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SEMI E42-0704 © SEMI 1995, 2004 53 The modify variable parameter operation consists of adding , deleting , or mo difying a specific parameter definition to a list of de finitions in AgentSpec_LinkParam for a specific age…

SEMI E42-0704 © SEMI 1995, 2004 52

recipe is located, then it is called the link target

recipe.

4. Determine the contents of the Verified

attribute of

the link target recipe. If Verified

is FALSE, the link

operation fails immediately.

5. Determine the contents of the ExtRef

attribute of

the link target recipe. Remove any references that

duplicate those already contained in LinkList

resolve class and version as needed, and append the

result to LinkList

. If variable parameters are

supported, also determine the contents of

Parameters

in the link target recipe, remove

parameters already defined in LinkParam

, and

append the result to LinkParam

6. Set the link target reference to the next reference in

LinkList

and repeat steps (3) through (6) until all

references in LinkList

have been processed.

For recipes with no external references, the LinkList

list will be empty. Similarly, for recipes with no

variable parameters, the LinkParam

list will be empty.

The effect of allowing incomplete recipe versions to be

specified within a recipe body, and determined only

when the main recipe is linked, means that a linked

recipe set (the set of recipes linked together) produced

on one occasion may not be the same as those produced

on a different occasion. Therefore, it is necessary to

protect the contents of the LinkList

attribute from

inadvertent change.

For this reason, the link operation cannot be performed

on a read-only recipe with the Linked

attribute already

set from a previous link. Any attempt to link an already

linked read-only recipe either shall be denied or a new

copy of that recipe shall be generated with a new

identifier, which may then be automatically approved

and linked.

The link recipe operation is invoked with the

RMNAction service.

8.2.3.3 Unlink Recipe — A linked recipe that is not

write-protected may also be unlinked. The unlink

operation clears the generic attributes Linked

LinkList

, and LinkParam. If the recipe has agent-

specific datasets, the attributes Certified

and AgentSpec

LinkParam are cleared. If no other non-required agent-

specific attributes have a non-default value, the agent-

specific dataset is removed.

The unlink recipe operation is invoked with the

RMNAction service.

8.2.3.4 Modify Variable Parameters — The recipe

attributes Parameters

, LinkParam, and

AgentSpec

_LinkParam each consist of a list of

parameter definitions. Each parameter definition

contains the parameter name, parameter initial value,

and the parameter restriction (if any) specified for that

parameter by a formal definition within the recipe

body.

In order to “tune” a recipe so that it produces the same

result on all executing agents of the same type, it may

be necessary to provide a different initial value or a

different parameter restriction for one or more

parameters for individual executing agents. The agent-

specific attribute AgentSpec_LinkParam

is used to

provide this capability.

AgentSpec_LinkParam

is an optional agent-specific

attribute that contains a list of alternate parameter

definitions for one or more of the variable parameters

included in the definitions in the generic attribute

LinkParam

of a linked recipe. A special editing facility

may be provided to allow an authorized user to add,

delete, or modify parameter definitions to

AgentSpec_LinkParam.

Parameter definitions initially are added individually to

AgentSpec_LinkParam

by copying the definition for

that parameter from LinkParam

. The initial value or

restriction then may be modified by the user, subject to

the absolute restrictions, such as minima and maxima,

imposed by the executing agent's supplier. The initial

value may be changed to any value within the

parameter domain.

Any modification of the restriction shall cause the

certification level to be cleared in the Certified

attribute. This is required because of the potential

impact on fab operations of a change in the restriction.

The UNITS in the restriction of a numeric parameter

may be modified within constraints imposed by the use

of the parameter and the executing agent's supplier. For

example, a two-byte unsigned integer named WaitTime

that is used to set a variable time delay period may

permit units of either “min” (minutes) or “s” (seconds).

It is desirable, but not required, that suppliers of

executing agents support different options for

specifications of UNITS. The possible options for each

potential variable parameter shall be documented by

the supplier.

SEMI E42-0704 © SEMI 1995, 2004 53

The modify variable parameter operation consists of

adding, deleting, or modifying a specific parameter

definition to a list of definitions in

AgentSpec_LinkParam for a specific agent.

A definition is added when it is copied directly from

the LinkParam

attribute to the AgentSpec_

LinkParam

attribute without modification. A definition

shall only be added if there is currently no definition for

a parameter with the same parameter name in the

AgentSpec_LinkParam attribute.

A definition is deleted when it is completely removed

from the list of definitions in AgentSpec_

LinkParam

A definition is modified when the value or restriction

of an existing definition is replaced in

AgentSpec_LinkParam

The modify variable parameters operation is invoked

with the RMNVarPar service.

8.2.4 Recipe Authorization — Recipe authorization

operations include those that allow an authorized user

to change the value in the generic attribute Approval-

Level or the agent-specific attribute Certified.

The de-certify operation is invoked with the service

RMNAction.

8.2.4.1 Approve Recipe — Recipe management

provides two different methods of controlling how a

recipe is applied: through the generic attribute

ApprovalLevel

and through the agent-specific attribute

Certified

. The recipe's approval level (the value

contained in ApprovalLevel

) is also used to protect it

from change.

A recipe goes through different stages during its

lifecycle. After a recipe has been initially created, it

will typically go through a dynamic period while it is

tested and adjusted until it produces the desired results.

ApprovalLevel

is an unsigned integer used to designate

the different stages in a recipe's life cycle. It is set to

zero (its default value) whenever a recipe is created,

updated, or linked.

The approval operation allows an authorized user to

set ApprovalLevel

to a non-zero value. Otherwise, it

may not be set externally.

A recipe is said to be approved whenever Approval-

Level is non-zero. An example of a factory's

implementation of approval levels is given in the

appendix, Section 8.3. Figure 8.4 illustrates the recipe's

APPROVAL state. For a description of the transitions,

see Table 8.1 in Section 8.3.

Figure 8.4

Approval State Model

A subrecipe may be approved independently from any

recipes which reference it.

A linked recipe may not be approved to a level higher

than the lowest approval level of any of its subrecipes.

Therefore, all subrecipes referenced in the attribute

LinkList

of a linked recipe must be located prior to

granting an approval level other than zero. The

ApprovalLevel

attribute of the subrecipes must be

increased to a value equal to, or greater than, the

required level by an authorized user before the higher

approval level of the linked recipe is accepted.

The restriction on the approval level of the linked

recipe requires the user to purposefully change the

approval level in order to protect the entire linked

recipe set as a unit from unexpected change, as it is by

the main recipe identifier that the recipe as a whole will

be known. It should be noted that approval of a linked

recipe is not the same as approval of the individual

parts, as a subrecipe which is appropriate in one recipe

may be inappropriate in another.

The approve recipe operation is invoked with the

RMNAction service.

8.2.4.2 Certify — The certify operation sets the value

of Certified

for a specific executing agent to a non-zero

value specified by an authorized user. This operation

affects no other attributes (except the length and

timestamp attributes of the affected agent-specific

dataset).

A recipe may be syntactically and procedurally correct

but, due to the differences between different

installations of agents with access to a namespace, may

give different results on these different installations.

Recipe certification signifies that a linked recipe

produces the desired results on a specific installation.

A recipe is considered certified for agent if the

certification-level contained in the agent-specific

attribute Certified

is non-zero. Otherwise, the recipe is

uncertified. A certified recipe is de-certified when the

certification-level is set to zero.

A recipe may be certified and de-certified only by an

authorized user. Figure 8.6 illustrates the recipe's

CERTIFICATION states. For a description of the

transitions, see Table 8.1 in Section 8.3.

Figure 8.6

Certification State Model

Recipes with variable parameters may be certified for

specific values and restrictions of some of these

variables. If so, such values are stored in the

AgentSpec_LinkParam

attribute.

Only recipes with the Linked

attribute set to TRUE

may be certified.

The certify recipe operation is invoked with the

RMNAction service.

8.2.4.3 De-certify — The de-certify operation clears

the Certified

attribute for a specific agent at the request

of an authorized user.

A recipe may need to be de-certified after major

maintenance has been performed and later re-certified

only after testing its results.

8.2.5 Recipe Protection — The namespace attribute

RecipeReadOnlyLevel is used as a threshold to govern

the level of approval required for individual recipes to

be protected. A recipe is protected when the value in

its ApprovalLevel attribute is equal to, or greater than,

RecipeReadOnlyLevel. All recipes are protected

whenever the namespace’s RecipeReadOnlyLevel

attribute is equal to zero. Figure 8.5 illustrates the

recipe's PROTECTION states. For a description of the

transitions, see Table 8.1 in Section 8.3.

Figure 8.5

Protection State Model

If the value of RecipeReadOnlyLevel

is n, then recipes

with approval levels greater than, or equal to, n are

read-only. The body of a read-only recipe may not be

changed in any way, including by over-writing or

deleting. The identifier of a read-only recipe may not be

renamed. A linked recipe that is read-only may not be

re-linked.

The recipe protect operation sets the value of

ApprovalLevel

to the value in RecipeRead

OnlyLevel

. For linked recipes with subrecipes, the

operation is denied if the resulting approval level for

the main recipe would be higher than any subrecipe, as

described in Section 8.2.4.