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SEMI E54.9-0303 © SEMI 2000, 2003 8 Actuator-AO Class ID = 36, Instance = 01 through n 09 SetAttribute AaoS6 27 RestoreDefault AaoS7 7.10 Actuator-E O Object (Aeo) –– The presentation of the Actuator Enum erated Ou tput …

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SEMI E54.9-0303 © SEMI 2000, 2003 7
Sensor-AI
Class ID = 33, Instance ID = 01 through k
09 SetAttribute SaiS6
27 RestoreDefault SaiS7
7.7 Sensor-EI Object (Sei) –– The presentation of the
Sensor Enumerated Input (Sensor-EI) object instance
attributes and services are as indicated in Table 8.
Table 8 Sensor-EI Object Instance Attributes and
Services
Sensor-EI
Class ID = 34, Instance = 01 through l
Attributes
ID Attribute Name CDM Tag
01 Name SeiA1
02 Status SeiA2
03 Alarm Enable SeiA3
04 Warning Enable SeiA5
16 Value Sei16
17 ReportInhibitTimer Sei17
18 EnableReportRate Sei18
19 ReportRate Sei19
64 DebounceControl Sei64
65 AlarmStatus Sei65
66 WarningStatus Sei66
Services
ID Service Name SDM Tag
01 Reset SeiS1
03 Abort SeiS2
05 Recover SeiS3
25 Operate SeiS4
07 GetAttribute SeiS5
09 SetAttribute SeiS6
27 RestoreDefault SeiS7
7.8 Sensor-BI Object (Sbi) –– The presentation of the
Sensor Binary Input (Sensor-BI) object instance
attributes and services are as indicated in Table 9.
Table 9 Sensor-BI Object Instance Attributes and
Services
Sensor-BI
Class ID = 35, Instance ID = 01 through m
Attributes
ID Attribute Name CDM Tag
01 Name SbiA1
02 Status SbiA2
03 Alarm Enable SbiA3
04 Warning Enable SbiA5
Sensor-BI
Class ID = 35, Instance ID = 01 through m
16 Value Sbi16
17 ReportInhibitTimer Sbi17
18 EnableReportRate Sbi18
19 ReportRate Sbi19
64 DebounceControl Sbi64
65 AlarmStatus Sbi65
66 WarningStatus Sbi66
Services
ID Service Name SDM Tag
01 Reset SbiS1
03 Abort SbiS2
05 Recover SbiS3
25 Operate SbiS4
07 GetAttribute SbiS5
09 SetAttribute SbiS6
27 RestoreDefault SbiS7
7.9 Actuator-AO Object (Aao) –– The presentation of
the Actuator Analog Output (Actuator-AO) object
instance attributes and services are as indicated in Table
10.
Table 10 Actuator-AO Object Instance Attributes
and Services
Actuator-AO
Class ID = 36, Instance = 01 through n
Attributes
ID Attribute Name CDM Tag
01 Name AaoA1
02 Status AaoA2
03 Alarm Enable AaoA3
04 Warning Enable AaoA5
16 Setting Aao16
17 SafeState Aao17
18 WatchRate Aao18
19 Watchdog Aao19
64 Offset Aao64
65 Gain Aao65
66 DataType Aao66
67 DataUnits Aao67
Services
ID Service Name SDM Tag
01 Reset AaoS1
03 Abort AaoS2
05 Recover AaoS3
25 Operate AaoS4
07 GetAttribute AaoS5
SEMI E54.9-0303 © SEMI 2000, 2003 8
Actuator-AO
Class ID = 36, Instance = 01 through n
09 SetAttribute AaoS6
27 RestoreDefault AaoS7
7.10 Actuator-EO Object (Aeo) –– The presentation of
the Actuator Enumerated Output (Actuator-EO) object
instance attributes and services are as indicated in Table
11.
Table 11 Actuator-EO Object Instance Attributes
and Services
Actuator-EO
Class ID = 37, Instance ID = 01 through o
Attributes
ID Attribute Name CDM Tag
01 Name AeoA1
02 Status AeoA2
03 Alarm Enable AeoA3
04 Warning Enable AeoA5
16 Setting Aeo16
17 SafeState Aeo17
18 WatchRate Aeo18
19 Watchdog Aeo19
Services
ID Service Name SDM Tag
01 Reset AeoS1
03 Abort AeoS2
05 Recover AeoS3
25 Operate AeoS4
07 GetAttribute AeoS5
09 SetAttribute AeoS6
27 RestoreDefault AeoS7
7.11 Actuator-BO Object (Abo) –– The presentation of
the Actuator Binary Output (Actuator-BO) object
instance attributes and services are as indicated in Table
12.
Table 12 Actuator-BO Object Instance Attributes
and Services
Actuator-BO
Class ID = 38, Instance ID = 01 through p
Attributes
ID Attribute Name CDM Tag
01 Name AboA1
02 Status AboA2
03 Alarm Enable AboA3
04 Warning Enable AboA5
16 Setting Abo16
Actuator-BO
Class ID = 38, Instance ID = 01 through p
17 SafeState Abo17
18 WatchRate Abo18
19 Watchdog Abo19
Services
ID Service Name SDM Tag
01 Reset AboS1
03 Abort AboS2
05 Recover AboS3
25 Operate AboS4
07 GetAttribute AboS5
09 SetAttribute AboS6
27 RestoreDefault AboS7
7.12 Controller Object (CA) –– The presentation of the
Controller (CA) object instance attributes and services
are as indicated in Table 13.
Table 13 Controller-CA Instance Object Attributes
and Services
Controller
Class ID = 39, Instance ID = 01 through q
Attributes
ID Attribute Name CDM Tag
01 Name CAA1
02 Status CAA2
03 Alarm Enable CAA3
04 Warning Enable CAA4
16 Setpoint CAA16
17 ProcessVariable CAA17
18 ControlVariable CAA18
19 DataType CAA19
64 DataUnits CAA20
65 AlarmSettleTime CAA21
66 AlarmErrorBand CAA22
67 WarningSettleTime CAA23
68 WarningErrorBand CAA24
Services
ID Service Name SDM Tag
01 Reset CAS1
03 Abort CAS2
05 Recover CAS3
25 Operate CAS4
07 GetAttribute CAS5
09 SetAttribute CAS6
27 RestoreDefault CAS7
SEMI E54.9-0303 © SEMI 2000, 2003 9
8 Protocol Compliance
8.1 A method of testing protocol compliance is
required to verify implementation conformance to the
standard. An independent compliance testing laboratory
has been established at The University of Michigan’s
Electronics Manufacturing Laboratory for the testing of
Modbus/TCP over TCP/IP solutions. This laboratory
utilizes an established, documented and freely available
mechanism for compliance certification of devices on a
Modbus/TCP over a TCP/IP network. This certification
includes procedures and reporting mechanisms to dem-
onstrate conformance and interoperability of Modbus/
TCP devices. Information on the conformance testing
laboratory can be found on the World Wide Web.
5
Additional information on certification procedures can
also be found on the World Wide Web.
6
9 Specific Device Model Mappings
9.1 This section provides for the mapping of network
visible specific device structure and behavior, specified
in a SEMI SDM specification, to the Modbus/TCP net-
work. Each subsection is devoted to a single Specific
Device Model (SDM) specification. Additional SDM
mappings are added as sub-sections to this NCS specifi-
cation according to SEMI guidelines and the guidelines
SEMI E54. Unless otherwise noted, all attributes and
services described are instance level attributes (as
opposed to class level attributes).
NOTE 4: The formats of object instance attributes and
services are detailed in the associated SDM specification; the
presentation of object attributes and services to the
Modbus/TCP over a TCP/IP network is detailed in the tables
contained in the following sub-sections and in the
Modbus/TCP standard specifications.
NOTE 5: Relationships between object classes, including
inheritance is defined in the associated SDM specification and
the CDM specification.
9.1.1 The instance identifier of 1 through r, assigned to
an object type, refers to the possibility of multiple
instantiations of the object type. Refer to Table 2 of this
document and the CDM document for a further
explanation of object instance identifier assignments.
9.2 Specific Device Model for Mass Flow Device —
These sections detail the network mapping required to
support the Specific Device Model for Mass Flow
Devices. Table 14 summarizes the Mass Flow Device
Object types. Subsequent Tables 15 to 24 detail the
instance attributes and services associated with each
Mass Flow Device object type.
5 http://www.eecs.umich.edu/~ sbus
6 http://www.modicon.com/openmbus
Table 14 Mass Flow Device Object Types
SDM Object
Identifier
Object Name Modbus
Class ID
MFD1 (DM) Device Manager 1
MFD2 (SAC) Sensor Actuator Controller 2
MFD3 Sensor-AI-MF 129
MFD4 Sensor-AI-AT 130
MFD5 Assembly-MFM 131
MFD6 Sensor-AI-Aux 132
MFD7 Actuator-AO-MF 133
MFD8 Controller 39
MFD9 Local Link 4
MFD10 SISO 134
MFD11 SISO-Setpoint 135
MFD12 Assembly-MFC 136
9.2.1 Sensor-AI-MF –– The presentation of the Sensor
Analog Input Mass Flow (Sensor-AI-MF) object
instance attributes and services are as indicated in Table
15.
Table 15 Sensor-AI-MF Object Instance Attributes
and Services
Sensor-AI-MF
Class ID = 129, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Flow Totalizer A1
129 Flow Hours A2
130 Zero Offset Mode A5
131 Zeroing Status A6
132 Autorange Status A7
Services
ID Service Name SDM Tag
129 Perform Zero Offset S1
131 Query-Supported Gas Types S2
133 Selected Programmed Gas Type S3
135 Insert Gas Type S4
137 Delete Gas Type S5
139 Get Gas Calibration Data Value S6
141 Set Gas Calibration Data Value S7
143 Autorange S8
9.2.2 Sensor-AI-AT –– The presentation of the Sensor
Analog Input Ambient Temperature (Sensor-AI-AT)
object instance attributes and services are as indicated
in Table 16.