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SEMI E85-0705 © SEMI 1999, 2005 6 Dim Definition Option A Option B Option C Option D Option E Option F D6 minimum distance or length of the center exclusion volume of the interbay transport s ystem measured backwards fro…
SEMI E85-0705 © SEMI 1999, 2005 5
NOTE 2: The bottom of the SEMI E85 exclusion volumes defines the top of the SEMI E84 connector zones. For Option A, the
top of the connector zone is defined by dimension H2. For Option B, the top of the connector zone is defined by dimension H0.
For Options C, D, and E and F, the top of the connector zone is defined by dimension H4.
Table 1 Dimensional Requirements for 300 mm AMHS Interbay Load Ports (FOUP ONLY)
Dim Definition Option A Option B Option C Option D Option E Option F
(deg)
tilt of the open cassette when placed
to the load port
0 SEMI E15.1 0 0 0 N/A
A1 minimum width of the load port
cavity or cut-out in the stocker
measured from the bilateral datum
plane to the nearest obstruction on
the stocker
375 mm N/A 600 mm
for
HT only
(See
#1
.)
N/A N/A N/A
A2 width of the exclusion zone for
center pickup using the secondary
kinematic coupling pins (symmetric
about the bilateral datum plane)
213 +2/-0
mm
N/A 213 +2/-0
mm
213 +2/-0
mm
213 + 2/-0
A3 Minimum width of the exclusion
zone (starting at a distance D10
from the FDP) for center pickup
using the secondary kinematic
coupling pins (symmetric about the
bilateral datum plane)
N/A N/A 225 mm 225 mm N/A N/A
A6 maximum protrusion of the interbay
transport measured from the
bilateral datum plane of the
transport (start of the exclusion
volume for fork-lift or conveyor rail
transfer)
N/A SEMI E15.1 N/A N/A 165 mm N/A
A8 minimum width of the exclusion
volume for the fork-lift or conveyor
rail transfer mechanism measured
from the bilateral datum plane (end
of the exclusion volume for fork-lift
or conveyor rail transfer)
N/A N/A N/A N/A 245 mm
(80 wide)
N/A
C3 height of the nearest stocker
obstacle above the carrier during
transfer measured from the HDP of
the transportthe maximum height
of the carrier. This creates an
exclusion zone for use of the top
robotic flange.
150 mm SEMI E15.1 N/A N/A N/A N/A
C5 distance from the facial datum
plane of the transport to the internal
stocker boundary
N/A SEMI E15.1 250 ± 50
mm
N/A N/A 250 ± 50
mm
D distance from the stocker boundary
to the facial datum plane on the
stocker load port (A,B)
240 mm SEMI E15.1
250 +0/-10
mm
N/A N/A N/A N/A
D1 maximum distance or protrusion of
any load port feature measured
from the facial datum plane on the
load port (inside the stocker cut-
out)
150 mm SEMI E15.1
200 +10/-4
mm
N/A N/A N/A TBD
D5 distance from the facial datum
plane of the interbay transport
system to the stocker boundary
N/A SEMI E15.1 N/A 250 ± 50 mm 250 ± 50
mm
N/A
SEMI E85-0705 © SEMI 1999, 2005 6
Dim Definition Option A Option B Option C Option D Option E Option F
D6 minimum distance or length of the
center exclusion volume of the
interbay transport system measured
backwards from the facial datum
plane of the interbay transport
system to allow for stocker pick up
using the secondary kinematic pins
N/A SEMI E15.1 90 mm 90 mm TBD TBD
D10 distance measured from the facial
datum plane (FDP) where the depth
of the center exclusion zone lowers
from H2 to H4 in the interbay
transport system (C,D)
N/A SEMI E15.1 150 mm or
230 mm
#1
150 mm or
230 mm
#1
150 mm or
230 mm
#1
150 mm or
230 mm
#1
H Height of the horizontal datum
plane of the interbay load port
(stocker) or interbay transport
system determined by user and
supplier
TBD
#1
and must
be
adjustable
by ± 10
mm
TBD
#1
and must
be
adjustable
by ± 10 mm
TBD
#1
and
must be
adjustable
by ± 10 mm
TBD
#1
and
must be
adjustable by
10 mm
TBD
#1
and
must be
adjustable
by 10 mm
TBD
#1
and
must be
adjustable
by 10 mm
H2 depth of exclusion zone below the
horizontal datum plane (HDP) of
the stocker load port (A,B) OR the
interbay transport system (C,D)
130 mm SEMI E15.1 100 mm 100 mm 100 mm 100 mm
H4 depth of the exclusion zone below
the horizontal datum plane (HDP)
of interbay transport system (C,D)
starting at a distance D10 from the
facial datum plane (FDP)
N/A N/A 170 mm 170 mm 170 mm 170 mm
S distance between the bilateral
datum plane of two adjacent load
ports
450 mm 505 mm N/A N/A N/A N/A
T3 height of the open volume in that it
allows the interbay transport system
to enter the stocker the transport.
This exclusion zone is occupied by
the transport itself, the maximum
height of the carrier, a clearance
above carrier, and a clearance
below the transport.
N/A N/A 800 mm or
1150 mm
#1
N/A N/A N/A
#1
User to specify which dimension (see §6).
SEMI E85-0705 © SEMI 1999, 2005 7
Active Transport Delivers a Carrier to an Internal Stocker Position
Option A
A
ctive
Vehicle
Top View
NOTE 1: Top view of center exclusion
volume. In Option A the Stocker uses the
primary set of kinematic pins.
D
D
1
S
A
1
A
1
Defines front view of
exclusion volume
defined in Section 7.6
(refer to Figure 7).
A
2
H
2
Front View
Stocker
Vehicle
H
2
HDP
C
3
Side View
NOTE 2: Transport
vehicle uses secondary
set of kinematic pins.
Internal boundary
of stocker
Option A H2 (min) A1 (min) A2 (range) C3 (min) D (max) D1 (max) S (min)
deg)
FOUP 130 375 213 +2/-0 150 240 150 450 0
Open Cassette 140 375 213 +2/-0 100 270 150 450 2
Figure 1
AMHS Interbay Load Port Option A