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SEMI E101-1104 © SEMI 2000, 2004 9 APPENDIX 2 NOTICE : The material in this appendix is an official part of SEMI E101 and was appro ved by full letter ballot procedures on January 14, 2000 by the Japanese Re gional Stand…

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SEMI E101-1104 © SEMI 2000, 2004 8
APPENDIX 1
NOTICE: The material in this appendix is an official part of SEMI E101 and was approved by full letter ballot
procedures on January 14, 2000 by the Japanese Regional Standards Committee.
OHT
AGV/
RGV/
PGV
1+ Human Interfaces (User Interface)
1+ EMO Switch1+ Signal Tower
1+ Operation Console
0,1
Substrate
Handler
0, 1+
Substrate
Transfer
Robot
Process
Part
1Carrier Handler
1+Load Port
0,1 Manual Switches
0,1 Carrier Presence Indicator
0,1 Carrier Indicators
0,1 Carrier Placement Indicator
0,1 Load Port
Door
0,1 E84 PI/O for
AGV/RGV/OHT
0,1 E64 Cart to Tool Docking Port
Interface
0,1Carrier ID Reader/Writer
1 Load Plate
1 E57 Kinematic Coupling
0,1 Dock Plate
1 Carrier Opener/Loader
0,1 FOUP Opener
1 Open/Close
0,1 Carrier Slot Mapper
0,1 [FOUP]
Carrier Slot
Mapper
0,1 Dock/Undock Mechanism
0,1 [FOUP] Carrier Purge Interface
1Load Port Unit
0,1 Carrier Opener/Loader
Maintenance Panel
0,1 Substrate
ID Reader
0,1 Aligner
Equipment
0,1Carrier Operation Panel
0,1 Carrier Sensors
1 Fixed Buffer Type EFEM
0,1 Status Indicators
1+ Load Port Group (E15.1(Option-1 or 3))
0,1 Info Pad Sensors
Figure A1-1
Relation between Fixed Buffer Type EFEM Functional Structure Model and Existing SEMI Standards
SEMI E101-1104 © SEMI 2000, 2004 9
APPENDIX 2
NOTICE: The material in this appendix is an official part of SEMI E101 and was approved by full letter ballot
procedures on January 14, 2000 by the Japanese Regional Standards Committee.
1Carrier Handler
1+ Load Port
0,1 Carrier Operation Panel
0,1 Manual Switches
0,1 Carrier Presence Indicator
0,1 Carrier Indicators
0,1 Carrier Placement Indicator
1Load Plate
0,1 Carrier Sensors
1 E57 Kinematic Coupling
0,1Carrier ID Reader/Writer
0,1[OC] Carrier Slot Mapper
0,1 Load Port Door
0,1 E84 PI/O for AGV/RGV
0,1 E64 Cart to Tool Docking Port I/F
1 Internal Buffer
1 Carrier Transfer
Robot
1+ Carrier Storage
1Carrier Sensors
1Load Plate
0,1+ Internal Substrate Port
0,1 Dock Plate
1Load Plate
0,1Carrier Purge interface
0,1 Dock/Undock
Mechanism
0,1 FOUP Opener
1Open/Close
Equipment
1Load Port Unit
OHT
AGV/
RGV/
PGV
0,1[FOUP]Carrier Slot
Mapper
1 Carrier Opener/Loader
1+ Human Interfaces (User Interface)
1+ EMO Switch1+ Signal Tower 1+ Operation Console
0,1 Carrier Sensors
0,1
Substrate
Handler
0, 1+
Substrate
Robot
Transfer
Process
Part
0,1 [FOUP]
Carrier Slot
Mapper
0,1 Substrate
ID Reader
0,1 Aligner
1 Internal Buffer Type EFEM
0,1Status Indicators
0,1Carrier ID Reader/Writer
1+ Load Port Group(E15.1(Option-1 or 3))
0,1
Info Pad Sensors
1 E57 Kinematic
Coupling
1 E57 Kinematic
Coupling
Figure A2-1
Relation between Internal Buffer Type EFEM Functional Structure Model and Existing SEMI Standards
NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
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the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E103-0704 © SEMI 2000, 2004 1
SEMI E103-0704
MECHANICAL SPECIFICATION FOR A 300 mm SINGLE-WAFER BOX
SYSTEM THAT EMULATES A FOUP
This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is
the direct responsibility of the European Equipment Automation Committee. Current edition approved by the
European Regional Standards Committee on May 14, 2004. Initially available at www.semi.org June 2004;
to be published July 2004. Originally published June 2000; last published November 2003.
1 Purpose
1.1 This standard specifies the carrier side of the
mechanical interface between load ports (or buffers)
with FIMS interfaces on process or metrology
equipment and a system that includes a box that holds
only one wafer (such as a test wafer) and that fits onto
an adapter mechanism called a single-wafer interface
(SWIF). This system appears to the equipment to be a
300 mm FOUP (except that only the volume around the
middle wafer may be accessible).
2 Scope
2.1 This standard is intended to set an appropriate level
of specification that places minimal limits on
innovation while ensuring modularity and inter-
changeability at relevant mechanical interfaces. Only
the mechanical interface between a load port with a
FIMS interface and this system (of a single-wafer box
and a SWIF) is specified here; the mechanical interface
between the single-wafer box and the SWIF is not
specified. Also not specified is the method by which
the SWIF raises the carrier sensing pads when the
single-wafer box is removed (see Section 6.3). This
standard does not forbid the SWIF from holding more
than just the single-wafer box mentioned in this
standard.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E1.9 Mechanical Specification for Cassettes
Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E47.1 — Provisional Mechanical Specification
for Boxes and Pods Used to Transport and Store 300
mm Wafers
SEMI E62 — Provisional Specification for 300 mm
Front-Opening Interface Mechanical Standard (FIMS)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Ordering Information
4.1 Info Pad Configuration — The purchaser of a
single wafer interface system needs to specify the
desired info pad configuration (up or down).
5 Terminology
5.1 Abbreviations & Acronyms
5.1.1 FOUP — front-opening unified pod
5.1.2 PGV — person guided vehicle (cart)
5.1.3 SWIF — single-wafer interface
5.2 Definitions
5.2.1 box — a protective portable container for a
cassette and/or substrate(s).
5.2.2 carrier capacity — the number of substrates that
a carrier holds (as defined in SEMI E1.9).
5.2.3 cassette — an open structure that holds one or
more substrates.
5.2.4 front-opening unified pod — a box (that complies
with SEMI E47.1) with a non-removable cassette (so
that its interior complies with SEMI E1.9) and with a
front-opening interface (that mates with a FIMS port
that complies with SEMI E62) (as defined in SEMI
E47.1).
5.2.5 pod — a box having a Standard Mechanical
Interface (SMIF) per SEMI E19.
5.2.6 single-wafer interface — an adapter mechanism
that holds a single-wafer box and that appears to the
equipment to be a 300 mm FOUP (except that only the
volume around the middle wafer may be accessible).
5.2.7 wafer carrier — any cassette, box, pod, or boat
that contains wafers (as defined in SEMI E15).