.1 class  A set of objects that all represent the

same kind of system component. A class is a

generalization of an object. All objects in a class are

identical in form and behavior, but may contain

different attribute values.

5.4.2 Control and Information Protocol (CIP)  The

common network, transport and application layers

shared by EtherNet/IP and DeviceNet.

5.4.3 device profile  An EtherNet/IP specification for

a device that contains an object model for the device

type, the I/O data format for the device type, and the

configuration data and the public interface(s) to that

data.

5.4.4 encapsulation  The technique used by layered

protocols in which a layer adds header information to

the protocol data unit (PDU) from the layer above. As

an example, in Internet terminology, a packet would

contain a header from the data link layer, followed by a

header from the network layer (IP), followed by a

header from the transport layer (TCP), followed by the

application protocol data.

5.4.5 Ethernet  A 10/100-Mb/s standard for LANs,

initially developed by Xerox, and later refined by

Digital, Intel and Xerox (DIX). All hosts are connected

to the network media where they contend for network

access using a Carrier Sense Multiple Access with

Collision Detection (CSMA/CD).

5.4.6 EtherNet/IP  EtherNet/IP (Ethernet/Industrial

Protocol) is a networked communications protocol that

specifies the encapsulation of CIP over TCP/IP.

5.4.7 Explicit Message Connections  Connections

over an EtherNet/IP network that provide generic,

multi-purpose communication paths between two

devices. These connections often are referred to as just

Messaging Connections. Explicit Messages provide the

typical request/response–oriented network communica-

tions.

5.4.8 Input/Output Connections  Connections over

an EtherNet/IP network that provide dedicated, special-

purpose communication paths between a producing

application and one or more consuming applications.

Application-specific I/O data moves though these ports.

6 Communication Protocol High Level

Structure

6.1 Though the protocol specification is called

“EtherNet/IP”, Ethernet is technically not required.

EtherNet/IP may be used on any media that supports

transmission of the Internet Protocol (IP). When

Ethernet is used, it shall comply with the IEEE 802.3

specification.

NOTE 1: Conformance testing of EtherNet/IP products is

limited to those products implemented on Ethernet.

6.2 The following sections give a brief description of

the EtherNet/IP specification in terms of the seven layer

architecture described by the ISO Basic Reference

Model for Open Systems Interconnection (the OSI

model).

6.3 Physical Layer  The physical layer requirements

include specifications for topology, media, connectors,

shielding and grounding. Where copper media is used,

the EtherNet/IP specification is based on the

ANSI/TIA/EIA-568-B Category 5/5E cable/connector

specifications. A Commercial grade and Industrial

grade level of conformance are specified. The

signaling and coupling are as specified in the IEEE

802.3 / TP-PMD standard.

6.4 Data Link Layer  For compatibility with

EtherNet/IP conformance testing capabilities, the

device must comply with the Ethernet Data Link Layer

Specifications as specified by IEEE 802.3. Otherwise,

any data link layer that supports the IP is acceptable.

6.5 Network Layer  The network layer for the

EtherNet/IP protocol is defined by the Internet Protocol

(IP version 4) (RFC 791).

SEMI E54.13-0303 © SEMI 2003 4

6.6 Transport Layer  The transport layer requires the

support of Transmission Control Protocol (TCP) (RFC

793) as well as User Datagram Protocol (UDP) (RFC

768).

6.7 Session Layer  Many of the services and

functions of the session layer for the EtherNet/IP

protocol are divided and handled, in varying capacities,

by the TCP/UDP protocol specifications and the

EtherNet/IP Application Layer specifications. The first

defines transport level connection sessions, while the

latter defines application level sessions in terms of

Explicit Connection and I/O Connection management.

6.8 Presentation Layer  The presentation layer is

defined in terms of standard data types and specific

encoding definitions for application layer data.

6.9 Application Layer  The device shall comply with

the EtherNet/IP application layer specification for

defining and addressing objects, including their

attributes and services, and enabling specified network

behavior. The device shall comply with the object

model specifications provided in the EtherNet/IP

specification.

6.10 Object models  EtherNet/IP provides an object-

oriented specification for creating, defining and

addressing objects explicitly, including their attributes

and services (i.e., explicit messaging), and creating,

defining and communicating object attribute assemblies

in an application dependent format (i.e., input/output

messaging). The device shall comply with the object

model specifications provided in the EtherNet/IP

documentation. In addition, the device shall comply

with the object specifications defined in Section 7 of

this document.

7 Required Object Types

7.1 The EtherNet/IP specification identifies and

describes objects (i.e., classes) that must exist in all

EtherNet/IP compliant devices. The Common Device

Model (CDM) specification additionally identifies two

objects, the Device Management (DM) and Sensor

Actuator Controller (SAC) objects, that must exist in all

SEMI compliant SAN devices. The required object

types for a SEMI compliant SAN device utilizing the

network communication specification described herein,

necessarily comprises the union of the above two

requirements.

7.2 A list of required and optional object types is given

in Table 2. Note that the Sensor, Actuator, and

Controller object types are not required, and are

indicated as optional in the CDM specification. These

objects are aggregated together to form a SEMI and

EtherNet/IP compliant device.

7.3 The two required object types from the CDM (the

DM and the SAC) are implemented as mapped

components in EtherNet/IP; they are mapped to the

SEMI-specific S-Device Supervisor object class as

described in this section.

7.4 The listed object types are:

• Identity,

• Message Router (MR),

• Connection (Conn),

• Connection Manager (CM),

• Ethernet Link (EL),

• TCP/IP Interface (TCP/IP),

• S-Device Supervisor (S-DS),

• Device Management (DM),

• Sensor Actuator Controller (SAC),

• Sensor,

• Actuator, and

• Controller.

7.5 Also, although not a network addressable object,

each device shall support the Unconnected Message

Manager (UCMM) as defined by EtherNet/IP.

Table 2 Object Types

Required by

Object EIP

Class ID

(See

Note 1.)

CDM

Tag (See

Note 2.)

EIP (See

Note 1.)

CDM (See

Note 2.)

NCS

Identity 01



Yes No Yes

MR 02



Yes No Yes

Conn 05



Yes No Yes

CM 06



Condi-

tional

(See

Note 1.)

No Condi-

tional

(See

Note 1.)

EL F5



Condi-

tional

(See

Note 1.)

No Condi-

tional

(See

Note 1.)

TCP/IP F6



Yes No Yes

S-DS 30



No No Yes



DmI0 No Yes Yes (See

Note 4.)

SAC



SACI0 No Yes Yes (See

Note 4.)

Sensor 31 SenIn No No No

Actuator 32 ActIn No No No