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SEMI F59-0302 © SEMI 2000, 2002 9 Table 2 Filter Flow Pressure Drop for Housing with Cartridge Element Remov ed Filter Unit Identification Test Num ber _____________________ Date _____________________ Operator Name _____…

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SEMI F59-0302 © SEMI 2000, 2002 8
Table 1 DUT Flow Pressure Drop for Integral Filtration Unit or Gas System
DUT Unit Identification
Test Number _____________________
Date _____________________
Operator Name _____________________
Barometric Pressure _____________________
Test Gas _____________________
Integral Filtration Unit or Gas System
Ambient
Temperature
(
o
C)
Inlet Pressure
(psig, gauge)
∆
P(Unit) Differential
Pressure, unit
(psid, differential)
Flow Meter
Reading
(units)
Normal
Flow
Rate(m
3
/hr)
SEMI F59-0302 © SEMI 2000, 2002 9
Table 2 Filter Flow Pressure Drop for Housing with Cartridge Element Removed
Filter Unit Identification
Test Number _____________________
Date _____________________
Operator Name _____________________
Barometric Pressure _____________________
Test Gas _____________________
Housing with Cartridge Removed
Ambient
Temperature
(
o
C)
Inlet Pressure
(psig, gauge)
∆
P(Housing)
Differential Pressure,
H
ousing
(psid, differential)
Flow Meter
Reading (units)
Normal
Flow Rate
(m
3
/hr)
Table 3 Filter Flow Pressure Drop for Cartridge Element
Cartridge Pressure Drop
∆P(cartridge) = ∆P(Unit) – ∆P(Housing)
Normal Flow Rate
(m
3
/hr)
∆
P(Unit) Differential
Pressure, unit
(psid, differential)
∆
P(Housing) Differential
Pressure, Housing
(psid, differential)
∆
P(cartridge) Differential
Pressure, Cartridge
(psid, differential)
SEMI F59-0302 © SEMI 2000, 2002 10
Normal Flow Rate
Differential Pressure
Test Pressure 1
Test Pressure 2
Test Pressure 3
Figure 4
Example of a Flow Pressure Drop Curve for a Filter
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