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SEMI E92-0302 E © SEMI 1999, 2003 2 SEMI E15.1 — Specification for 300 mm Tool Load Port SEMI E47.1 — Provisional Mechanical Specification for Boxes and Po ds Used to Transp ort and Store 300 mm Wafers SEMI E57 — Mechani…

SEMI E92-0302

SPECIFICATION FOR 300 mm LIGHT WEIGHT AND COMPACT BOX

OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD

(BOLTS/LIGHT)

This provisional specification was technically approved by the Global Physical Interfaces & Carriers

Committee and is the direct responsibility of the Japanese Physical Interfaces & Carriers Committee. Current

edition approved by the Japanese Regional Standards Committee on December 3, 2001. Initially available at

www.semi.org January 2002; to be published March 2002. Originally published September 1999.

This document was editorially modified in January 2003 to reflect the withdrawal of SEMI E44. Changes

were made to Sections 4.1, 5.2.5, 5.2.9, 5.2.18, and 5.2.19.

1 Purpose

1.1 Provide Standard for Box Opener/Loader

Interoperability — This standard is intended to provide

standard specifications such as interfaces between the

component that opens the boxes and presents the boxes

to the equipment wafer handler for unloading and

loading 300 mm wafers (BOLTS/Light unit) and higher

level part of equipment and its functions to provide:

(see Figure 1)

• High level of interchangeability/ interoperability,

• Quick attachment/detachment capability with high

mechanical repeatability,

• Light weight, and

• Compactness.

1.1.1 In order to provide a high level of

interchangeability and interoperability, this standard

specifies not only interfaces but also some of the box

opener/loader’s functions that affect interoperability.

1.2 Usage of This Standard — Interoperability

specifications defined by this standard are intended to

be used as interfaces and functionality between

BOLTS/Light compliant box opener/loader and:

• A BOLTS/M compliant loadport unit (that would

conform to SEMI E63).

• An integrated loadport such as four box

opener/loader in one chassis.

• High-densely packaged equipment that uses the

space under the box opener/loader.

1.3 SEMI Standards Compatibility — This standard is

compatible with 300 mm SEMI standards including

SEMI E15.1, E47.1, E1.9, E62, E63 and E64.

1.4 Open Cassette Application — The BOLTS/Light

unit might be configured to handle boxes that would

conform to SEMI E47.1 and SEMI E62.

1.5 A similar unit may be compatibly designed which

does not have box opener capability, but facilitates

placement of an open cassette (that would conform to

SEMI E1.9).

1.6 Carrier Capacities — This standard defines one

interface for 13 or 25 carrier capacity box opener/

loaders.

1.7 The interface specified in this standard is designed

for equipment with a sealed mini-environment, but it is

not limited to such.

2 Scope

2.1 Items Specified — This standard is intended to set

an appropriate level of specification that places minimal

limits on innovation while ensuring modularity,

interchange-ability, and interoperability including:

• Box opener/loader functions that affect

interoperability.

• Mechanical interface features between the box

opener/loader and equipment.

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This specification does not apply to the following

application:

• Direct insertion of open cassettes into load-lock

chambers.

4 Referenced Standards

4.1 SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes

Used to Transport and Store 300 mm Wafers

SEMI E15 — Specification for Tool Load Port

SEMI E92-0302

SEMI E15.1 — Specification for 300 mm Tool Load

Port

SEMI E47.1 — Provisional Mechanical Specification

for Boxes and Pods Used to Transport and Store 300

mm Wafers

SEMI E57 — Mechanical Specification for Kinematic

Couplings Used to Align and Support 300 mm Wafer

Carriers

SEMI E62 — Provisional Specification for 300 mm

Front-Opening Interface Mechanical Standard (FIMS)

SEMI E63 — Mechanical Specification for 300 mm

Box Opener/Loader to Tool Standard (BOLTS-M)

Interface

SEMI E64  Specification for 300 mm Cart to SEMI

E15.1 Docking Interface Port

4.2 Other Standard

I300I/J300 GJG  I300I/J300 Global Joint Guidance

for 300 mm Semiconductor Factories

NOTE 1: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AMHS — Automated Material Handling System

5.2 Definitions

5.2.1 bilateral datum plane — a vertical plane that

bisects the wafers and that is perpendicular to both the

horizontal and facial datum planes (as defined in SEMI

E57).

5.2.2 BOLTS/Light exclusion volume — a volume

reserved by equipment or loadport unit to put

BOLTS/Light compliant box opener/loader.

5.2.3 BOLTS/Light plane — a vertical plane that

interfaces BOLTS/Light compliant box opener/loader

and equipment.

5.2.4 bottom interface plane— an interface means

between the equipment and box opener/loader.

5.2.5 box — a protective portable container for a

cassette and/or substrate(s).

5.2.6 box opener/loader — the equipment component

that opens wafer carriers (if needed) and presents the

carriers to the equipment’s wafer handler for unloading

and loading wafers.

5.2.7 carrier — any cassette, box, pod, or boat that

contains wafers (as defined in SEMI E1.9). Also known

as wafer carrier.

5.2.8 carrier capacity — the number of substrates that

a carrier holds (as defined in SEMI E1.9).

5.2.9 cassette — an open structure that holds one or

more substrates.

5.2.10 control connection area — an area to be used

for placement of connectors for electrical signals,

power supplies, and other inlets/outlets.

5.2.11 docked facial datum plane — a vertical plane

that bisects the wafers at the carrier docked position. It

is also parallel to the load face plane specified in SEMI

E15.

5.2.12 docking stroke — the travel distance of the

carrier center between its load position (facial datum

plane) and the position where the door opening/closing

is done.

5.2.13 facial datum plane — a vertical plane that

bisects the wafers and that is parallel to the front side of

the carrier (where wafers are removed or inserted). On

equipment load ports, it is also parallel to the load face

plane specified in SEMI E15 on the side of the

equipment where the carrier is loaded and unloaded (as

defined in SEMI E57).

5.2.14 front-opening unified pod (FOUP) — a box

(that complies with SEMI E47.1) with a nonremovable

cassette (so that its interior complies with SEMI E1.9)

and with a front-opening interface (that mates with a

FIMS port that complies with SEMI E62) (as defined in

SEMI E47.1).

5.2.15 horizontal datum plane — a horizontal plane

from which projects the kinematic-coupling pins on

which the carrier sits. On equipment load ports, it is at

the load height specified in SEMI E15 and might not be

physically realized as a surface (as defined in SEMI

E57).

5.2.16 load face plane — the furthest physical vertical

boundary plane from the cassette centroid or carrier

centroid on the side (or sides) of the equipment where

loading of the equipment is intended (as defined in

SEMI E15).

5.2.17 loading slider area — two flat surfaces on

equipment which may be used by a maintenance

supporting mechanism (not defined in this standard) to

support the box opener/loader during attachment and

detachment.

5.2.18 minienvironment — a localized environment

created by an enclosure to isolate the product from

contamination and people.

5.2.19 pod — a box having a Standard Mechanical

Interface (SMIF) per SEMI E19.

SEMI E92-0302

5.2.20 seal zone — a surface on the equipment at the

BOLTS/Light plane for sealing to the box

opener/loader.

5.2.21 side interface feature — an interface means to

perform a seal between the mini-environment of the

equipment and box opener/loader.

5.2.22 wafer carrier — any cassette, box, pod, or boat

that contains wafers (as defined in SEMI E15).

6 Functional Requirements

6.1 This standard does not define actual

implementation but requires functional compliance with

the following standards for interchangeability and

interoperability of box opener/loader.

6.2 The box opener/loader of this standard should be

compliant with related sections of factory interface

standards such as SEMI E15.1, SEMI E57, SEMI E47.1

and SEMI E62.

6.3 Outer Dimensions and Physical Factory Material

Delivery Interface Compatibility — Physical

dimensions, such as clearances and trenches required

for factory delivery systems (human or automated),

should be compliant with SEMI E15.1.

6.3.1 Carrier Registration — The physical alignment

mechanism for the box consists of features (not

specified in this standard) on the box that mate with

three pins underneath as defined in SEMI E57. Primary

kinematic coupling pins should be used.

6.3.2 Loadport Pitch — The loadport pitch which

conforms to this standard is S ≥ 475 mm (minimum

value for FOUP without handles as defined in SEMI

E15.1).

6.4 Carrier ID Reader/Writer Head Exclusion Volume

— The box opener/loader compliant with this standard

should have a carrier ID reader/writer head exclusion

volume defined in SEMI E15.1 for automated units that

read or write to an ID tag. Regarding the box

opener/loader, the front end of this exclusion volume is

limited by y111. And the rear end of this exclusion

volume is defined in SEMI E15.1 D3. The difference

between y111 and SEMI E15.1 D4 should be supplied

by the equipment.

6.5 Carrier Sensing — The box opener/loader

compliant with this standard has to have the following

capabilities:

6.5.1 Carrier Presence Sensor — Carrier sensing

capability which detects carrier presence regardless of

its correct placement.

6.5.2 Carrier Placement Sensor — Carrier sensing

capability which detects correct carrier placement on

the kinematic coupling.

6.6 Info-pad Interfaces — Optional info-pad

sensing/detecting capability as defined in SEMI E1.9

and SEMI E15.1.

6.6.1 Info-pad A, B Sensors — Optional carrier sensing

capability which detects carrier type as defined in SEMI

E1.9 and SEMI E15.1.

6.6.2 FEOL/BEOL Lockout Pin — Optional pin that

physically detects/rejects a misplaced carrier by using

info-pads C and D to distinguish a FEOL carrier vs. a

BEOL carrier. This pin should be capable of being

installed easily after the equipment is delivered.

6.7 Box to Equipment Sealing Interface and Door

Lock/Unlock Interface — This standard requires a box

to equipment seal interface and door lock/unlock

interface compliant with SEMI E47.1 and SEMI E62.

This standard does not specify any of the actual design.

7 Mechanical Requirements

7.1 Datum Planes and Dimensioning Rules —

Dimensions defined in this standard are determined

with respect to the following datum planes and default

dimensioning rules.

NOTE 2: Unless otherwise stated, perpendicularity and

parallelism are implicitly defined in the geometric tolerances.

7.1.1 Three Common Datum Planes — Many of the

dimensions of the BOLTS/Light interface are

determined with respect to the three orthogonal datum

planes defined in SEMI E57: the horizontal datum

plane, the facial datum plane, and the bilateral datum

plane.

7.1.2 Symmetry — All of the dimensions for the

interface are bilaterally symmetric about the bilateral

datum plane unless otherwise noted. These dimensions

are shown in Figures 2 and 3 and specified in Table 1.

7.1.3 Inner and Outer Radii — All required concave

features may have a radius of up to r100 to allow

cleaning and to prevent contaminant build-up. All

required convex features may also have a radius of up

to r101 to prevent small contact patches with large

stresses that might cause wear and particles. Note that

these limits on the radius of all required features are

specified as a maximum (not a minimum) to ensure that

the required features are not rounded off too much. The

lower bound on the radius is up to the equipment

supplier. Note also that this radius applies to every

required feature unless another radius is called out

specifically.