semi合集-English.pdf - 第1404页

SEMI E30-1103 © SEMI 1992, 2003 78 STREAM 10: Terminal Services S10,F1 Terminal Request (TRN) S,H<-E S10,F2 Terminal Re quest Acknowledge (TRA) S,H->E S10,F3 Terminal Display, Single (VTN) S,H->E S10,F4 Terminal…

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STREAM 7: Process Program Load
S7,F1 Process Program Load Inquire (PPI) S,H<->E, reply
S7,F2 Process Program Load Grant (PPG) S,H<->E
S7,F3 Process Program Send (PPS) M,H<->E
S7,F4 Process Program Acknowledge (PPA) S,H<->E
S7,F5 Process Program Request (PPR) S,H<->E
S7,F6 Process Program Data (PPD) M,H<->E
S7,F17 Delete Process Program Send (DPS) S,H->E
S7,F18 Delete Process Program Acknowledge (DPA) S,H<-E
S7,F19 Current EPPD Request (RER) S,H->E
S7,F20 Current EPPD Data (RED) M,H<-E
S7,F23 Formatted Process Program Send (FPS) M,H<->E
S7,F24 Formatted Process Program Acknowledge (FPA) S,H<->E
S7,F25 Formatted Process Program Request (FPR) S,H<->E
S7,F26 Formatted Process Program Data (FPD) M,H<->E
S7,F27 Process Program Verification Send (PVS) S,H<-E
S7,F28 Process Program Verification Acknowledge (PVA) S,H->E
S7,F29 Process Program Verification Inquire (PVA)
S7,F30 Process Program Verification Grant (PVG)
S7,F37 Large Process Program Send S,H <-> E,reply
S7,F38 Large Process Program Acknowledge S,H <-> E
S7,F39 Large Formatted Process Program Send S,H <-> E,reply
S7,F40 Large Formatted Process Program Acknowledge S,H <-> E
S7,F41 Large Process Program Request S,H <-> E,reply
S7,F42 Large Process Program Acknowledge S,H <-> E
S7,F43 Large Formatted Process Program Request S,H <-> E,reply
S7,F44 Large Formatted Process Program Acknowledge S,H <-> E
STREAM 9: System Errors
S9,F1 Unrecognized Device ID (UDN) S,H<-E
S9,F3 Unrecognized Stream Type (USN) S,H<-E
S9,F5 Unrecognized Function Type (UFN) S,H<-E
S9,F7 Illegal Data (IDN) S,H<-E
S9,F9 Transaction Timer Timeout (TTN) S,H<-E
S9,F11 Data Too Long (DLN) S,H<-E
S9,F13 Conversation Timeout (CTN) S,H<-E
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STREAM 10: Terminal Services
S10,F1 Terminal Request (TRN) S,H<-E
S10,F2 Terminal Request Acknowledge (TRA) S,H->E
S10,F3 Terminal Display, Single (VTN) S,H->E
S10,F4 Terminal Display, Single Acknowledge (VTA) S,H<-E
S10,F5 Terminal Display, Multi-block (VMN) M,H->E
S10,F6 Terminal Display, Multi-block Acknowledge (VMA) S,H<-E
S10,F7 Multi-block Not Allowed (MNN) S,H<-E
STREAM 14: Object Services
S14,F1 GetAttr Request S,H <-> E
S14,F2 GetAttr Data M,H <-> E
STREAM 15: Recipe Management
S15,F1 Recipe Management Multi-block Inquire S,H <-> E
S15,F2 Recipe Management Multi-block Grant S,H <-> E
S15,F21 Recipe Action Request M,H <-> E
S15,F22 Recipe Action Acknowledge M,H <-> E
S15,F27 Recipe Download Request M,H -> E
S15,F28 Recipe Download Acknowledge M,H <- E
S15,F29 Recipe Verify Request M,H -> E
S15,F30 Recipe Verify Data M,H <- E
S15,F31 Recipe Upload Request S,H -> E
S15,F32 Recipe Upload Data M,H <- E
S15,F35 Recipe Delete Request M,H -> E
S15,F36 Recipe Delete Acknowledge M,H <- E
S15,F49 Large Recipe Download Request S,H -> E,reply
S15,F50 Large Recipe Download Acknowledge S,H <- E
S15,F51 Large Recipe Upload Request S,H -> E,reply
S15,F52 Large Recipe Upload Acknowledge S,H <- E
S15,F53 Recipe Verification Send M,H <- E,reply
S15,F54 Recipe Verification Acknowledge S,H -> E
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8 GEM Compliance
This section defines compliance to the GEM standard.
It describes the fundamental GEM requirements and
additional GEM capabilities. It provides references to
other sections of the standard where detailed
requirements are located. This section also defines
standard terminology and documentation that can be
used by equipment suppliers and device manufacturers
to describe compliance with this standard.
The GEM standard contains two types of specifications:
— fundamental GEM requirements and
— requirements pertaining to additional GEM
capabilities.
The fundamental GEM requirements form the
foundation of the GEM standard. The additional GEM
capabilities provide functionality required for some
types of factory automation or functionality applicable
to specific types of equipment. Figure 8.1 illustrates the
relationship of the fundamental GEM requirements and
the additional GEM capabilities.
8.1 Fundamental GEM Requirements — All
equipment shall comply with the fundamental GEM
requirements listed in Table 8.1. Compliance to these
requirements involves precise and complete adherence
to all sections of the GEM standard referenced in Table
8.1.
Table 8.1 Fundamental GEM Requirements
Requirement Section References
State Models 3.0, 3.1, 3.3
Equipment Processing States 3.4
Host-Initiated S1,F13/F14
Scenario
4.1.5.1
Event Notification 4.2.1.1
On-line Identification 4.2.6
Error Messages 4.9
Control (Operator-Initiated) 4.12 (except 4.12.5.2)
Documentation 8.4
In addition, compliance requires adherence to the
portions of the following sections that are applicable to
the fundamental GEM requirements:
— Variable data items (GEM, Section 5)
— SECS-II data item restrictions (GEM, Section 5)
— Collection events (GEM, Section 6)
Figure 8.1
GEM Requirements and Capabilities
8.2 GEM Capabilities — The following table lists all
GEM capabilities and the sections of the GEM standard
where they are specified. These sections contain the
detailed requirements for implementing a GEM
capability. Requirements for an individual capability
include any referenced portions of the document. As an
example, the Alarm Management capability requires
implementation of the status variables
“AlarmsEnabled” and “AlarmsSet” as defined in
Section 5.
Table 8.2 Section References for GEM Capabilities
Capability Section
References
Establish Communications 4.1, 3.2
Event Notification 4.2.1.1
Dynamic Event Report
Configuration
4.2.1.2
Variable Data Collection 4.2.2
Trace Data Collection 4.2.3
Limits Monitoring 4.2.4
Status Data Collection 4.2.5
On-line Identification 4.2.6
Alarm Management 4.3
Remote Control 4.4
Equipment Constants 4.5
Process Program Management 4.6
Material Movement 4.7
Equipment Terminal Services 4.8