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SEMI E109-0305 © SEMI 2001, 2005 45 Parameter Name Form Description ErrorCode Enumerated: Valid for all services listed below Unsupported option [service] requested Command not valid for current state Insufficient parame…

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SEMI E109-0305 © SEMI 2001, 2005 44
Parameter Name Form Description
ArrivingReticleList Ordered list of ReticleID,
ReticlePropertiesList, and removal
instructions corresponding to the slot
number.
Ordered List of n structures where n is equal to the value of the
pod attribute “Capacity,” and each structure consists of a
ReticleID, a ReticlePropertiesList, and an enumerated removal
instruction.
List of structure
ReticleID
ReticlePropertiesList
Enumerated
Enumerated:
REMOVE
PASS BY
AttributeData Could be several different data types. The data value associated with AttributeID.
AttributeID Text
1–40 characters.
The ID of the object attribute in a PropertiesList.
PodID Text
1–64 characters.
ID number of a pod.
Qualification-
IntervalTime
U2. The time in minutes allowed between equipment inspections of a
reticle.
RPMAcknowledge Enumerated:
Acknowledge, service has been
performed
Service does not exist
Cannot perform now
At least parameter is invalid
Acknowledge, service will be
performed with completion
notified later with parameters
for response
No such object exists
Acknowledgement of request.
RPMStatus A structure consisting of
RPMAcknowledge and Status.
Return information for a service.
Data Text. User data.
DataSeg Protocol-specific. Indicates specific section of data to read or write.
DataSize Unsigned integer. Indicates the number of bytes of data to read or write.
DepartingReticleList Ordered list of ReticleID and
instructions to remove from the
equipment and place in the reticle
cassette corresponding to the slot
number of the cassette to which the
reticle will be placed.
Ordered List of n structures where n is equal to the value of the
pod attribute “Capacity,” and each structure consists of a
ReticleID and an enumerated instruction.
List of structure
ReticleID
Enumerated
Enumerated:
CURRENTLY OCCUPIED
PLACE
PASS BY
When no reticle is targeted to be placed in a slot, the ReticleID
should be null. When the enumeration is equal to CURRENTLY
OCCUPIED or PASS BY the ReticleID should be null.
DestinationLocation LocationID. The location for which a reticle is to be moved.
SEMI E109-0305 © SEMI 2001, 2005 45
Parameter Name Form Description
ErrorCode Enumerated:
Valid for all services listed below
Unsupported option [service]
requested
Command not valid for current state
Insufficient parameters specified
Parameters improperly specified
Bind
Load port does not exist
Object identifier already in use
Invalid attribute value
Unknown attribute name
CancelAllPodOut
(none)
CancelBind
Load port does not exist
Unknown object instance
CancelPod
Load port does not exist
Unknown object instance
CancelPodAtPort
Load port does not exist
CancelPodNotification
Unknown object instance
CancelPodOut
Unknown object instance
CancelReservationAtPort
Load port does not exist
PodIn
Unknown object instance
PodNotification
Object identifier already in use
Invalid attribute value
Unknown attribute name
PodOut
Load port does not exist
Unknown object instance
ChangeAccess
Load port does not exist
ChangeServiceStatus
Load port does not exist
ProceedWithPod
Load port does not exist
Unknown object instance
Invalid attribute value
Unknown attribute name
ReserveAtPort
Load port does not exist
Contains the code for the specific error found.
ErrorText Text. Text in support of the error code.
InputPortID Integer
0, 101–255.
ID number of the load port where the Pod will be delivered. The
InputPortID number should be the same as the load port number.
When the value of the InputPortID = zero, the Pod will be picked
up from the internal buffer.
SEMI E109-0305 © SEMI 2001, 2005 46
Parameter Name Form Description
OutputPortID Integer
0, 101 to 255.
ID number of a load port where the Pod will be presented for
removal. The OutputPortID number should be the same as the
load port number. When the value of the OutputPortID = zero,
the Pod will be delivered to the internal buffer.
PortID Integer
1-n.
ID number of a load port. The PortID number should be the
same as the load port number.
PortList List
1-n items.
List of n items
PortID
1
.
.
n PortID
n
PodPropertiesList List
1-n name/value pairs.
List of n items
1. AttributeID
1
AttributeData
1
.
.
n. AttributeID
n
AttributeData
n
ReticlePlacement-
Instruction
Enumerated:
0 = PLACE
1 = PASS BY
2 = CURRENTLY OCCUPIED
The instructions for placing reticles in pod slot.
ReticlePropertiesList List
1-n name/value pairs.
List of n items
1. AttributeID
1
AttributeData
1
.
.
n. AttributeID
n
AttributeData
n
ReticleLocation-
PropertiesList
List
1-n name/value pairs.
List of n items
1. AttributeID
1
AttributeData
1
.
.
n. AttributeID
n
AttributeData
n
ReticleRemoval-
Instruction
Enumerated:
0 = REMOVE
1 = PASS BY
The instructions for removing reticles from a pod slot.
ServiceStatus Enumerated:
IN SERVICE,
or OUT OF SERVICE.
The desired transfer service status of the specified load port.
SourceLocation LocationID. The source location from which to move a reticle.
Status A list of ErrorCode/ErrorText pairs. Reports any errors found.
18.4 Fundamental Service Message Definitions
18.4.1 The following tables specify the allowable/required parameters for each service. The column marked
“REQ/OPT”, specifies which parameters are required to be supported for RPMS compliance (R = Required, O =
Optional).