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SEMI F9-0998 © SEMI 1992 , 1998 4 RELATED INFORM A TI ON 1 SA M PLE TEST DATA SHEET NOT E: This re lated informa tion is not an off icial part of SEMI F9 and is not intende d to modif y or supercede the off icial test me…

SEMI F9-0998 © SEMI 1992, 19983

• 0.5R

• 1.0R

• 1.5R

• 2.0R

• 3.0R

9.8 Fill the submersion tank with isopropyl alcohol to

a minimum height 2.5 cm (1 in) above the top of the

test connection.

9.9 Pressurize the test specimen with an internal air

pressure of 250 kPa (36 psig), regardless of tube size.

9.10 Observe the connection for a minimum of one

minute for bubble leakage (bbl/min) and record on test

data sheet under the column entitled “STRAIGHT”.

9.11 Carefully bend the tube in a uniform 180° arc

with a radius of 3R and clamp the free end to the test

fixture. (See Section 9.7 for specific R value.) Proper

tube length at the clamping point is determined in

Section 9.6.

9.11.1 R value tolerances =

• Tubes with 1.5 cm (0.59 in) O.D. or less = ± 5%

• Tubes with greater than 1.5 cm (0.59 in) O.D. = ±

9.12 Observe the connection for a minimum of one

minute for bubble leakage. Record leakage on the

appropriate area of the test data sheet. If no leakage is

observed, note as “None”.

9.13 Repeat Sections 9.11 and 9.12 for the remaining

tube bend radius of 2R, 1.5R, 1R, and 0.5R, in

descending order.

9.13.1 Should any tube kink prior to achieving 0.5R,

testing of that sample will be discontinued. The radius

at which kinking occurred shall be recorded and noted

as “kink”.

9.13.2 To reduce the effects caused by creep of the

material the total time from initial bending of the tube

until achieving the 0.5R value is to be less than ten

minutes.

9.14 After completion of the first sa mple, replace the

fitting and tube with new specimens and repeat Sections

9.4 through 9.13.2 for a total of three samples.

10 Test Data Sheet

The test data sheet shall include the following

information:

10.1 Date tested.

10.2 Operator and test facility.

10.3 Description of items tested, including:

Tubing — Manufacturer, O.D., wall thickness, part

number, and material type.

Fitting — Manufacturer, type, size, part number, and

material type.

10.4 The actual tube bend radius for each nominal

bend radius.

10.5 The leakage rate, in bubbles per minute, for each

sample at each radius.

NOTE: A sample test data sheet is provided as Related

Information 1.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

SEMI F9-0998 © SEMI 1992, 1998 4

RELATED INFORMATION 1

SAMPLE TEST DATA SHEET

NOTE: This related information is not an official part of SEMI F9 and is not intended to modify or supercede the official test

method. It has been derived from industry specifications. Publication was authorized by full letter ballot procedures.

Determination of the suitability of the material is solely the responsibility of the user.

Test Date: Operator: Test Facility:

Tube Manufacturer: Fitting Manufacturer:

Tube O.D.: Fitting Type:

Tube Wall Thickness: Fitting Size:

Tube P/N: Fitting P/N:

Tube Material: Fitting Material:

Leakage— (bbl/min.) [ ] = Acutal Tube Bend Radius, cm(s)

3R 2R 1.5R 1R 0.5R

Sample Straight [ ] [ ] [ ] [ ] [ ]

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F10-0698 © SEMI 1993, 19981

SEMI F10-0698

TEST METHOD TO DETERMINE THE INTERNAL PRESSURE

REQUIRED TO PRODUCE A FAILURE OF A TUBE FITTING

CONNECTION MADE OF FLUOROCARBON MATERIALS

1 Purpose

1.1 This method provides a uniform procedure to

determine the internal pressure required to produce

failure of fitting connections made of fluorocarbon

materials.

2 Scope

2.1 This method can be used to characterize tube

fitting connections on the basis of test data developed

under the conditions described herein, but the results

are not intended to imply a performance rating.

2.2 Tube defined in this method has a circular cross

section and is made of fluorocarbon materials.

2.3 Tube fittings defined in this method are made of

fluorocarbon materials for all parts in contact with the

internal fluid.

2.3.1 Parts such as a nut or gripper are not limited to

being made of a fluorocarbon material.

2.4 Only the seal between the tube and tube fitting

being evaluated is within the scope of this document.

All other threaded seals are beyond the scope of this

document.

2.5 When using this method for making comparisons

among various tube fittings and/or manufacturers, the

user must be specific in the selection of the tube and

tube fittings to be evaluated.

2.6 The International System of Units (SI) is used as

the standard unit of measure in this document. The U.S.

Customary units are in parentheses for reference

purposes only and may have been rounded to the

nearest whole value.

3 Referenced Document

3.1 ASTM Standard

ASTM D 1599 — Test Method for Short-Time

Hydraulic Failure Pressure of Plastic Pipe, Tubing, and

Fittings

4 Summary of Method

4.1 This test method consists of pressurizing tube

fitting connections made of fluorocarbon materials to

1 American Society for Testing and Materials, 100 Barr Harbor

Drive, West Conshohoken, PA 19428-2959

failure by continuously increasing the internal hydraulic

pressure. New tubing and fitting samples are required at

each specific elevated fluid temperature condition, and

failures are to occur within 60 to 70 seconds from initial

exposure to the high pressure fluid.

5 Significance and Use

5.1 In the manufacturing of semiconductor products,

many types of hazardous chemicals and solvents are

required. As a result, tubing and various fitting designs

made of fluorocarbon materials (which are chemically

resistant to these fluids) are used to transport those

fluids. It is important to control the testing process

when evaluating various fitting designs, so that accurate

comparisons of the pressure limits can be made.

5.2 It is the intent of this method to provide a

procedure to determine the maximum pressure limits of

tube fitting connections made of fluorocarbon

materials. By using this method, accurate comparisons

of various tube fitting designs can be achieved.

5.3 The results obtained when usin g this method are

applicable only to conditions that specifically duplicate

the procedures used within this method.

5.4 When using this test method, it is assumed that the

test specimens are truly representative of the material

and manufacturing process specified for that product.

Departure from this assumption could introduce

discrepancies that are greater than those introduced by

departure from the details of the procedure outlined in

this method.

6 Terminology

6.1 characterize — To describe the quality of.

6.2 failure — Any external leakage of fluid through

the tube wall or the tube fitting connection, whether it

be catastrophic or a slow leak.

6.3 free end closure — A metal tube fitting connection

which is securely fastened to the tube and does not

contribute to the restraint of the test specimen.

6.4 isolation valve — A valve used to separate the

high temperature fluid from the high pressure fluid or to

separate the samples from each other.

NOTE: This definition is used in only this test method.