semi合集-English.pdf - 第294页

SEMI E47.1-0305 © SEMI 1997, 2005 9 x 42 =50±1 x 41 =30±1 y 45 =65.3±1 y 47  58 x 44  53 facial datum plane bilate ral datum plane front side of the carrier where wafers are accessed y 41 =30±1 y 46 =71±1 x 43 =50 ±1 x…

100%1 / 7923
SEMI E47.1-0305 © SEMI 1997, 2005 8
facial
datum
plane
bilateral
datum
plane
y
64
=42.1±0.5
advancing
box
sensing
pads
y 66
50
x67
34
x66
31
carrier
sensing
pads
kinematic
pins
info pad D
(FEOL or BEOL)
info pad B
(box or cassette)
info pad A
info pad C
Figure 11
Sensing Pads on Bottom of FOUP
SEMI E47.1-0305 © SEMI 1997, 2005 9
x42 =50±1 x41 =30±1
y45
=65.3±1
y47
58
x44 53
facial
datum
plane
bilateral
datum
plane
front side of
the carrier
where wafers
are accessed
y41 =30±1
y46
=71±1
x43 =50±1
x47
58
(16x)
=45
±0.5°
position
notch
orientation
notch
x46 =71±1
x45 =
65.3±1
y44 53
d63
=35±0.1
y68 55
x69 =7.6±0.1
=60°
r63 66
top
of box
bilateral
datum plane
horizontal
datum plane
z
47
=210 (330)
±1
position notch
d
63
=35±0.1
cross-
section
above
x
69 =7.6±0.1
=45±1°
=52±1°
x
45 =65.3±1
x
46 =71±1
z49 8
z
48
15
(numbers in parentheses are for 25-wafer FOUPs, if different)
z
50
5
r
59
6
Figure 12
Top Robotic Handling Flange
SEMI E47.1-0305 © SEMI 1997, 2005 10
HORIZONTAL DATUM PLANE
z43=2±1
FACIAL DATUM PLANE
FOUP BOTTOM
SURFACE
THEORETICALLY POSSIBLE PROTRUSION
RESULTING FROM TOLERANCE
DIFFERENCE BETWEEN
E47.1 AND E62
OPTIONAL FRONT CONVEYOR
SURFACE
(MUST BE COPLANAR WITH THE
BOTTOM OF THE FRONT SEAL ZONE
OR FARTHER FROM THE HDP THAN
THE BOTTOM OF THE FRONT SEAL
ZONE. THE OPTIONAL FRONT
CONVEYOR SURFACE MUST BE
COPLANAR WITH THE SIDE
CONVEYOR RAILS.)
z316
7.0
Optional Conveyo
r
Feature Placement
Volume
COPLANAR WITH THE LEFT AND
RIGHT BOTTOM CONVEYOR
RAILS.)
Figure 13
Side View of FOUP Showing Optional Front Conveyor Surface Feature