semi合集-English.pdf - 第2077页
SEMI E54.10-0600 © SEMI 2 000 22 Data Inde x Source Objec t ID Source Attribu te ID Des cription Warning Trip Point Hig h (See NOT E 1.) 6 I SPMD3 SaiA74 Sensor-AI-LCS Alar m Tr ip Po in t Low (S ee N OTE 1. ) 7 I SPMD3 …
SEMI E54.10-0600 © SEMI 200021
Data Index Source Object ID Source Attribute ID Description
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
N ≤ 1024*
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 28 Assembly-ISPM #6 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
Table 29 Assembly-ISPM #7 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A13 Device Manager
Exception Detail Alarm
Table 30 Assembly-ISPM #8 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A14 Device Manager
Exception Detail Warning
Table 31 Assembly-ISPM #9 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A13 Device Manager
Exception Detail Alarm
3 DM1 A14 Device Manager
Exception Detail Warning
Table 32 Assembly-ISPM #40 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A33 Device Manager
Gain
2 DM1 A13 Device Manager
Filter Bandwidth
3 ISPMD2 SacA65 SAC
Number of Bins
4 ISPMD3 SaiA73 Sensor-AI-LCS
Alarm Trip Point High (See NOTE 1.)
5 ISPMD3 SaiA76 Sensor-AI-LCS
SEMI E54.10-0600 © SEMI 2000 22
Data Index Source Object ID Source Attribute ID Description
Warning Trip Point High (See NOTE 1.)
6 ISPMD3 SaiA74 Sensor-AI-LCS
Alarm Trip Point Low (See NOTE 1.)
7 ISPMD3 SaiA77 Sensor-AI-LCS
Warning Trip Point Low (See NOTE 1.)
8 ISPMD4 SaiA73 Sensor-AI-SLS
Alarm Trip Point High (See NOTE 1.)
9 ISPMD4 SaiA76 Sensor-AI-SLS
Warning Trip Point High (See NOTE 1.)
10 ISPMD4 SaiA74 Sensor-AI-SLS
Alarm Trip Point Low (See NOTE 1.)
11 ISPMD4 SaiA77 Sensor-AI-SLS
Warning Trip Point Low (See NOTE 1.)
12 ISPMD5 SaiA73 Sensor-AI-MNS
Alarm Trip Point High (See NOTE 1.)
13 ISPMD5 SaiA76 Sensor-AI-MNS
Warning Trip Point High (See NOTE 1.)
14 ISPMD5 SaiA74 Sensor-AI-MNS
Alarm Trip Point Low (See NOTE 1.)
15 ISPMD5 SaiA77 Sensor-AI-MNS
Warning Trip Point Low (See NOTE 1.)
NOTE 1: Objects to which these attributes are linked are optional. If the associated object is not supported in the ISPM device, the data field for
the associated attribute in this assembly is set to zero and should be interpreted as having no meaning.
NOTICE: SEMI makes no warranties or representations as to the suitability of the specifications set forth herein for
any particular application. The determination of the suitability of the specification is solely the responsibility of the
user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other
relevant literature respecting any materials mentioned herein. These specifications are subject to change without
notice.
The user’s attention is called to the possibility that compliance with this specification may require use of
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position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in
this specification. Users of this specification are expressly advised that determination of any such patent rights or
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Copyright by SEMI® (Semiconductor Equipment and Materials
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SEMI E54.11-0301 © SEMI 20011
SEMI E54.11-0301
SPECIFIC DEVICE MODEL FOR ENDPOINT DEVICES
This specific device model was technically approved by the Global Information & Control Committee and is
the direct responsibility of the North American Information & Control Committee. Current edition approved
by the North American Regional Standards Committee on November 22, 2000. Initially available at
www.semi.org January 2001; to be published March 2001.
1 Purpose
1.1 This specification is part of a suite of standards
that specify the implementation of SEMI standards for
the Sensor/Actuator Network. The specific purpose of
this specification is to describe a network independent
application model comprised of device objects that are
common to all Endpoint Devices on a semiconductor
equipment Sensor/Actuator communication network.
2 Scope
2.1 An Endpoint device (EPD) is a device that
measures and monitors process characteristics to
determine when a specific threshold or event has been
obtained usually to signal the completion of a process
or process step. These endpoint devices are, but not
limited to, devices that may classify a process endpoint
by determining the size and count of particles in the
process environment, detecting and determining optical
light from a sample region of the environment’s space,
or determining motor current of an equipment
component.
2.2 This specification specifically addresses the
minimum attributes, services and behavior an Endpoint
(EPD) device must support to be interoperable on the
Sensor/Actuator Network.
2.3 This specification is intended to ensure a high-
degree of device interoperability on the Sensor/Actuator
Network, while still allowing flexibility for product
differentiation and technology evolution.
2.4 The model specified in this spe cification is used in
conjunction with the Sensor/Actuator Network
Common Device Model (CDM) to completely describe
the Endpoint device (EPD) as it appears from the
network interface.
2.5 This specification, together wi th the
Sensor/Actuator Network Standard, the
Sensor/Actuator Network Common Device Model, and
a Sensor/Actuator Network Communication
Specification, form a complete interoperability
specification for the EPD.
2.6 To comply with this specificat ion, a device must
implement and support, at a minimum, the required
attributes, services, and behavior identified in these
documents. Support for optional attributes, services and
behavior is not required to be compliant to this
specification. Optional attributes, services, and behavior
are specified in these documents to promote further
device interoperability as features evolve and are
adopted by more manufacturers. If optional attributes,
services, and behavior are implemented for this device
they must be implemented as identified in this
document.
2.7 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use
3 Limitations
3.1 This specification is a compan ion to a suite of
specifications that together make up the
Sensor/Actuator Network Communication standard.
Therefore, using portions of this specification that relate
to network communications necessarily requires an
understanding of the associated network specification.
3.2 As this document is a specifica tion for the
Endpoint Device Model, it does not contain any
definition of objects, attributes, services, or behavioral
descriptions that are already defined in the
Sensor/Actuator Network Common Device Model
(CDM). Additional attributes, attribute assignments,
services and/or service parameters that are Endpoint
Device specific and/or implementation specific are
contained in this specification.
3.3 While this specification is suff icient to completely
describe the EPD as it appears from the network, it does
not fully describe behavior of a specific endpoint device
type which is not visible from the network. This allows
flexibility in implementation techniques and product
differentiation between manufacturers. Manufacturer
specific objects may be defined by the manufacturer but
are, by definition, outside the scope of this standard.
3.4 This specification is compatibl e, but not compliant
with SEMI E39. This means that although this
specification does not require compliance with SEMI
E39, it is extensible such that implementations may be
developed that are fully compliant with both standards.
Note that the concepts and terminology of this
specification are compatible with those of SEMI E39.