semi合集-English.pdf - 第5683页

SEMI P10-0705 © SEMI 1990, 2005 178 CELL_ID UT_1X_TOP_CELL !-- refers to PLACEMENT_TOP_CELL END_CELL_OP TIONS UT_1X_TOP_CELL ! CELL_INSTANCE FLD_1 !--Field 1 cell within TOP_CELL END_CELL_INSTANCE_ OPTIO NS FLD_1 S TART_…

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SEMI P10-0705 © SEMI 1990, 2005 177
TITLE_TYPE MASK
TITLE_JUSTIFICATION L
TITLE_LOCATION -22000.0, 1000.0
MIRROR_TITLE F
ROTATE_TITLE 0
ROTATE_TITLE_CHARACTERS 0
END_TITLE TITLE_2
!(
MIRROR_MASK T
BLANK_SIZE 5/90
BLANK_TYPE ULTE
BLANK_FLATNESS 2
MASK_COATING LOW_REFLECTIVE_CHROME
UT1X_UNCUT T
TOP_PELLICLE_TYPE Pellicle Part Number
GUIDES_REQD STANDARD
!
START_DEFECT_DEFINITION UT1X_1
GOOD_FIELDS (1 AND 2)
END_DEFECT_DEFINITION UT1X_1
!
START_DEFECT_DEFINITION PREPELL_DIE2DIE_1
AUTO_INSPECTION_REQD T
DIE_TO_DIE_INSPECTION T
DEFECT_SIZE_CL 1.0
DEFECT_SIZE_DK 1.0
DEFECT_COUNT 0
END_DEFECT_DEFINITION PREPELL_DIE2DIE_1
!
QUALITY_GROUP_ID ABC123
PACKAGE Package Part Number
END_MASK 1000001
!------------------------------------------
!
! The TOP_CELL's role in the P10 Standard is to provide a means to list and locate all of the
! Patterns on the Mask. Within the TOP_CELL Cell ID section (below) both Patterns and other Cells
! can be listed. The value for the Top Cell is given by the PLACEMENT_TOP_CELL keyword in the
! MASK_GROUP section above.
!
! This example lays out each component of the Mask using the "CELL_INSTANCE" keyword.
! Each Ultratech Field is represented by a "FLD_x" designation for a Cell Instance, where "x" is
! the field number. The general idea is to designate a cell for each Field separately and to let
! the MASK_PATTERNS cell hold the remaining data. In this example the FLD_1 cell contains Field 1,
! the FLD_2 cell holds Field 2, and the MASK_PATTERNS cell holds Barcode, BOJ, EOJ, Fiducial,
! and Logo data. Other types of Patterns could also be included in the MASK_PATTERNS cell.
!
!
!----------CELLS--------------------------
SEMI P10-0705 © SEMI 1990, 2005 178
CELL_ID UT_1X_TOP_CELL !-- refers to PLACEMENT_TOP_CELL
END_CELL_OPTIONS UT_1X_TOP_CELL
!
CELL_INSTANCE FLD_1 !--Field 1 cell within TOP_CELL
END_CELL_INSTANCE_OPTIONS FLD_1
START_PLACEMENT F1
LOCATION -32000.0, 28000.0
END_PLACEMENT F1
END_CELL_INSTANCE FLD_1
!
CELL_INSTANCE FLD_2 !--Field 2 cell within TOP_CELL
END_CELL_INSTANCE_OPTIONS FLD_2
START_PLACEMENT F2
LOCATION 25500.0, 28500.0
END_PLACEMENT F2
END_CELL_INSTANCE FLD_2
!
CELL_INSTANCE MASK_PATTERNS !--Other data cell with TOP_CELL
END_CELL_INSTANCE_OPTIONS MASK_PATTERNS
END_CELL_INSTANCE MASK_PATTERNS
END_CELL UT_1X_TOP_CELL
!
!
! Each CELL_ID below lists the components in that cell, using the PATTERN_GROUP_INSTANCE keyword,
! along with placement data.
!
! Field 1
CELL_ID FLD_1 !--This refers to CELL_INSTANCE FLD_1
END_CELL_OPTIONS FLD_1
!
PATTERN_GROUP_INSTANCE FLD_1_PG
START_PLACEMENT FDPN1
LOCATION -20000.0, 20000.0
STEPPING_DISTANCE 10000.0, 0.0
STEPPING_COUNT 2, 1
END_PLACEMENT FDP_1
END_PATTERN_GROUP_INSTANCE FLD_1_PG
END_CELL FLD_1
!
! Field 2
CELL_ID FLD_2 !--This refers to CELL_INSTANCE FLD_2
END_CELL_OPTIONS FLD_2
!
PATTERN_GROUP_INSTANCE FLD_2_PG
START_PLACEMENT FDP_2
LOCATION 50000.0, 20000.0
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
SEMI P10-0705 © SEMI 1990, 2005 179
END_PLACEMENT FDP_2
END_PATTERN_GROUP_INSTANCE FLD_2_PG
END_CELL FLD_2
!
CELL_ID MASK_PATTERNS !--This refers to CELL_INSTANCE
!MASK_PATTERNS
END_CELL_OPTIONS MASK_PATTERNS
!
PATTERN_GROUP_INSTANCE BARCODES
START_PLACEMENT BC_1
LOCATION 85500.000, 113350.000
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT BC_1
END_PATTERN_GROUP_INSTANCE BARCODES
!
PATTERN_GROUP_INSTANCE BOJ
START_PLACEMENT BJ_1
LOCATION 119000, 88000
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT BJ_1
START_PLACEMENT BJ_2
LOCATION 9700, 37000
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT BJ_2
END_PATTERN_GROUP_INSTANCE BOJ
!
PATTERN_GROUP_INSTANCE EOJ
START_PLACEMENT EJ_1
LOCATION 119000, 88000
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT EJ_1
START_PLACEMENT EJ_2
LOCATION 9800, 3800
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT EJ_2
END_PATTERN_GROUP_INSTANCE EOJ
!
PATTERN_GROUP_INSTANCE FIDUCIAL
START_PLACEMENT FD_1
LOCATION 63500, 63500
STEPPING_DISTANCE 0.0, 0.0
STEPPING_COUNT 1, 1
END_PLACEMENT FD_1
END_PATTERN_GROUP_INSTANCE FIDUCIAL