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SEMI E116-0705 © SEMI 2002, 2005 17 VARIABLE NAME DESCRIPTION TYPE ACCESS COMMENT TaskName Name of the ta sk that was started by the module or equipment at the occurrence o f an EPT state transition. Text, 0 to 80 charac…

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SEMI E116-0705 © SEMI 2002, 2005 16
reasonable inherent knowledge of purpose regarding these activities, the tasks should be always declared as
support tasks. If the equipment or module implementing EPT does have reasonable inherent knowledge of
purpose regarding these activities, these activities shall be either (1) modeled as task faults or otherwise
blocked conditions, or (2) exempted entirely from treatment under EPT. In case 2, the affected EPT module or
modules must be in a BLOCKED state due to related conditions reported to the EPT state model(s).
10.3 Blocked Reason Text Requirements
Fault Condition: Blocked reason text should begin with “Fault: - ‘appropriate text’”
Pause Condition: Blocked reason text should begin with “Pause: - ‘appropriate text’”
Abort Condition: Blocked reason text should begin with “Abort: - ‘appropriate text’”
10.4 Configurable Disabling Of Event Reporting For Selected Transitions
10.4.1 The attribute DisableEventOnTransition may be used by the host to selectively disable EPT state model
transition events for an individual EPTTracker object independently of whether the events are enabled at the
equipment or not. This attribute is a simple list of integers 1–9 representing the disabled events.
10.4.2 For example, a list {1,4} indicates that no event reports should be sent for transitions 1 and 4. This attribute
may be set by using the SEMI E39 service SetAttr for one or more objects.
11 EPT Events
11.1 This section defines the required events and variable data associated with transitions in the EPT state model.
11.2 Table 4 defines the data variables that are valid at the time of an EPT State Change event. When the
equipment or EPT module triggers an EPTStateChange event, the value of the data variable shall be updated to
reflect the data valid at the time the event occurred.
Table 4 Variable Data Definitions – Event Variables
VARIABLE NAME DESCRIPTION TYPE ACCESS COMMENT
EPTState The new (resulting) EPT
state of the module or
equipment at the end of
an EPT state transition.
Enumerated RO 0 = IDLE
1 = BUSY
2 = BLOCKED
PreviousEPTState The previous EPT state
of the module or
equipment of an end of
an EPT state transition.
Enumerated RO 0 = IDLE
1 = BUSY
2 = BLOCKED
3 = No State
EPTStateTime Time spent in previous
EPT state for the
equipment or module.
Unsigned
integer
RO Seconds
This is the time period between the
entry into the previous EPT state
and the entry into the current EPT
State.
Clock The time and date at the
end of an EPT state
transition.
Formatted
numeric text:
timestamp
format
RO When included in an event report,
Clock represents the timestamp for
the occurrence of the event.
SEMI E116-0705 © SEMI 2002, 2005 17
VARIABLE NAME DESCRIPTION TYPE ACCESS COMMENT
TaskName Name of the task that
was started by the
module or equipment at
the occurrence of an EPT
state transition.
Text, 0 to 80
characters
RO TaskName is defined by the
equipment supplier.
TaskType The type of EPT Task
currently running on this
EPT module.
Enumerated RO 0 = No Task
1 = Unspecified
2 = Process – adding value (e.g.,
exposing)
3 = Support – incapable of adding
value (e.g., Handling/Transport)
4 = Equipment Maintenance (e.g.,
equipment initiated clean cycle)
5 = Equipment Diagnostics (e.g.,
equipment-initiated health check)
6 = Waiting (e.g., chamber waiting
for a robot to remove a substrate)
PreviousTaskName Name of the task that
was completed by the
module or equipment at
the occurrence of an EPT
state transition.
Text, 0 to 80
characters
RO
PreviousTaskType The type of the task that
was completed by the
module or equipment at
the occurrence of an EPT
state transition.
Enumerated RO 0 = No Task
1 = Unspecified
2 = Process – adding value (e.g.,
exposing)
3 = Support – incapable of adding
value (e.g., Handling/Transport)
4 = Equipment Maintenance (e.g.,
equipment initiated clean cycle)
5 = Equipment Diagnostics (e.g.,
equipment-initiated health check)
6 = Waiting (e.g., chamber waiting
for a robot to remove a substrate)
BlockedReason The number of the block
condition that initiated
the transition to the
BLOCKED state for the
module or equipment.
Enumerated RO 0 – Not Blocked
1 – Unknown
2 – Safety Threshold
3 – Error Condition
4 – Parametric Exception
5 – Aborting, Aborted
6 – Pausing, Paused
7 – Reserved
8 – Reserved
9 – Reserved
BlockedReasonText The reason why the
transition was made to
the BLOCKED state for
the module or
equipment.
Text, 0 to 80
characters
RO Description of the Blocked reason
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11.3 All events require the following data variables to be available:
< Clock > (Clock represents the timestamp for the occurrence of the event)
< EPTState >
<PreviousEPTState>
< EPTStateTime >
<TaskName>
<TaskType>
<PreviousTaskName>
<PreviousTaskType>
Additional data required for specific transitions are shown in Table 5.
Table 5 Events
EVENT NAME STATE MODEL
TRANSITION
NUMBER
DESCRIPTION REQUIRED DATA
EPTStateChange
0
1, 2, 3, 4, 5, 6, 7, 8,
9
Triggered by a EPT State change at the
equipment-level.
<EqpName >
The following additional data is
required for Transitions 5, 8
and 9:
< Blocked Reason>
< BlockedReasonText>
EPTStateChange
i
1, 2, 3, 4, 5, 6, 7, 8,
9
Triggered by an EPT State change at the
EPT module-level.
There exist i+1 EPTStateChange events,
where i is the number of EPT modules.
EPTStateChange
1
is triggered by a state
change at the 1
st
EPT module,
EPTStateChange
2
is triggered by a state
change at the 2
nd
EPT module, etc.
<ModuleName
i
>
The following additional data is
required for Transitions 5, 8
and 9:
< Blocked Reason>
< BlockedReasonText>
12 Requirements for Compliance
12.1 Table 6 provides a checklist for EPT compliance.
Table 6 EPT Compliance Statement
Fundamental EPT Requirements EPT Section Implemented EPT Compliant
EPT State Model for Equipment 9 Yes No Yes No
EPT State model for each EPT module 9 Yes No Yes No
EPTTRacker Objects 10 Yes No Yes No
EPT Events 11 Yes No Yes No
13 Related Documents
13.1.1 International SEMATECH Equipment Performance Management User Requirements Document
13.1.2 ISMT/J300E Equipment Performance Management Operator Requirements Document (URD)
13.1.3 Harel, D., “Statecharts: A Visual Formalism for Complex Systems,” Science of Computer Programming 8
(1987) 231-274.