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SEMI E125-0305 © SEMI 2003, 2005 49 RELATED INFORMATION 6 OBJTYPES NOTICE : This rel ated infor mation is not an official part of SEMI E125 and was derived from the wo rk of the originating committee. Th is related infor…

SEMI E125-0305 © SEMI 2003, 2005 48

RELATED INFORMATION 5

TYPE DEFINITIONS

NOTICE: This related information is not an official part of SEMI E125 and was derived from the work of the

originating committee. This related information was approved for publication by full letter ballot procedures.

R5-1 Examples

R5-1.1 Figure R5-1 shows an example set of type definitions using the classes described in Section 10.5. These

types could be used for Parameters used to represent the SEMI standard ObjType, ObjId, and ContentMap attributes

of the SEMI E87 Carrier ObjType, as well as re-usable type definitions for the strings used for the ObjID and

ObjType attributes defined in SEMI E39. Note that the type descriptions conform to the SEMI type mapping

described in Section 10.5.7.

name = urn:s emi-org:t ypeNa me: E39:ObjTy peString

des cription = This is a string type f or providing the type name for ObjTypes

: T ypes: :Paramet erT ypeDef inition

language = en-US

maxCharacters = 40

: T ypes ::StringT ype

language = en-US

maxCharacters = 80

: T ypes ::StringT ype

des cription = Represent s the Content Map data s truc ture from E87.

: Types::StructureType

name = LotID

des cription = Lot ident ifier

canBeNull = f alse

: Types::Field

language = en-US

maxCharac ters = 80

: Types::StringType

name = Subs trateI D

des cription = Su bstrat e ident ifier

canBeNull = f alse

: T ypes ::F ield

language = en-US

maxCharacters = 80

: T ypes ::StringT ype

minElements = 0

maxElements = 0

elementD escription = Provides substrat e-lot ass ociat ion per s lot

: Types::ArrayType

name = urn: semi-org:typeN ame:E39:ObjID String

description = String type f or ObjIDs

: Types:: Paramete rT ypeDefinition

ty peI nformat ion

name = urn:se mi-org:t ypeName:E87: Cont entMapStruct

desc ription = E87 C ontent Map structure

: T ypes::ParameterT ypeDefinition

typeI nformation

name = urn: semi-org:typeN ame:E87:Cont entMapLis

description = List of c ontent maps

: Types:: Paramete rT ypeDefinition

typeInformation

fields

typeInformation

ty peI nformation

Figure R5-1

TypeDefinition Example

SEMI E125-0305 © SEMI 2003, 2005 49

RELATED INFORMATION 6

OBJTYPES

NOTICE: This related information is not an official part of SEMI E125 and was derived from the work of the

originating committee. This related information was approved for publication by full letter ballot procedures.

R6-1 Examples

R6-1.1 Figure R6-1 shows an abbreviated example of how to describe the E87 Carrier ObjType using the classes

from Section 10.10. Not all events and attributes available for the Carrier ObjType are shown for clarity, only the

ObjType, ObjId, and ContentMap attributes, and the creation/destruction events for the Carrier. Note that the names

and types of the attributes of the ObjType conform to the name and typing conventions described in Sections

10.4.11 and 10.5.7. ParameterTypeDefinitions have been omitted for clarity. See Related Information Section R5-1

for an example of the corresponding ParameterTypeDefinitions.

standardVers ion = E87-1101

objType = Carrier

Carrier : SEMIObjType

name = ObjType

description = The type name for this ObjType

: Parameters::Parameter

name = ObjId

description = The instance id for instances of this ObjType

: Parameters::Parameter

name = Conten tMap

desc ript ion = E87 c ontent map at tribute

: Parameters::Parameter

desc ription = Sent w hen a c arrier ins tantiates

: As sociat ions:: Event ToParamet erMap

desc ription = Sent w hen a c arrier is dest royed

: Associations ::EventToParameterMap

attributes

event s

availableParameters

name = urn:semi-org:event:E87-1101:1:Initial-Carrier

id = CarrierCreated

: Stat eMac hines:: Event

name = urn:semi-org: event :E87-1101:21: Carrier-Final

id = CarrierDestroyed

: StateMachines: :Ev ent

ev ent

event

Figure R6-1

E87 Carrier ObjType Example

RELATED INFORMATION 7

STATE MACHINES

NOTICE: This related information is not an official part of SEMI E125 and was derived from the work of the

originating committee. This related information was approved for publication by full letter ballot procedures.

R7-1 Examples

R7-1.1 Simple Pump

R7-1.1.1 Figure R7-1 shows an example state machine that could be described by the StateMachine mechanism

described in Section 10.9. The example is for a very simple vacuum pump that is either pumping down or idle.

Figure R7-1

Example — Vacuum Pump State Machine