semi合集-English.pdf - 第5538页

SEMI P10-0705 © SEMI 1990, 2005 33 <xs:element name="ResultFileName" type="xs:string"/> </xs:sequence> <xs:sequence minOccurs="0" maxOccurs="unbounded"> <xs:el…

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SEMI P10-0705 © SEMI 1990, 2005 32
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DataFracture"
type="DataFractureType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartDataFileParameters"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndDataFileParameters"/>
</xs:complexType>
<xs:complexType name="DataFunctionType">
<xs:sequence>
<xs:element name="DataFunctionPurpose" type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="SoftwareName" type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="SoftwareRevision"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="RunsetName"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="RunsetRevision"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataLocation"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="ParameterFileName"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element
name="ParameterFileRevision" type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="InputFileName"
type="xs:string"/>
<xs:element name="InputFileFormat"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="TopCell"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataLocation"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
SEMI P10-0705 © SEMI 1990, 2005 33
<xs:element name="ResultFileName"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="SummaryFileName"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="LogFileName"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartDataFunction"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndDataFunction"/>
</xs:complexType>
<xs:complexType name="DataFractureType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Sizing" type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="SizingRule"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SizingBorderRule"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FracturingScale" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DataScaleFactor" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternAddressSize"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DarkInternalWindow"
type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ClearInternalWindow"
type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ExternalWindow" type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 34
<xs:element name="Rotation" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Mirror" type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartDataFracture"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndDataFracture"/>
</xs:complexType>
<xs:complexType name="JobDataType">
<xs:sequence>
<xs:element name="JobFormat" type="xs:string"/>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartJobData"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndJobData"/>
</xs:complexType>
<xs:complexType name="StandardPatternType">
<xs:sequence>
<xs:element name="PatternFormat" type="xs:string"/>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartStandardPattern"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndStandardPattern"/>
</xs:complexType>
<xs:complexType name="MaskGroupType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MaskOptions"
type="MaskOptionsType"/>
</xs:sequence>
<xs:element name="PlacementTopCell" type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="MaskDefinition"
type="MaskDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CellDefinition"
type="CellDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="PatternGroup"
type="PatternGroupType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartMaskGroup"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndMaskGroup"/>