semi合集-English.pdf - 第5155页
SEMI M31-0705 © SEMI 1998, 2005 15 view, the positions of sensors on a lo ad port will be switched, with the sen sor for info pad A on the right and the sensor for info pad B on the left as one faces the tool from the fr…
SEMI M31-0705 © SEMI 1998, 2005 14
r13
2.5
y52 =
165.5 ± 0.5 mm
(6.52 ± 0.02 in.)
facial
datum
plane
x53 195
bilateral
datum
plane
y
53
190
front side of the FOSB where wafers are accessed
kinematic
coupling
pin
info pad D
info pad B
info pad C
info pad A
y17
= 27.5
x13 = 88.5
y10
= 123.5
y9
= 92.5
y18
= 40.2
r13
2.5
r14 7.5
r17 10
r13
2.5
x8 = 12.5
human
handle
(optional)
y19
= 61.1
x21 = 30
x22 = 70
x
57 180
d65 = 10 ± 0.5
x
65
= 187.5
carrier
sensing
pads
(height
z2 2
mm)
x
50 215
(
at human handle
)
x56 = 194.75 ± 0.25 (at bottom rail)
x14 = 118.5
x17 = 17.5
y40
116
y58
75
NOTE: Info pad height (z2, z26) is described in table 3.
Figure 12
Bottom View of FOSB
5.14 Retaining Features — Figure 13 and 14 show two features on the bottom of the FOSB that may be used for
retaining the FOSB onto the kinematic couplings. Retaining features are option for the FOSB with manual door,
however those are required for the FOSB with automated-shippable door. This may be needed to prevent the FOSB
from being knocked off the kinematic couplings by the action of pushing the FOSB against the front-opening
interface. The front retaining feature contains a ramp that a wheel might roll up while the FOSB is being pushed
toward the front-opening interface. The arm with the wheel (not specified here) then holds the FOSB down on the
kinematic couplings. The center retaining feature consists of an oblong slot with a chamber above it. The FOSB can
be clamped onto the kinematic couplings by inserting an oblong head on a shaft (not specified here) through the slot
and rotating it 90° in either direction. Either retaining feature would only engage after the FOSB is fully seated on
the kinematic coupling pins. Either retaining feature must be able to withstand a force in any direction of at least f60.
It is recommended that SEMI E15.1 tool load ports be designed to accommodate the minimum hole dimensions of
the retaining features to ensure carrier interchangeability. Projections on the tool load ports that mate with the
retaining features should also not interfere with the misalignment correction function of the kinematic couplings.
5.15 Sensing Pads — As shown in Figure 12, when the FOSB is fully down on the kinematic coupling, the carrier
sensing pads must be z2 above horizontal datum plane. It is recommended that the areas surrounding all of the
carrier sensing pads be designed in conjunction with the features that mate with kinematic coupling pins so that a
mechanical sensor pin cannot interfere with the lead-in function of the kinematic couplings. Other sensing pads
(called info pads and given letter names) communicate information about the carrier. Note that since this is a bottom
SEMI M31-0705 © SEMI 1998, 2005 15
view, the positions of sensors on a load port will be switched, with the sensor for info pad A on the right and the
sensor for info pad B on the left as one faces the tool from the front. Table 3 defines all dimensions.
Table 3 External FOSB Dimensions and related forces applied to FOSB (Figures 8
14)
Value Specified
Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
#1
11 60° bilateral datum plane centerline of the right and left
kinematic grooves in the top robotic
handling flange
#1
11 45 ± 1° nominal wafer centerline surface of the center hole in the top
robotic handling flange
#1
11 52 ± 1°
b
ilateral datum plane or
vertical plane rotated away
from it about nominal wafer
centerline
angled surface of the kinematic grooves
in the top robotic handling flange
#1
11 45 ± 0.5° either vertical datum plane sides of position and orientation
notches
14 30 ± 0.5° horizontal line on bilateral
datum plane
ramp of front retaining feature
d63
#1
11 35.0 + 0.9 / - 0.1 mm
(1.378 + 0.035 / -0.004 in.)
diameter centered on the
nominal wafer centerline
sides the center hole in the top robotic
handling flange at height z47
d65 8, 9, 12 10 ± 0.5 mm
(0.39 ± 0.02 in.)
diameter centered on the
intersection of x65 and the
facial datum plane
surface of cylindrical fork-lift pin holes
in left and right bottom conveyor rails
f60 None 175 N (39.3 lbf.) minimum not applicable force in any direction which both
retaining features are able to withstand
f61 None not applicable 40 N (8.99
lbf.) maximum
not applicable force that a FOSB should be able to
withstand when applied to one of the
retaining features in any direction
without negative impact to the intended
function
r13 12 2.5 mm (0.10 in.) minimum line segment along center of
carrier sensing pad
edge of carrier sensing pad
r14 12 7.5 mm (0.30 in.) minimum intersection of x21 and y10 edge of info pads A and B
r17 12 10 mm (0.39 in.) minimum intersection of x22 and y9 edge of info pads C and D
r59
#1
11 6 mm (0.24 in.) maximum not applicable radius on peak of kinematic grooves in
the top robotic handling flange
r60 13,14 16 ± 0.5 mm
(0.63 ± 0.02 in.)
nominal wafer center line ends of slot for center retaining feature
r61 13,14 16 mm (0.63 in.) minimum nominal wafer center line walls of chamber above slot in
center retaining feature
r63
#1
11 66 mm (2.60 in.) maximum nominal wafer centerline near end of the right and left kinematic
grooves in the top robotic handling
flange
r64 13 9.5 mm (0.37 in.)
maximum
not applicable corners of front retaining feature
r65 None 1 mm (0.04 in.) maximum not applicable all concave features (radius)
r66 None 2 mm (0.08 in.) maximum not applicable all required convex features (radius)
SEMI M31-0705 © SEMI 1998, 2005 16
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
r67 10 240 mm (9.45 in.) maximum y67 in front of nominal wafer
centerline
any part of FOSB
r68
#2
10 271 mm (10.67
in.) maximum
Not applicable y67 in front of nominal wafer
centerline
any part of FOSB manual door
r69 None 10 mm (0.4 in.) minimum
(required)
15 mm (0.6 in.) (recommended
for ergonomic reasons)
not applicable correctable FOSB misalignment in any
horizontal direction
x8 12 12.5 mm (0.49 in.) bilateral datum plane end of the line segment along center of
center carrier sensing pad
x13 12 88.5 mm (3.48 in.) bilateral datum plane near end of the line segment along
center of front carrier sensing pads
x14 12 118.5 mm (4.67 in.) bilateral datum plane far end of the line segment along center
of front carrier sensing pads
x17 12 17.5 mm (0.69 in.) bilateral datum plane line segment along center of rear carrier
sensing pads
x21 12 30 mm (1.18 in.) bilateral datum plane origin of radius r14 at center of info
pads A and B
x22 12 70 mm (2.76 in.) bilateral datum plane origin of radius r17 at center of info
pads C and D
x41
#1
11 30 ± 1 mm
(1.18 ± 0.04 in.)
bilateral datum plane front right orientation notch on robotic
handling flange
x42
#1
11 50 ± 1 mm
(1.97 ± 0.04 in.)
bilateral datum plane front left orientation notch on robotic
handling flange
x43
#1
11 50 ± 1 mm
(1.97 ± 0.04 in.)
bilateral datum plane rear orientation notch on robotic
handling flange
x44
#1
9, 11 53 mm (2.09 in.) maximum bilateral datum plane encroachment of FOSB underneath
robotic handling flange
x45
#1
11 65.3 ± 1 mm
(2.57 ± 0.04 in.)
bilateral datum plane nearest point of side position and
orientation notches on robotic handling
flange
x46
#1
9, 11 71 ± 1 mm
(2.80 ± 0.04 in.)
bilateral datum plane sides of robotic handling flange
x47
#1
11 58 mm (2.28 in.) minimum bilateral datum plane end of robotic handling flange front and
rear
x50 9, 10, 12 215 mm (8.46 in.) maximum bilateral datum plane furthest reach of human handles
x53 9, 10, 12 195 mm (7.68 in.) maximum bilateral datum plane FOSB sides (apart from human
handles)
x56 9, 12 194.75 ± 0.25 mm (7.667 ±
0.010 in.)
bilateral datum plane outside edge of bottom conveyor rails
x57 9, 12 180 mm (7.09 in.) maximum bilateral datum plane FOSB sides underneath bottom
conveyor rails
x60 13 8 ± 0.5 mm
(0.31 ± 0.02 in.)
bilateral datum plane sides of slot for center retaining feature
x64 13 35 mm (1.38 in.) minimum bilateral datum plane sides of front retaining feature