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SEMI E70-1103 © SEMI 1998, 2003 8 P r o c e s s R e q u i r e m e n t D e f i n e d b y C u s t o m e r C u s t o m e r G e n e r a t e s F a c i l i t i e s S e r v i c e s M a t r i x ( S E M I E 5 1 ) C u s t o m e r …

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SEMI E70-1103 © SEMI 1998, 2003 7
between production, industrial, and facilities
engineering. The location is typically selected to
optimize production flow within the facility while
minimizing accommodation costs and production
interruptions. A layout document of record is generated
and approved by all affected parties.
7.1.3 Customer Generates Facilities Services Matrix
— Equipment and facilities engineering establish site-
specific parameters by using the SEMI E51 format to
define the available utilities and physical environment
within which the production tool will have to function.
Local jurisdictional and code requirement will be
comprehended by site specific parameters.
7.1.4 Customer Specifies Internal Tool Piping and
Distribution System Requirements — Site-specific
exceptions to SEMI E49 through SEMI E49.8 are
identified and reviewed with equipment suppliers to
determine the most cost- and schedule-efficient
configuration.
7.1.5 Customer Issues Formal Request for Quote — A
formal request for quotation (RFQ) is generated by the
customer’s procurement department soliciting
quotations from qualified manufacturers. SEMI E49
and SEMI E51 data are included with request for
quotation.
7.1.6 Supplier Submits Quote Including the Facilities
Interface Specification in SEMI E6 Format — A
“Statement of Conformance” to specified standards is
normally required for a quotation to be considered
valid. Exceptions to performance specifications must be
thoroughly documented and resolved. Multiple re-
quotation is sometimes required to establish a
contractually valid agreement.
7.1.7 Contractual Terms Finalized and Order is Placed
by Customer — Terms and conditions of the purchase
agreement based upon the finalized quotation are
negotiated and approved by all stakeholders.
7.1.8 Supplier Manufactures Equipment — Equipment
is manufactured per purchasing agreement. To prevent
errors and omissions during installation, change orders
are documented, approved prior to implementation, and
copies are distributed per administrative interfaces as
defined in SEMI E6.
7.1.9 Installation Detailed and Prefacilitation
Performed by Customer — Installation design
documentation is generated, approved, and distributed
to subcontractors for pricing. Long lead-time hookup
materials are identified and prepurchased.
Prefacilitation is performed to insure accurate and quick
hookup of tool on arrival.
7.1.10 Customer Source Inspects Equipment — Source
inspection is the final validation of all designs and
capabilities of the specific tool. Functionality testing is
performed and documented. Physical configuration is
confirmed. Modifications to configurations are
documented so that installation pricing can be adjusted
accordingly.
7.1.11 Supplier Ships Equipment to Customer —
Equipment is packaged per SEMI E49.1 and shipped as
defined in SEMI E6. Equipment is shipped per
purchase order stipulations. Customs clearance is
obtained as required.
7.1.12 Customer Verifies Equipment Matches Supplier
Provided Facilities Interface Specification — Upon
arrival at the customer site, verification of compliance
to purchase order is determined. Verification of
physical dimensions, point of connections, and interface
cabling and tubing is performed.
7.1.13 Equipment Hookup by Customer — Mechanical,
electrical, process piping, and life safety system
hookups are done, and all functional testing is
completed. Equipment is ready for vendor startup and
commissioning. Final payment to hookup contractor is
authorized, and upon payment, construction liens are
released. As-built drawings showing newly installed
tool are updated and submitted to owner for inclusion in
permanent records.
7.1.14 Equipment Is Qualified and Customer Verifies
Contract Completion — Equipment startup is complete
and functional testing to verify compliance to purchase
agreement is complete and documented. Final payment
to equipment vendor is released.
7.1.15 Actual Cost and Schedules Are Reviewed —
Final accounting is performed to determine actual costs
associated with the project. Actual duration of all
activities is compared to original schedule to determine
areas for improvement. Estimating models for future
installations are updated to reflect new information.
SEMI E70-1103 © SEMI 1998, 2003 8
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7.1.9
7.1.11
7.1.12
7.1.13
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7.1.15
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Figure 2
Tool Accommodation Process Flow Chart
SEMI E70-1103 © SEMI 1998, 2003 9
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for
any particular application. The determination of the suitability of the standard is solely the responsibility of the user.
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