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SEMI E54.15-0305 © SEMI 2005 23 9.3.12 Assembly-ISPM#6 –– The presentation of the Assembly #6 In -Situ Particle Monitor (Assembly-ISPM#6) object instance attributes and serv ices are as indicated in Table 38. Table 38 A …

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SEMI E54.15-0305 © SEMI 2005 22
9.3.9 Assembly-ISPM#3 –– The presentation of the Assembly #3 In-Situ Particle Monitor (Assembly-ISPM#3)
object instance attributes and services are as indicated in Table 35.
Table 35 Assembly-ISPM#3 Object Instance Attributes and
Services
Assembly-ISPM#3
Class ID = 143, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.10 Assembly-ISPM#4 –– The presentation of the Assembly #4 In-Situ Particle Monitor (Assembly-ISPM#4)
object instance attributes and services are as indicated in Table 36.
Table 36 Assembly-ISPM#4 Object Instance Attributes and
Services
Assembly-ISPM#4
Class ID = 144, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.11 Assembly-ISPM#5 –– The presentation of the Assembly #5 In-Situ Particle Monitor (Assembly-ISPM#5)
object instance attributes and services are as indicated in Table 37.
Table 37 Assembly-ISPM#5 Object Instance Attributes and
Services
Assembly-ISPM#5
Class ID = 145, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
SEMI E54.15-0305 © SEMI 2005 23
9.3.12 Assembly-ISPM#6 –– The presentation of the Assembly #6 In-Situ Particle Monitor (Assembly-ISPM#6)
object instance attributes and services are as indicated in Table 38.
Table 38 Assembly-ISPM#6 Object Instance Attributes and
Services
Assembly-ISPM#6
Class ID = 146, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.13 Assembly-ISPM#7 –– The presentation of the Assembly #7 In-Situ Particle Monitor (Assembly-ISPM#7)
object instance attributes and services are as indicated in Table 39.
Table 39 Assembly-ISPM#7 Object Instance Attributes and
Services
Assembly-ISPM#7
Class ID = 147, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.14 Assembly-ISPM#8 –– The presentation of the Assembly #8 In-Situ Particle Monitor (Assembly-ISPM#8)
object instance attributes and services are as indicated in Table 40.
Table 40 Assembly-ISPM#8 Object Instance Attributes and
Services
Assembly-ISPM#8
Class ID = 148, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
SEMI E54.15-0305 © SEMI 2005 24
9.3.15 Assembly-ISPM#9 –– The presentation of the Assembly #9 In-Situ Particle Monitor (Assembly-ISPM#9)
object instance attributes and services are as indicated in Table 41.
Table 41 Assembly-ISPM#9 Object Instance Attributes and
Services
Assembly-ISPM#9
Class ID = 149, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.16 Assembly-ISPM#48 –– The presentation of the Assembly #48 In-Situ Particle Monitor (Assembly-ISPM#48)
object instance attributes and services are as indicated in Table 42.
Table 42 Assembly-ISPM#48 Object Instance Attributes and
Services
Assembly-ISPM#48
Class ID = 150, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4 Specific Device Model For Endpoint Device –– These sections detail the network mapping required to support
the Specific Device Model for Endpoint (EPD) Devices (see reference SEMI E54.11 ¶4.1). Table 43 summarizes
the Endpoint Device Object types. Subsequent Tables 44 to 50 details the attributes and services associated with
each Endpoint Device object type.
Table 43 Endpoint Device Object Types
SDM Object
Identifier
Object Name SafetyBUS p Class ID
EPD1 Device Manager (DM) 1
EPD2 Sensor Actuator Controller
(SAC)
2
EPD3 Sensor-BI-TH-EP 137
EPD4 Assembly-EPD#1 138
EPD5 Assembly-EPD#2 139
EPD6 Assembly-EPD#3 140
EPD7 Assembly-EPD#4 141