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SEMI E52-0703 © SEMI 1995, 2003 11 Code Gas Name Symbol Formula Synonym Ref 178 4-Methyl, 1-Pentene C6H12 (CH 3 ) 2 CHCH 2 CH=CH 2 2 331 Acetaldehyde methoxy C3H6O2 CH 3 OCH 2 CHO 3 283 Acetic acid C2H4O2 CH 3 COOH Ethan…

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SEMI E52-0703 © SEMI 1995, 2003 10
Code Gas Name Symbol Formula Synonym Ref
321 Trifluoromethylhypofluorite CF4O CF
4
O CF3OF; Hypofluorous acid;
trifuoromethyl ester
2
322 Formaldehyde CH2O CH
2
O H2C0; UN 1198; BFV 2
323 Iodomethane CH3I CH
3
I Methyl iodide; Un 2644 2
324 Xenon difluoride XeF2 XeF
2
F
2
Xe; Xenon fluoride 2
325 Selenium hexafluoride SeF6 SeF
6
UN 2194; Selenium fluoride 2
326 Disilane hexafluoride SiF6 SiF
6
F
6
Si
2
; Hexafluorodisilane 2
327 Fluoro silane SiH3F SiH
3
F H
3
FSi 2
328 Trisilane Si3H8 Si
3
H
8
Silicopropane; Trisilicane; H
8
Si3 2
329 Mercury Hg Hg UN 2809 2
330 Zinc Zn Zn UN 1383 2
331 Acetaldehyde methoxy C3H6O2 CH
3
OCH
2
CHO 3
332 Acetone,hydroxy C3H6O2 CH
3
COCH2OH Acetol 3
333 Glycol methylene ether C3H6O2 C
3
H
6
O
2
1,3 - Dioxolane 3
334 Propanoic acid C3H6O2 CH
3
CH
2
CO
2
H Propionic acid 3
335 Glycidol C3H6O2 CH
2
CHCH
2
OH 1-Propanol, 2,3 epoxy 3
336 Butanol-2 C4H10O CH
3
CH
2
CH(OH)CH
3
3
337 Tertiary Butyl Alcohol C4H10O (CH
3
)
3
COH 3
338 Diethyl ether C4H10O C
2
H
5
OC
2
H
5
3
339 Methyl propyl ether C4H10O CH
3
OC
3
H
7
3
340 Methyl isopropyl ether C4H10O (CH
3
)
2
CHOCH
3
3
341 Isobutyl Alcohol C4H10O (CH
3
)
2
CHCH
2
OH 3
342 3-one-2,5-dimethyl hexadiene C8H10 CH
2
=C(CH
3
)C=CC(CH
3
)
CH
2
3
343 1,7-Octadiyne C8H10 HC=C(CH
2
)
4
C=CH 3
344 2,6-Octadiyne C8H10 CH
3
C=CCH
2
CH
2
C=CCH
3
3
345 1,3,5,7-Octatetraene C8H10 CH
2
=CHCH=CHCH=CH
CH=CH
2
3
346 Niobium Pentachloride NbCl5 NbCl
5
3
347 Disilabutane Si2C2H10 Si
2
C
2
H
10
3
348 Ethane,1,1,1-Trifluoro C2H3F3 C
2
H
3
F
3
HFC-143a 3
349 Diselenium Dichloride Se2Cl2 Se
2
Cl
2
3
350 Deuterium Ammonia ND3 ND
3
3
351 Perfluoro (Oxacyclopentane) C4F8O C
4
F
8
O 3
7 Gas Table Sorted by Name
Table 2 Gases Sorted by Name
Code Gas Name Symbol Formula Synonym Ref
345 1,3,5,7-Octatetraene C8H10 CH
2
=CHCH=CHCH=CH
CH=CH
2
3
343 1,7-Octadiyne C8H10 HC=C(CH
2
)
4
C=CH 3
186 2,2 Dichloro1,1,1 Trifluoroethane C2HCl2F3 CHCl
2
-CF
3
Freon 123, Suva 123 2
344 2,6-Octadiyne C8H10 CH
3
C=CCH
2
CH
2
C=CCH
3
3
342 3-one-2,5-dimethyl hexadiene C8H10 CH
2
=C(CH
3
)C=CC(CH
3
)
CH
2
3
SEMI E52-0703 © SEMI 1995, 2003 11
Code Gas Name Symbol Formula Synonym Ref
178 4-Methyl, 1-Pentene C6H12 (CH
3
)
2
CHCH
2
CH=CH
2
2
331 Acetaldehyde methoxy C3H6O2 CH
3
OCH
2
CHO 3
283 Acetic acid C2H4O2 CH
3
COOH Ethanoic acid; UN 2789 2
184 Acetone C3H6O CH
3
COCH
3
2
332 Acetone, hydroxy C3H6O2 CH
3
COCH2OH Acetol 3
173 Acetonitrile C2H3N CH
3
CN 2
42 Acetylene C2H2 HC=CH Ethyne 1
289 Acrylic acid C3H4O2 C
3
H
4
O
2
2-Propenoic acid;
CH2=CHCOOH
2
276 Acrylonitrile C3H3N CH
2
=CHCN Acrylon; Propenenitrile 3
8 Air Air 1
66 Allene C3H4 CH
2
=C=CH
2
Propadiene 1
226 Aluminum Trifluoride AlF3 AlF
3
2
29 Ammonia NH3 NH
3
1
4 Argon Ar Ar 1
96 Arsenic Pentafluoride AsF5 AsF
5
2
242 Arsenic Tribromide AsBr3 AsBr
3
2
216 Arsenic Trichloride AsCl3 AsCl
3
2
195 Arsenic Trifluoride AsF3 AsF
3
2
196 Arsenic Triiodine AsI3 AsI
3
2
35 Arsine AsH3 AsH
3
1
197 Benzene C6H6 C
6
H
6
2
198 Borazine B3N3H6 H
3
B
3
N
3
H
3
14
79 Boron Tribromide BBr3 BBr
3
1
70 Boron Trichloride BCl3 BCl
3
1
48 Boron Trifluoride BF3 BF
3
1
21 Bromine Br2 Br
2
2
116 Bromine Pentafluoride BrF5 BrF
5
1
76 Bromine Trifluoride BrF3 BrF
3
1
199 Bromochlorodifluoromethane CBrClF2 BrClCF
2
2
105 Bromotrifluoroethylene C2BrF3 CF
2
CFBr 1
80 Bromotrifluoromethane CBrF3 BrCF
3
F-13B1, R-13B1 1
100 Butadiene C4H6 CH
2
=C=CHCH
3
Methylallene 1
117 Butane C4H10 CH
3
(CH
2
)
2
CH
3
1
271 Butanol-1 C4H10O CH
3
CH
2
CH
2
CH
2
OH 3
336 Butanol-2 C4H10O CH
3
CH
2
CH(OH)CH
3
3
104 Butene C4H8 CH
3
CH
2
CH=CH
2
1-Butene 1
25 Carbon Dioxide CO2 CO
2
1
40 Carbon Disulfide CS2 CS
2
2
9 Carbon Monoxide CO CO 1
200 Carbon Tetrabromide CBr4 CBr
4
2
101 Carbon Tetrachloride CCl4 CCl
4
Tetrachloromethane or Methane,
Tetrachloro
2
63 Carbon Tetrafluoride CF4 CF
4
Tetrafluoromethane or Methane,
Tetrafluoro
1
SEMI E52-0703 © SEMI 1995, 2003 12
Code Gas Name Symbol Formula Synonym Ref
46 Carbonyl Fluoride CF2O CF
2
O 1
34 Carbonyl Sulfide COS COS 1
19 Chlorine Cl2 Cl
2
1
201 Chlorine Dioxide ClO2 ClO
2
2
202 Chlorine Pentafluoride ClF5 ClF
5
2
77 Chlorine Trifluoride ClF3 ClF
3
1
172 Chlorobenzene C6H5Cl C
6
H
5
Cl Chlorobenzol, Phenylchloride 2
203 Chlorodifluoroethane C2H3ClF2 CH
3
-CF
2
Cl R-142b 4
204 Chlorodifluoroethylene C2HClF2 CF
2
=CHCl R-1122, FREON-1122 4
57 Chlorodifluoromethane CHClF2 CClHF
2
F-22, R-22 1
71 Chloroform CHCl3 CHCl
3
Trichloromethane or Methane,
Trichloro
2
119 Chloropentafluoroethane C2ClF5 ClCF
2
CF
3
F-115, R-115 1
205 Chlorosilane SiH3Cl SiH
3
Cl 2
206 Chlorotrifluoroethylene C2ClF3 FCCl=CF
2
R-1113, FREON-1113 2
74 Chlorotrifluoromethane CClF3 ClCF
3
F-13, R-13 1
107 Cisbutene C4H8 CH
3
CH=CHCH
3
Cis-2-Butene 2
59 Cyanogen C2N2 NCCN Oxalodinitrile 1
37 Cyanogen Chloride ClCN ClCN 1
207 Cyclobutane C4H8 C
4
H
8
Tetramethylene 2
61 Cyclopropane C3H6 C
3
H
6
1
14 Deuterium D2 H
2
2
D2 2
350 Deuterium Ammonia ND3 ND
3
3
244 Deuteriumsilane SiD4 SiH
2
4
2
208 Diazomethane CH2N2 CH
2
N
2
Acomethylene 2
58 Diborane B2H6 B
2
H
6
1
209 Dibromodifluoromethane CBr2F2 Br
2
CF
2
R-12B2, FREON-12B2 2
130 Dibromotetrafluorethane C2Br2F4 BrF
2
CCF
2
Br F-114B2, R-114B2 1
84 Dichlorodifluoromethane CCl2F2 CCl
2
F
2
F-12, R-12 1
212 Dichlorodimethylsilane C2H6SiCl2 (CH
3
)
2
SiCl
2
2
210 Dichloroethylene C2H2Cl2 CH
2
=CCl
2
Vinylidene Chloride 2
211 Dichloroethylene -cis C2H2Cl2 CHCl=CHCl 2
191 Dichloroethylene -trans C2H2Cl2 CHCl=CHCl 2
65 Dichlorofluoromethane CHCl2F CHCl
2
F F-21, R-21 1
265 Dichloromethane CH2Cl2 CH
2
Cl
2
67 Dichlorosilane SiH2Cl2 SiH
2
Cl
2
1
125 Dichlorotetrafluoroethane C2Cl2F4 F
3
CCCl
2
F F-114, R-114 1
188 Diethoxy Dimethyl Silane C6H16O2Si (C
2
H
5
O)
2
Si(CH
3
)
2
2
338 Diethyl ether C4H10O C
2
H
5
OC
2
H
5
3
298 Diethyl sulfide C4H10S C
4
H
10
S UN 2375; Ethyl sulfide; 2
213 Diethylamine C4H11N (C
2
H
5
)
2
NH 2
154 Diethylsilane C4H12Si (C
2
H
5
)
2
SiH
2
2
214 Diethylzinc C4H10Zn Zn(C
2
H
5
)
2
2
232 Difluoroamidogen NF2 NF
2
2